Patents by Inventor Guangtao Han
Guangtao Han has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
-
Patent number: 11932576Abstract: The present invention discloses an aluminosilicate glass composition, aluminosilicate glass and a preparation method therefor and application thereof. Based on the total molar weight of the aluminosilicate glass composition, the aluminosilicate glass composition comprises, by oxide, 67-74 mol % of SiO2, 10-15 mol % of Al2O3, 0-5 mol % of B2O3, 1-10 mol % of MgO, 1-10 mol % of CaO, 0-3 mol % of SrO, 2-8 mol % of BaO, 0.1-4 mol % of ZnO, 0.1-4 mol % of RE2O3 and less than 0.05 mol % of R2O, wherein RE represents rare earth elements, and R represents alkali metals.Type: GrantFiled: October 16, 2019Date of Patent: March 19, 2024Assignees: TUNGHSU TECHNOLOGY GROUP CO., LTD., TUNGHSU GROUP CO., LTD.Inventors: Guangtao Zhang, Wenmei Han, Zhiyong Li, Gang Li, Junfeng Wang, Dongcheng Yan, Lihong Wang
-
Patent number: 11901447Abstract: Disclosed is a semiconductor device and a manufacturing method, comprising: forming a pad oxide layer and a silicon nitride layer on a substrate; etching the silicon nitride layer into a plurality of segments; forming an oxide layer, having an up-and-down wave shape, by performing a traditional thermal growth field oxygen method on the semiconductor device by use of the plurality of segments serving as forming-assisted structures; performing traditional processes on the semiconductor device having an up-and-down wavy semiconductor surface, to form a gate oxide layer, a polysilicon layer, and to form a source region and a drain region by implantation The semiconductor device having an up-and-down wavy channel region may be formed by a traditional thermal growth field oxygen method, thus the manufacturing processes are simple, the cost is low, and the completed device may have a larger effective channel width and a lower on-state resistance.Type: GrantFiled: February 28, 2023Date of Patent: February 13, 2024Assignee: JOULWATT TECHNOLOGY CO., LTD.Inventor: Guangtao Han
-
Patent number: 11855229Abstract: Disclosed is a semiconductor structure and a manufacturing method. The semiconductor structure includes an N-type doped region in a substrate; a metal structure on a surface of the substrate and including a middle portion and an edge portion, wherein the middle portion is in contact with the N-type doped region so as to form an SBD; a first P-type well region which is located in the N-type doped region, in contact with the edge portion and separates the edge portion from the N-type doped region; a first P-type contact region located in the first P-type well region and separated from the edge portion. When the first P-type contact region is grounded, the first P-type well region receives an anode voltage of the SBD. Low voltage drop and high frequency characteristics of the SBD are maintained on a premise of improving the breakdown voltage reducing the leak current.Type: GrantFiled: June 8, 2021Date of Patent: December 26, 2023Assignee: JOULWATT TECHNOLOGY CO., LTDInventor: Guangtao Han
-
Publication number: 20230207691Abstract: Disclosed is a semiconductor device and a manufacturing method, comprising: forming a pad oxide layer and a silicon nitride layer on a substrate; etching the silicon nitride layer into a plurality of segments; forming an oxide layer, having an up-and-down wave shape, by performing a traditional thermal growth field oxygen method on the semiconductor device by use of the plurality of segments serving as forming-assisted structures; performing traditional processes on the semiconductor device having an up-and-down wavy semiconductor surface, to form a gate oxide layer, a polysilicon layer, and to form a source region and a drain region by implantation The semiconductor device having an up-and-down wavy channel region may be formed by a traditional thermal growth field oxygen method, thus the manufacturing processes are simple, the cost is low, and the completed device may have a larger effective channel width and a lower on-state resistance.Type: ApplicationFiled: February 28, 2023Publication date: June 29, 2023Applicant: Joulwatt Technology Co., Ltd.Inventor: GUANGTAO HAN
-
Patent number: 11652169Abstract: Disclosed is a semiconductor device and a manufacturing method, comprising: forming a pad oxide layer and a silicon nitride layer on a substrate; etching the silicon nitride layer into a plurality of segments; forming an oxide layer, having an up-and-down wave shape, by performing a traditional thermal growth field oxygen method on the semiconductor device by use of the plurality of segments serving as forming-assisted structures; performing traditional processes on the semiconductor device having an up-and-down wavy semiconductor surface, to form a gate oxide layer, a polysilicon layer, and to form a source region and a drain region by implantation The semiconductor device having an up-and-down wavy channel region may be formed by a traditional thermal growth field oxygen method, thus the manufacturing processes are simple, the cost is low, and the completed device may have a larger effective channel width and a lower on-state resistance.Type: GrantFiled: May 9, 2021Date of Patent: May 16, 2023Assignee: JOULWATT TECHNOLOGY CO., LTD.Inventor: Guangtao Han
-
