Patents by Inventor Guenter Kemmerer

Guenter Kemmerer has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 5909995
    Abstract: A device for transporting substrates through a vacuum system has a flat, parallel piped, plate-shaped substrate holder with upper and lower holder areas that are moveable in a vertical position along a transport path through the system. The upper part of the substrate holder is supported without contact and is movably guided by a magnetic arrangement.
    Type: Grant
    Filed: September 26, 1997
    Date of Patent: June 8, 1999
    Assignee: Balzers Aktiengesellschaft
    Inventors: Hans Wolf, Reiner Hinterschuster, Guenter Kemmerer