Patents by Inventor Guangtao Han

Guangtao Han has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11932576
    Abstract: The present invention discloses an aluminosilicate glass composition, aluminosilicate glass and a preparation method therefor and application thereof. Based on the total molar weight of the aluminosilicate glass composition, the aluminosilicate glass composition comprises, by oxide, 67-74 mol % of SiO2, 10-15 mol % of Al2O3, 0-5 mol % of B2O3, 1-10 mol % of MgO, 1-10 mol % of CaO, 0-3 mol % of SrO, 2-8 mol % of BaO, 0.1-4 mol % of ZnO, 0.1-4 mol % of RE2O3 and less than 0.05 mol % of R2O, wherein RE represents rare earth elements, and R represents alkali metals.
    Type: Grant
    Filed: October 16, 2019
    Date of Patent: March 19, 2024
    Assignees: TUNGHSU TECHNOLOGY GROUP CO., LTD., TUNGHSU GROUP CO., LTD.
    Inventors: Guangtao Zhang, Wenmei Han, Zhiyong Li, Gang Li, Junfeng Wang, Dongcheng Yan, Lihong Wang
  • Patent number: 11901447
    Abstract: Disclosed is a semiconductor device and a manufacturing method, comprising: forming a pad oxide layer and a silicon nitride layer on a substrate; etching the silicon nitride layer into a plurality of segments; forming an oxide layer, having an up-and-down wave shape, by performing a traditional thermal growth field oxygen method on the semiconductor device by use of the plurality of segments serving as forming-assisted structures; performing traditional processes on the semiconductor device having an up-and-down wavy semiconductor surface, to form a gate oxide layer, a polysilicon layer, and to form a source region and a drain region by implantation The semiconductor device having an up-and-down wavy channel region may be formed by a traditional thermal growth field oxygen method, thus the manufacturing processes are simple, the cost is low, and the completed device may have a larger effective channel width and a lower on-state resistance.
    Type: Grant
    Filed: February 28, 2023
    Date of Patent: February 13, 2024
    Assignee: JOULWATT TECHNOLOGY CO., LTD.
    Inventor: Guangtao Han
  • Patent number: 11855229
    Abstract: Disclosed is a semiconductor structure and a manufacturing method. The semiconductor structure includes an N-type doped region in a substrate; a metal structure on a surface of the substrate and including a middle portion and an edge portion, wherein the middle portion is in contact with the N-type doped region so as to form an SBD; a first P-type well region which is located in the N-type doped region, in contact with the edge portion and separates the edge portion from the N-type doped region; a first P-type contact region located in the first P-type well region and separated from the edge portion. When the first P-type contact region is grounded, the first P-type well region receives an anode voltage of the SBD. Low voltage drop and high frequency characteristics of the SBD are maintained on a premise of improving the breakdown voltage reducing the leak current.
    Type: Grant
    Filed: June 8, 2021
    Date of Patent: December 26, 2023
    Assignee: JOULWATT TECHNOLOGY CO., LTD
    Inventor: Guangtao Han
  • Publication number: 20230207691
    Abstract: Disclosed is a semiconductor device and a manufacturing method, comprising: forming a pad oxide layer and a silicon nitride layer on a substrate; etching the silicon nitride layer into a plurality of segments; forming an oxide layer, having an up-and-down wave shape, by performing a traditional thermal growth field oxygen method on the semiconductor device by use of the plurality of segments serving as forming-assisted structures; performing traditional processes on the semiconductor device having an up-and-down wavy semiconductor surface, to form a gate oxide layer, a polysilicon layer, and to form a source region and a drain region by implantation The semiconductor device having an up-and-down wavy channel region may be formed by a traditional thermal growth field oxygen method, thus the manufacturing processes are simple, the cost is low, and the completed device may have a larger effective channel width and a lower on-state resistance.