Patent number: 11495675Abstract: The present disclosure provides a manufacture method of an LDMOS. The manufacture method includes: forming a drift region in a substrate; forming a gate structure on the substrate, the gate structure defining a source region and a drain region which are separated from each other, and the gate structure including a gate oxide layer and a gate conductor layer which are successively stacked on the substrate; forming a first doped region in the source region, wherein the first doped region is surrounded by the drift region; forming a first barrier layer with a first opening on the source region and in connect with sidewall of the gate structure; forming a first implantation region in the source region through self-aligned implantation on the basis of the first opening of the first barrier layer; and forming a second implantation region and a third implantation region respectively.Type: GrantFiled: July 14, 2021Date of Patent: November 8, 2022Assignee: JOULWATT TECHNOLOGY CO., LTD.Inventor: Guangtao Han
-
Publication number: 20220020863Abstract: The present disclosure provides a manufacture method of an LDMOS. The manufacture method includes: forming a drift region in a substrate; forming a gate structure on the substrate, the gate structure defining a source region and a drain region which are separated from each other, and the gate structure including a gate oxide layer and a gate conductor layer which are successively stacked on the substrate; forming a first doped region in the source region, wherein the first doped region is surrounded by the drift region; forming a first barrier layer with a first opening on the source region and in connect with sidewall of the gate structure; forming a first implantation region in the source region through self-aligned implantation on the basis of the first opening of the first barrier layer; and forming a second implantation region and a third implantation region respectively.Type: ApplicationFiled: July 14, 2021Publication date: January 20, 2022Applicant: Joulwatt Technology Co., Ltd.Inventor: Guangtao Han
-
Publication number: 20210384361Abstract: Disclosed is a semiconductor structure and a method for manufacturing the same. The semiconductor structure includes a substrate; an N-type doped region in the substrate; a metal structure located on a surface of the substrate and including a middle portion and an edge portion, wherein the middle portion is in contact with the N-type doped region so as to form an SBD; a first P-type well region which is located in the N-type doped region, in contact with the edge portion and separates the edge portion from the N-type doped region; and a first P-type contact region located in the first P-type well region and separated from the edge portion. A doping concentration of the first P-type contact region is higher than a doping concentration of the first P-type well region. In a state that the first P-type contact region is grounded, the first P-type well region receives an anode voltage of the SBD.Type: ApplicationFiled: June 8, 2021Publication date: December 9, 2021Applicant: Joulwatt Technology Co., Ltd.Inventor: Guangtao Han
-
Publication number: 20210351295Abstract: Disclosed is a semiconductor device and a manufacturing method, comprising: successively forming a pad oxide layer and a silicon nitride layer on a substrate; etching the silicon nitride layer into a plurality of segments; forming an oxide layer, having an up-and-down wavy shape, by performing a traditional thermal growth field oxygen method on the obtained semiconductor device by use of the plurality of segments serving as forming-assisted structures; performing traditional processes on the obtained semiconductor device having an up-and-down wavy semiconductor surface, to form a gate oxide layer, a polysilicon layer, and to form a source region and a drain region by implantation, thus the semiconductor device comprises a channel region with an up-and-down wavy shaped can be manufactured.Type: ApplicationFiled: May 9, 2021Publication date: November 11, 2021Applicant: Joulwatt Technology Co., Ltd.Inventor: GUANGTAO HAN
-
Publication number: 20210175336Abstract: The present disclosure relates to a lateral double-diffused transistor and a manufacturing method of the transistor. The transistor comprises: a substrate; a well region and a drift region both located in the top of the substrate, a source region located in the well region, and a drain region located in the drift region; a first dielectric layer located on a surface of the drift region; a first field plate layer located above the drift region and covering a first portion of the first dielectric layer; a second dielectric layer covering a surface of part of the first field plate layer and stacked on a surface of a second portion of the first dielectric layer; a second field plate layer located on a surface of the second dielectric layer, comprising at least one contact channel. According to the present disclosure, the transistor increases breakdown voltage and reduces on-state resistance.Type: ApplicationFiled: October 30, 2020Publication date: June 10, 2021Applicant: Joulwatt Technology (Hangzhou) Co., Ltd.Inventors: Yang LU, Guangtao HAN, WEIWEI Ge
-
