Patents by Inventor Guy Mendez

Guy Mendez has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Wafer processing apparatus and method
    Publication number: 20020164849
    Abstract: A method and apparatus are described for transferring processing structures between first and second processing environments. The apparatus includes a first apparatus compartment configured to provide the first processing environment and a second apparatus compartment configured to provide the second processing environment. The apparatus is preferably configured for transferring wafer structures between the processing environments. The first and second processing environments are coupled together through a transfer passage that is opened and closed in order to isolate the wafer in a small transfer volume between the processing environments. Preferably, the transfer passage is opened and closed with first and second movable tables to create the small volume transfer cavity.
    Type: Application
    Filed: June 21, 2002
    Publication date: November 7, 2002
    Inventors: Khanh Tran, Tom Kelly, Arin Chang, Guy Mendez
  • Wafer processing apparatus and method
    Patent number: 6455098
    Abstract: A method and apparatus are described for transferring processing structures between first and second processing environments. The apparatus includes a first apparatus compartment configured to provide the first processing environment and a second apparatus compartment configured to provide the second processing environment. The apparatus is preferably configured for transferring wafer structures between the processing environments. The first and second processing environments are coupled together through a transfer passage that is opened and closed in order to isolate the wafer in a small transfer volume between the processing environments. Preferably, the transfer passage is opened and closed with first and second movable tables to create the small volume transfer cavity.
    Type: Grant
    Filed: March 8, 2001
    Date of Patent: September 24, 2002
    Assignee: Semix Incorporated
    Inventors: Khanh Tran, Tom Kelly, Arin Chang, Guy Mendez
  • Wafer processing apparatus and method
    Publication number: 20010055823
    Abstract: A method and apparatus are described for transferring processing structures between first and second processing environments. The apparatus includes a first apparatus compartment configured to provide the first processing environment and a second apparatus compartment configured to provide the second processing environment. The apparatus is preferably configured for transferring wafer structures between the processing environments. The first and second processing environments are coupled together through a transfer passage that is opened and closed in order to isolate the wafer in a small transfer volume between the processing environments. Preferably, the transfer passage is opened and closed with first and second movable tables to create the small volume transfer cavity.
    Type: Application
    Filed: March 8, 2001
    Publication date: December 27, 2001
    Applicant: Semix Incorporated
    Inventors: Khanh Tran, Tom Kelly, Arin Chang, Guy Mendez