Patents by Inventor Hae-Pyng Jea

Hae-Pyng Jea has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8010483
    Abstract: A system for facilitating plasma processing tool component management across plurality of tools is provided. The system includes means for receiving first component data for first plurality of components, including identification and usage history for a first plurality of components, at first database associated with first tool. The system also includes means for receiving second component data for second plurality of components at second database associated with second tool, which is different from first tool. The system further includes means for synchronizing first and second component data with third database. The synchronizing includes synchronizing between third database and at least one of first and second database rules that govern usage of at least one component of first and second plurality of components. The third database is coupled to exchange data with plurality of tools.
    Type: Grant
    Filed: August 26, 2010
    Date of Patent: August 30, 2011
    Assignee: Lam Research Corporation
    Inventors: Chung-Ho Huang, Hae-Pyng Jea, Tung Hsu, Jackie Seto
  • Publication number: 20100325084
    Abstract: A system for facilitating plasma processing tool component management across plurality of tools is provided. The system includes means for receiving first component data for first plurality of components, including identification and usage history for a first plurality of components, at first database associated with first tool. The system also includes means for receiving second component data for second plurality of components at second database associated with second tool, which is different from first tool. The system further includes means for synchronizing first and second component data with third database. The synchronizing includes synchronizing between third database and at least one of first and second database rules that govern usage of at least one component of first and second plurality of components. The third database is coupled to exchange data with plurality of tools.
    Type: Application
    Filed: August 26, 2010
    Publication date: December 23, 2010
    Inventors: Chung-Ho Huang, Hae-Pyng Jea, Tung Hsu, Jackie Seto
  • Patent number: 7814046
    Abstract: A computer-implemented method for facilitating plasma processing tool component management across plurality of tools is provided. The method includes receiving first component data for first plurality of components, including identification and usage history, at first database associated with first tool. The method also includes receiving second component data for second plurality of components at second database associated with second tool, which is different from first tool. The method further includes synchronizing first and second component data with third database. The synchronizing includes synchronizing between third database and at least one of first and second database rules that govern usage of at least one component of first and second plurality of components. The third database is coupled to exchange data with plurality of tools.
    Type: Grant
    Filed: September 29, 2006
    Date of Patent: October 12, 2010
    Assignee: Lam Research Corporation
    Inventors: Chung-Ho Huang, Hae-Pyng Jea, Tung Hsu, Jackie Seto
  • Publication number: 20080082579
    Abstract: A computer-implemented method for facilitating plasma processing tool component management across plurality of tools is provided. The method includes receiving first component data for first plurality of components, including identification and usage history, at first database associated with first tool. The method also includes receiving second component data for second plurality of components at second database associated with second tool, which is different from first tool. The method further includes synchronizing first and second component data with third database. The synchronizing includes synchronizing between third database and at least one of first and second database rules that govern usage of at least one component of first and second plurality of components. The third database is coupled to exchange data with plurality of tools.
    Type: Application
    Filed: September 29, 2006
    Publication date: April 3, 2008
    Inventors: Chung-Ho Huang, Hae-Pyng Jea, Tung Hsu, Jackie Seto