Abstract: A substrate treatment apparatus according to an aspect of the present invention includes: a support plate that supports a substrate and is provided with a heater member for heating the substrate; and a cooling unit for forcedly cooling the support plate, wherein the cooling unit includes: a cooling housing to provide a cooling space; a plurality of gas feed nozzles that is arranged in the cooling housing and supplies cooling gas toward the heater member; and a plurality of gas feed lines that is directly connected to the gas feed nozzles and supplies the cooling gas transferred from the outside to the gas feed nozzles.

Abstract: The invention relates to a method for producing two- and three-dimensionally structured, microporous and nanoporous webs made up of nanofibers in any form with a very high covering or depositing degree of the fibers by means of a predefined conductive mold (template) as a collector and to the use of the webs according to the invention. The three-dimensional structure formation can be influenced in a directed manner by the deposition density of the nanofibers generated by means of an electrospinning process, which deposition density is adjustable through the accumulation time of the fibers.