Patents by Inventor Guido Friedrich Siemons

Guido Friedrich Siemons has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Power supply for a discharge produced plasma EUV source
    Patent number: 9516731
    Abstract: A power supply for providing HV power to a lithography illumination source comprising a HV power source arranged to provide the HV power, a HV power transmission line arranged to transmit the HV energy from the HV power source and one or more RF terminations provided on one or more of an input end of the transmission line or an output end of the transmission line. The one or more RF terminations terminate the transmission line to reduce reflection of RF energy at the end of the transmission line.
    Type: Grant
    Filed: April 19, 2012
    Date of Patent: December 6, 2016
    Assignees: ASML NETHERLANDS B.V., USHIO DENKI KABUSHIKI KAISHA
    Inventors: Martinus Jacobus Coenen, Guido Friedrich Siemons
  • POWER SUPPLY FOR A DISCHARGE PRODUCED PLASMA EUV SOURCE
    Publication number: 20150022795
    Abstract: A power supply for providing HV power to a lithography illumination source comprising a HV power source arranged to provide the HV power, a HV power transmission line arranged to transmit the HV energy from the HV power source and one or more RF terminations provided on one or more of an input end of the transmission line or an output end of the transmission line. The one or more RF terminations terminate the transmission line to reduce reflection of RF energy at the end of the transmission line.
    Type: Application
    Filed: April 19, 2012
    Publication date: January 22, 2015
    Applicants: Ushio Denki Kabushiki Kaisha, ASML Netherlands B.V.
    Inventors: Martinus Jacobus Coenen, Guido Friedrich Siemons