Patents by Inventor Guido C. R. M. Van De Looy

Guido C. R. M. Van De Looy has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Opto-lithographic device comprising a displaceable lens system and method of controlling the imaging properties of lens system in such a device
    Patent number: 4737823
    Abstract: An opto-lithographic device comprising a lens system (13) arranged between a mask support (25) and a substrate table (33) and telecentric on one side, the lens system (13) and the mask support (25) being secured to a first holder (21) and a second holder (23), respectively, which can be displaced both simultaneously and relatively by means of a first actuator (183, 187, 189) and a second actuator (197, 199) for adjustment of focusing and enlargement. The invention provides the possibility of a simple correction of focusing and enlargement when this focusing and this enlargement are varied inter alia due to pressure or temperature variations.
    Type: Grant
    Filed: October 14, 1986
    Date of Patent: April 12, 1988
    Assignee: U.S. Philips Corporation
    Inventors: Adrianus G. Bouwer, Guido C. R. M. Van De Looy