Patent number: 10290705Abstract: Provided are a laterally diffused metal oxide semiconductor field-effect transistor and a manufacturing method therefor. The method comprises: providing a wafer on which a first N well (22), a first P well (24) and a channel region shallow trench isolating structure (42) are formed; forming a high-temperature oxidation film on the surface of the wafer by deposition; photoetching and dryly etching the high-temperature oxidation film, and reserving a thin layer as an etching buffer layer; performing wet etching, removing the etching buffer layer in a region which is not covered by a photoresist, and forming a mini oxidation layer (52); performing photoetching and ion injection to form a second N well (32) in the first N well and form a second P well (34) in the first P well; forming a polysilicon gate (62) and a gate oxide layer on the surface of the wafer; and photoetching and injecting N-type ions to form a drain electrode (72) and a source electrode (74).Type: GrantFiled: January 29, 2016Date of Patent: May 14, 2019Assignee: CSMC TECHNOLOGIES FAB2 CO., LTD.Inventors: Feng Huang, Guangtao Han, Guipeng Sun, Feng Lin, Longjie Zhao, Huatang Lin, Bing Zhao
-
Publication number: 20180130877Abstract: Provided are a laterally diffused metal oxide semiconductor field-effect transistor and a manufacturing method therefor. The method comprises: providing a wafer on which a first N well (22), a first P well (24) and a channel region shallow trench isolating structure (42) are formed; forming a high-temperature oxidation film on the surface of the wafer by deposition; photoetching and dryly etching the high-temperature oxidation film, and reserving a thin layer as an etching buffer layer; performing wet etching, removing the etching buffer layer in a region which is not covered by a photoresist, and forming a mini oxidation layer (52); performing photoetching and ion injection to form a second N well (32) in the first N well and form a second P well (34) in the first P well; forming a polysilicon gate (62) and a gate oxide layer on the surface of the wafer; and photoetching and injecting N-type ions to form a drain electrode (72) and a source electrode (74).Type: ApplicationFiled: January 29, 2016Publication date: May 10, 2018Inventors: Feng HUANG, Guangtao HAN, Guipeng SUN, Feng LIN, Longjie ZHAO, Huatang LIN, Bing ZHAO
-
Patent number: 9947785Abstract: The present invention relates to a junction field effect transistor. The junction field effect transistor comprises a substrate (10), a buried layer in the substrate, a first well region (32) and a second well region (34) that are on the buried layer, a source lead-out region (50), a drain lead-out region (60), and a first gate lead-out region (42) that are in the first well region (32), and a second gate lead-out region (44) in the second well region (34). A Schottky junction interface (70) is disposed on the surface of the first well region (32). The Schottky junction interface (70) is located between the first gate lead-out region (42) and the drain lead-out region (60), and is isolated from the first gate lead-out region (42) and the drain lead-out region (60) by means of isolation structures. The present invention also relates to a manufacturing method for a junction field effect transistor.Type: GrantFiled: June 30, 2015Date of Patent: April 17, 2018Assignee: CSMC TECHNOLOGIES FAB1 CO., LTD.Inventors: Guangtao Han, Guipeng Sun
-
Patent number: 9865702Abstract: The present invention relates to a method for manufacturing a laterally insulated-gate bipolar transistor, comprising: providing a wafer having an N-type buried layer (10), an STI (40), and a first N well (22)/a first P well (24) which are formed successively from above a substrate; depositing and forming a high-temperature oxide film on the first N well (22) of the wafer; performing thermal drive-in on the wafer and performing photoetching and etching on the high-temperature oxide film to form a mini oxide layer (60); performing photoetching and ion implantation so as to form a second N well (32) inside the first N well (22) and second P wells (34) inside the first N well (22) and the first P well (24); then successively forming a gate oxide layer and a polysilicon gate (72), wherein one end of the gate oxide layer and the polysilicon gate (72) extends onto the second P well (34) inside the first N well (22), and the other end extends onto the mini oxide layer (60) on the second N well (32); and photoetchingType: GrantFiled: September 28, 2015Date of Patent: January 9, 2018Assignee: CSMC Technologies Fab2 Co., Ltd.Inventors: Feng Huang, Guangtao Han, Guipeng Sun, Feng Lin, Longjie Zhao, Huatang Lin, Bing Zhao, Lixiang Liu, Liangliang Ping, Fengying Chen
-
Publication number: 20180006043Abstract: A preparation method for a flat cell ROM device, comprising the steps of: providing a substrate, and forming a P well on the substrate; forming a photomask layer on the P well and performing photoetching to form an injection window; injecting P-type ions in the formed injection window to form a P-type region; injecting N-type ions in the injection window so as to form an N-type region on the P-type region; and forming a gate oxide layer and a poly-silicon gate so as to complete the preparation of a device.Type: ApplicationFiled: September 23, 2015Publication date: January 4, 2018Applicant: CSMC TECHNOLOGIES FAB2 CO., LTDInventors: Guipeng SUN, Qiong WANG, Guangtao HAN
-
