Patents by Inventor Guido Dietzler

Guido Dietzler has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for determining the position of the edge bead removal line of a disk-like object
    Patent number: 7973931
    Abstract: A method for determining the position of an edge bead removal line of a disk-like object having an edge area and an alignment mark on the edge area is disclosed, wherein the edge area including the edge bead removal line is imaged on a line-by-line basis, an intensity profile I of the imaged edge area including the edge bead removal line is obtained with a camera on a line-by-line basis, and the edge area and the alignment mark are detected, wherein the local intensity maxima I?max of the intensity profile I are plotted as points in a diagram, segment sets are formed in the diagram, the segment sets are fitted in ellipses, and a quality criterion qges is determined for each ellipse.
    Type: Grant
    Filed: September 3, 2008
    Date of Patent: July 5, 2011
    Assignee: Vistec Semiconductor Systems GmbH
    Inventors: Detlef Michelsson, Guido Dietzler
  • Method for determining the position of the edge bead removal line of a disk-like object
    Publication number: 20090130784
    Abstract: A method for determining the position of an edge bead removal line of a disk-like object having an edge area and an alignment mark on the edge area is disclosed, wherein the edge area including the edge bead removal line is imaged on a line-by-line basis, an intensity profile I of the imaged edge area including the edge bead removal line is obtained with a camera on a line-by-line basis, and the edge area and the alignment mark are detected, wherein the local intensity maxima I?max of the intensity profile I are plotted as points in a diagram, segment sets are formed in the diagram, the segment sets are fitted in ellipses, and a quality criterion qges is determined for each ellipse.
    Type: Application
    Filed: September 3, 2008
    Publication date: May 21, 2009
    Applicant: VISTEC Semiconductor Systems GmbH
    Inventors: Detlef Michelsson, Guido Dietzler