Patents by Inventor H. F. Glavish

H. F. Glavish has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 4667111
    Abstract: A radio frequency (rf) ion accelerator. A beam of ions enters the accelerator with a low initial velocity. Ions are accelerated to energies on the order of 1 mev per charge state for use in deep ion implantation of semiconductor materials. The accelerator is constructed from multiple stages or cells with each cell including an accelerating electrode coupled to an rf resonant tank circuit. The phase of the tank circuit oscillation is controlled to take into account the mass, charge, and initial velocity of the ion. After traversing the multiple cells, a focused beam of ions is directed to a workpiece.
    Type: Grant
    Filed: May 17, 1985
    Date of Patent: May 19, 1987
    Assignee: Eaton Corporation
    Inventors: H. F. Glavish, A. S. Denholm, G. K. Simcox