    Type: Application
    Filed: February 28, 2023
    Publication date: June 29, 2023
    Applicant: Joulwatt Technology Co., Ltd.
    Inventor: GUANGTAO HAN
  • Patent number: 11652169
    Abstract: Disclosed is a semiconductor device and a manufacturing method, comprising: forming a pad oxide layer and a silicon nitride layer on a substrate; etching the silicon nitride layer into a plurality of segments; forming an oxide layer, having an up-and-down wave shape, by performing a traditional thermal growth field oxygen method on the semiconductor device by use of the plurality of segments serving as forming-assisted structures; performing traditional processes on the semiconductor device having an up-and-down wavy semiconductor surface, to form a gate oxide layer, a polysilicon layer, and to form a source region and a drain region by implantation The semiconductor device having an up-and-down wavy channel region may be formed by a traditional thermal growth field oxygen method, thus the manufacturing processes are simple, the cost is low, and the completed device may have a larger effective channel width and a lower on-state resistance.
    Type: Grant
    Filed: May 9, 2021
    Date of Patent: May 16, 2023
    Assignee: JOULWATT TECHNOLOGY CO., LTD.
    Inventor: Guangtao Han
  • Patent number: 11495675
    Abstract: The present disclosure provides a manufacture method of an LDMOS. The manufacture method includes: forming a drift region in a substrate; forming a gate structure on the substrate, the gate structure defining a source region and a drain region which are separated from each other, and the gate structure including a gate oxide layer and a gate conductor layer which are successively stacked on the substrate; forming a first doped region in the source region, wherein the first doped region is surrounded by the drift region; forming a first barrier layer with a first opening on the source region and in connect with sidewall of the gate structure; forming a first implantation region in the source region through self-aligned implantation on the basis of the first opening of the first barrier layer; and forming a second implantation region and a third implantation region respectively.
    Type: Grant
    Filed: July 14, 2021
    Date of Patent: November 8, 2022
    Assignee: JOULWATT TECHNOLOGY CO., LTD.
    Inventor: Guangtao Han
  • Publication number: 20220020863
    Abstract: The present disclosure provides a manufacture method of an LDMOS. The manufacture method includes: forming a drift region in a substrate; forming a gate structure on the substrate, the gate structure defining a source region and a drain region which are separated from each other, and the gate structure including a gate oxide layer and a gate conductor layer which are successively stacked on the substrate; forming a first doped region in the source region, wherein the first doped region is surrounded by the drift region; forming a first barrier layer with a first opening on the source region and in connect with sidewall of the gate structure; forming a first implantation region in the source region through self-aligned implantation on the basis of the first opening of the first barrier layer; and forming a second implantation region and a third implantation region respectively.
    Type: Application
    Filed: July 14, 2021
    Publication date: January 20, 2022
    Applicant: Joulwatt Technology Co., Ltd.
    Inventor: Guangtao Han
  • Publication number: 20210384361
    Abstract: Disclosed is a semiconductor structure and a method for manufacturing the same. The semiconductor structure includes a substrate; an N-type doped region in the substrate; a metal structure located on a surface of the substrate and including a middle portion and an edge portion, wherein the middle portion is in contact with the N-type doped region so as to form an SBD; a first P-type well region which is located in the N-type doped region, in contact with the edge portion and separates the edge portion from the N-type doped region; and a first P-type contact region located in the first P-type well region and separated from the edge portion. A doping concentration of the first P-type contact region is higher than a doping concentration of the first P-type well region. In a state that the first P-type contact region is grounded, the first P-type well region receives an anode voltage of the SBD.
    Type: Application
    Filed: June 8, 2021
    Publication date: December 9, 2021
    Applicant: Joulwatt Technology Co., Ltd.
