Patents by Inventor Gunther Breitschwerdt

Gunther Breitschwerdt has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • System for manufacturing semiconductor substrates
    Patent number: 5083364
    Abstract: A system for manufacturing substrates, in particular wafers, glass masks, and channels, having individual process stations for treating and/or processing the various substrates in a clean environment. A plurality of interchangeable and aligned process modules are provided which are connected and disconnected from a media bus in which inflow and outflow lines are situated. These lines serve to supply the process modules through the noted connection with chemicals, gases, liquids, data and energy as needed.
    Type: Grant
    Filed: March 20, 1990
    Date of Patent: January 28, 1992
    Assignee: Convac GmbH
    Inventors: Herbert Olbrich, Joseph Gentischer, Wolfgang Fruhauf, Johann Dorner, Gunther Breitschwerdt, Horst Kunze-Concewitz, Wolfgang Schmutz, Roland Mann