Publication number: 20170358657Abstract: The present invention relates to a method for manufacturing a laterally insulated-gate bipolar transistor, comprising: providing a wafer having an N-type buried layer (10), an STI (40), and a first N well (22)/a first P well (24) which are formed successively from above a substrate; depositing and forming a high-temperature oxide film on the first N well (22) of the wafer; performing thermal drive-in on the wafer and performing photoetching and etching on the high-temperature oxide film to form a mini oxide layer (60); performing photoetching and ion implantation so as to form a second N well (32) inside the first N well (22) and second P wells (34) inside the first N well (22) and the first P well (24); then successively forming a gate oxide layer and a polysilicon gate (72), wherein one end of the gate oxide layer and the polysilicon gate (72) extends onto the second P well (34) inside the first N well (22), and the other end extends onto the mini oxide layer (60) on the second N well (32); and photoetchingType: ApplicationFiled: September 28, 2015Publication date: December 14, 2017Applicant: CSMC TECHNOLOGIES FAB1 CO., LTD.Inventors: Feng HUANG, Guangtao HAN, Guipeng SUN, Feng LIN, Longjie ZHAO, Huatang LIN, Bing ZHAO, Lixiang LIU, Liangliang PING, Fengying CHEN
-
Patent number: 9768292Abstract: Provided is a manufacturing method for a laterally diffused metal oxide semiconductor device, comprising the following steps: growing an oxide layer on a substrate of a wafer (S210); coating a photoresist on the surface of the wafer (S220); performing photoetching by using a first photoetching mask, and exposing a first implantation window after development (S230); performing ion implantation via the first implantation window to form a drift region in the substrate (S240); coating one layer of photoresist on the surface of the wafer again after removing the photoresist (S250); performing photoetching by using the photoetching mask of the oxide layer of the drift region (S260); and etching the oxide layer to form the oxide layer of the drift region (S270). Further provided is a laterally diffused metal oxide semiconductor device.Type: GrantFiled: May 16, 2014Date of Patent: September 19, 2017Assignee: CSMC TECHNOLOGIES FAB1 CO., LTD.Inventors: Shu Zhang, Guangtao Han, Guipeng Sun
-
Patent number: 9716169Abstract: A lateral double diffused metal oxide semiconductor field-effect transistor includes semiconductor substrates, body regions positioned in the semiconductor substrates, drift regions positioned in the semiconductor substrates, source regions and a body leading-out region which are positioned in the body regions and spaced from the drift regions, a field region and drain regions which are positioned in the drift regions, and gates positioned on the surfaces of the semiconductor substrates to partially cover the body regions, the drift regions and the field region, wherein the field region is of a finger-like structure and comprises a plurality of strip field regions which extend from the source regions to the drain regions and are isolated by the active regions; and the strip field regions provided with strip gate extending regions extending from the gates.Type: GrantFiled: August 15, 2014Date of Patent: July 25, 2017Assignee: CSMC TECHNOLOGIES FABI CO., LTD.Inventors: Feng Huang, Guipeng Sun, Guangtao Han
-
Publication number: 20170186856Abstract: A method for manufacturing an LDMOS device includes: providing a semiconductor substrate (200), forming a drift region (201) in the semiconductor substrate (200), forming a gate material layer on the semiconductor substrate (200), and forming a negative photoresist layer (204) on the gate material layer; patterning the negative photoresist layer (204), and etching the gate material layer by using the patterned negative photoresist layer (204) as a mask so as to form a gate (203); forming a photoresist layer having an opening on the semiconductor substrate (200) and the patterned negative photoresist layer (204), the opening corresponding to a predetermined position for forming a body region (206); and injecting the body region (206) by using the gate (203) and the negative photoresist layer (204) located above the gate (203) as a self-alignment layer, so as to form a channel region.Type: ApplicationFiled: August 18, 2015Publication date: June 29, 2017Inventor: Guangtao HAN
-
Publication number: 20170133505Abstract: The present invention relates to a junction field effect transistor. The junction field effect transistor comprises a substrate (10), a buried layer in the substrate, a first well region (32) and a second well region (34) that are on the buried layer, a source lead-out region (50), a drain lead-out region (60), and a first gate lead-out region (42) that are in the first well region (32), and a second gate lead-out region (44) in the second well region (34). A Schottky junction interface (70) is disposed on the surface of the first well region (32). The Schottky junction interface (70) is located between the first gate lead-out region (42) and the drain lead-out region (60), and is isolated from the first gate lead-out region (42) and the drain lead-out region (60) by means of isolation structures. The present invention also relates to a manufacturing method for a junction field effect transistor.Type: ApplicationFiled: June 30, 2015Publication date: May 11, 2017Inventors: Guangtao HAN, Guipeng SUN