    Inventor: Guangtao Han
  • Publication number: 20210351295
    Abstract: Disclosed is a semiconductor device and a manufacturing method, comprising: successively forming a pad oxide layer and a silicon nitride layer on a substrate; etching the silicon nitride layer into a plurality of segments; forming an oxide layer, having an up-and-down wavy shape, by performing a traditional thermal growth field oxygen method on the obtained semiconductor device by use of the plurality of segments serving as forming-assisted structures; performing traditional processes on the obtained semiconductor device having an up-and-down wavy semiconductor surface, to form a gate oxide layer, a polysilicon layer, and to form a source region and a drain region by implantation, thus the semiconductor device comprises a channel region with an up-and-down wavy shaped can be manufactured.
    Type: Application
    Filed: May 9, 2021
    Publication date: November 11, 2021
    Applicant: Joulwatt Technology Co., Ltd.
    Inventor: GUANGTAO HAN
  • Publication number: 20210175336
    Abstract: The present disclosure relates to a lateral double-diffused transistor and a manufacturing method of the transistor. The transistor comprises: a substrate; a well region and a drift region both located in the top of the substrate, a source region located in the well region, and a drain region located in the drift region; a first dielectric layer located on a surface of the drift region; a first field plate layer located above the drift region and covering a first portion of the first dielectric layer; a second dielectric layer covering a surface of part of the first field plate layer and stacked on a surface of a second portion of the first dielectric layer; a second field plate layer located on a surface of the second dielectric layer, comprising at least one contact channel. According to the present disclosure, the transistor increases breakdown voltage and reduces on-state resistance.
    Type: Application
    Filed: October 30, 2020
    Publication date: June 10, 2021
    Applicant: Joulwatt Technology (Hangzhou) Co., Ltd.
    Inventors: Yang LU, Guangtao HAN, WEIWEI Ge
  • Patent number: 10290705
    Abstract: Provided are a laterally diffused metal oxide semiconductor field-effect transistor and a manufacturing method therefor. The method comprises: providing a wafer on which a first N well (22), a first P well (24) and a channel region shallow trench isolating structure (42) are formed; forming a high-temperature oxidation film on the surface of the wafer by deposition; photoetching and dryly etching the high-temperature oxidation film, and reserving a thin layer as an etching buffer layer; performing wet etching, removing the etching buffer layer in a region which is not covered by a photoresist, and forming a mini oxidation layer (52); performing photoetching and ion injection to form a second N well (32) in the first N well and form a second P well (34) in the first P well; forming a polysilicon gate (62) and a gate oxide layer on the surface of the wafer; and photoetching and injecting N-type ions to form a drain electrode (72) and a source electrode (74).
    Type: Grant
    Filed: January 29, 2016
    Date of Patent: May 14, 2019
    Assignee: CSMC TECHNOLOGIES FAB2 CO., LTD.
    Inventors: Feng Huang, Guangtao Han, Guipeng Sun, Feng Lin, Longjie Zhao, Huatang Lin, Bing Zhao
  • Publication number: 20180130877
    Abstract: Provided are a laterally diffused metal oxide semiconductor field-effect transistor and a manufacturing method therefor. The method comprises: providing a wafer on which a first N well (22), a first P well (24) and a channel region shallow trench isolating structure (42) are formed; forming a high-temperature oxidation film on the surface of the wafer by deposition; photoetching and dryly etching the high-temperature oxidation film, and reserving a thin layer as an etching buffer layer; performing wet etching, removing the etching buffer layer in a region which is not covered by a photoresist, and forming a mini oxidation layer (52); performing photoetching and ion injection to form a second N well (32) in the first N well and form a second P well (34) in the first P well; forming a polysilicon gate (62) and a gate oxide layer on the surface of the wafer; and photoetching and injecting N-type ions to form a drain electrode (72) and a source electrode (74).
