Patents by Inventor H. Keith Willcox

H. Keith Willcox has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Photon enhanced reactive ion etching
    Patent number: 4183780
    Abstract: A method and apparatus for modifying a surface, by either plasma etching the surface or plasma depositing a material thereon, by using vacuum ultraviolet radiation to control the modification of the surface.
    Type: Grant
    Filed: August 21, 1978
    Date of Patent: January 15, 1980
    Assignee: International Business Machines Corporation
    Inventors: Charles M. McKenna, H. Keith Willcox