    Type: Application
    Filed: January 29, 2016
    Publication date: May 10, 2018
    Inventors: Feng HUANG, Guangtao HAN, Guipeng SUN, Feng LIN, Longjie ZHAO, Huatang LIN, Bing ZHAO
  • Patent number: 9947785
    Abstract: The present invention relates to a junction field effect transistor. The junction field effect transistor comprises a substrate (10), a buried layer in the substrate, a first well region (32) and a second well region (34) that are on the buried layer, a source lead-out region (50), a drain lead-out region (60), and a first gate lead-out region (42) that are in the first well region (32), and a second gate lead-out region (44) in the second well region (34). A Schottky junction interface (70) is disposed on the surface of the first well region (32). The Schottky junction interface (70) is located between the first gate lead-out region (42) and the drain lead-out region (60), and is isolated from the first gate lead-out region (42) and the drain lead-out region (60) by means of isolation structures. The present invention also relates to a manufacturing method for a junction field effect transistor.
    Type: Grant
    Filed: June 30, 2015
    Date of Patent: April 17, 2018
    Assignee: CSMC TECHNOLOGIES FAB1 CO., LTD.
    Inventors: Guangtao Han, Guipeng Sun
  • Patent number: 9865702
    Abstract: The present invention relates to a method for manufacturing a laterally insulated-gate bipolar transistor, comprising: providing a wafer having an N-type buried layer (10), an STI (40), and a first N well (22)/a first P well (24) which are formed successively from above a substrate; depositing and forming a high-temperature oxide film on the first N well (22) of the wafer; performing thermal drive-in on the wafer and performing photoetching and etching on the high-temperature oxide film to form a mini oxide layer (60); performing photoetching and ion implantation so as to form a second N well (32) inside the first N well (22) and second P wells (34) inside the first N well (22) and the first P well (24); then successively forming a gate oxide layer and a polysilicon gate (72), wherein one end of the gate oxide layer and the polysilicon gate (72) extends onto the second P well (34) inside the first N well (22), and the other end extends onto the mini oxide layer (60) on the second N well (32); and photoetching
    Type: Grant
    Filed: September 28, 2015
    Date of Patent: January 9, 2018
    Assignee: CSMC Technologies Fab2 Co., Ltd.
    Inventors: Feng Huang, Guangtao Han, Guipeng Sun, Feng Lin, Longjie Zhao, Huatang Lin, Bing Zhao, Lixiang Liu, Liangliang Ping, Fengying Chen
  • Publication number: 20180006043
    Abstract: A preparation method for a flat cell ROM device, comprising the steps of: providing a substrate, and forming a P well on the substrate; forming a photomask layer on the P well and performing photoetching to form an injection window; injecting P-type ions in the formed injection window to form a P-type region; injecting N-type ions in the injection window so as to form an N-type region on the P-type region; and forming a gate oxide layer and a poly-silicon gate so as to complete the preparation of a device.
    Type: Application
    Filed: September 23, 2015
    Publication date: January 4, 2018
    Applicant: CSMC TECHNOLOGIES FAB2 CO., LTD
    Inventors: Guipeng SUN, Qiong WANG, Guangtao HAN
  • Publication number: 20170358657
    Abstract: The present invention relates to a method for manufacturing a laterally insulated-gate bipolar transistor, comprising: providing a wafer having an N-type buried layer (10), an STI (40), and a first N well (22)/a first P well (24) which are formed successively from above a substrate; depositing and forming a high-temperature oxide film on the first N well (22) of the wafer; performing thermal drive-in on the wafer and performing photoetching and etching on the high-temperature oxide film to form a mini oxide layer (60); performing photoetching and ion implantation so as to form a second N well (32) inside the first N well (22) and second P wells (34) inside the first N well (22) and the first P well (24); then successively forming a gate oxide layer and a polysilicon gate (72), wherein one end of the gate oxide layer and the polysilicon gate (72) extends onto the second P well (34) inside the first N well (22), and the other end extends onto the mini oxide layer (60) on the second N well (32); and photoetching
    Type: Application
    Filed: September 28, 2015
    Publication date: December 14, 2017
    Applicant: CSMC TECHNOLOGIES FAB1 CO., LTD.
    Inventors: Feng HUANG, Guangtao HAN, Guipeng SUN, Feng LIN, Longjie ZHAO, Huatang LIN, Bing ZHAO, Lixiang LIU, Liangliang PING, Fengying CHEN
  • Patent number: 9768292
    Abstract: Provided is a manufacturing method for a laterally diffused metal oxide semiconductor device, comprising the following steps: growing an oxide layer on a substrate of a wafer (S210); coating a photoresist on the surface of the wafer (S220); performing photoetching by using a first photoetching mask, and exposing a first implantation window after development (S230); performing ion implantation via the first implantation window to form a drift region in the substrate (S240); coating one layer of photoresist on the surface of the wafer again after removing the photoresist (S250); performing photoetching by using the photoetching mask of the oxide layer of the drift region (S260); and etching the oxide layer to form the oxide layer of the drift region (S270). Further provided is a laterally diffused metal oxide semiconductor device.
    Type: Grant
    Filed: May 16, 2014
    Date of Patent: September 19, 2017
    Assignee: CSMC TECHNOLOGIES FAB1 CO., LTD.
    Inventors: Shu Zhang, Guangtao Han, Guipeng Sun
  • Patent number: 9716169
    Abstract: A lateral double diffused metal oxide semiconductor field-effect transistor includes semiconductor substrates, body regions positioned in the semiconductor substrates, drift regions positioned in the semiconductor substrates, source regions and a body leading-out region which are positioned in the body regions and spaced from the drift regions, a field region and drain regions which are positioned in the drift regions, and gates positioned on the surfaces of the semiconductor substrates to partially cover the body regions, the drift regions and the field region, wherein the field region is of a finger-like structure and comprises a plurality of strip field regions which extend from the source regions to the drain regions and are isolated by the active regions; and the strip field regions provided with strip gate extending regions extending from the gates.
    Type: Grant
    Filed: August 15, 2014
    Date of Patent: July 25, 2017
    Assignee: CSMC TECHNOLOGIES FABI CO., LTD.
    Inventors: Feng Huang, Guipeng Sun, Guangtao Han
  • Publication number: 20170186856
    Abstract: A method for manufacturing an LDMOS device includes: providing a semiconductor substrate (200), forming a drift region (201) in the semiconductor substrate (200), forming a gate material layer on the semiconductor substrate (200), and forming a negative photoresist layer (204) on the gate material layer; patterning the negative photoresist layer (204), and etching the gate material layer by using the patterned negative photoresist layer (204) as a mask so as to form a gate (203); forming a photoresist layer having an opening on the semiconductor substrate (200) and the patterned negative photoresist layer (204), the opening corresponding to a predetermined position for forming a body region (206); and injecting the body region (206) by using the gate (203) and the negative photoresist layer (204) located above the gate (203) as a self-alignment layer, so as to form a channel region.
    Type: Application
    Filed: August 18, 2015
    Publication date: June 29, 2017
    Inventor: Guangtao HAN
  • Publication number: 20170133505
    Abstract: The present invention relates to a junction field effect transistor. The junction field effect transistor comprises a substrate (10), a buried layer in the substrate, a first well region (32) and a second well region (34) that are on the buried layer, a source lead-out region (50), a drain lead-out region (60), and a first gate lead-out region (42) that are in the first well region (32), and a second gate lead-out region (44) in the second well region (34). A Schottky junction interface (70) is disposed on the surface of the first well region (32). The Schottky junction interface (70) is located between the first gate lead-out region (42) and the drain lead-out region (60), and is isolated from the first gate lead-out region (42) and the drain lead-out region (60) by means of isolation structures. The present invention also relates to a manufacturing method for a junction field effect transistor.
    Type: Application
    Filed: June 30, 2015
    Publication date: May 11, 2017
    Inventors: Guangtao HAN, Guipeng SUN