Patents by Inventor Haihui Huang

Haihui Huang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240107757
    Abstract: Embodiments of semiconductor devices and methods for forming the semiconductor devices are disclosed. In an example, a method for forming device openings includes forming a material layer over a first region and a second region of a substrate, the first region being adjacent to the second region, forming a mask layer over the material layer, the mask layer covering the first region and the second region, and forming a patterning layer over the mask layer. The patterning layer covers the first region and the second region and including openings corresponding to the first region. The plurality of openings includes a first opening adjacent to a boundary between the first region and the second region and a second opening further away from the boundary. Along a plane parallel to a top surface of the substrate, a size of the first opening is greater than a size of the second opening.
    Type: Application
    Filed: December 8, 2023
    Publication date: March 28, 2024
    Inventors: Jia He, Haihui Huang, Fandong Liu, Yaohua Yang, Peizhen Hong, Zhiliang Xia, Zongliang Huo, Yaobin Feng, Baoyou Chen, Qingchen Cao
  • Patent number: 11903195
    Abstract: Embodiments of semiconductor devices and methods for forming the semiconductor devices are disclosed. In an example, a method for forming device openings includes forming a material layer over a first region and a second region of a substrate, the first region being adjacent to the second region, forming a mask layer over the material layer, the mask layer covering the first region and the second region, and forming a patterning layer over the mask layer. The patterning layer covers the first region and the second region and including openings corresponding to the first region. The plurality of openings includes a first opening adjacent to a boundary between the first region and the second region and a second opening further away from the boundary. Along a plane parallel to a top surface of the substrate, a size of the first opening is greater than a size of the second opening.
    Type: Grant
    Filed: January 19, 2023
    Date of Patent: February 13, 2024
    Assignee: Yangtze Memory Technologies Co., Ltd.
    Inventors: Jia He, Haihui Huang, Fandong Liu, Yaohua Yang, Peizhen Hong, Zhiliang Xia, Zongliang Huo, Yaobin Feng, Baoyou Chen, Qingchen Cao
  • Publication number: 20230157020
    Abstract: Embodiments of semiconductor devices and methods for forming the semiconductor devices are disclosed. In an example, a method for forming device openings includes forming a material layer over a first region and a second region of a substrate, the first region being adjacent to the second region, forming a mask layer over the material layer, the mask layer covering the first region and the second region, and forming a patterning layer over the mask layer. The patterning layer covers the first region and the second region and including openings corresponding to the first region. The plurality of openings includes a first opening adjacent to a boundary between the first region and the second region and a second opening further away from the boundary. Along a plane parallel to a top surface of the substrate, a size of the first opening is greater than a size of the second opening.
    Type: Application
    Filed: January 19, 2023
    Publication date: May 18, 2023
    Applicant: Yangtze Memory Technologies Co., Ltd.
    Inventors: Jia HE, Haihui HUANG, Fandong LIU, Yaohua YANG, Peizhen HONG, Zhiliang XIA, Zongliang HUO, Yaobin FENG, Baoyou CHEN, Qingchen CAO
  • Patent number: 11574919
    Abstract: Embodiments of semiconductor devices and methods for forming the semiconductor devices are disclosed. In an example, a method for forming device openings includes forming a material layer over a first region and a second region of a substrate, the first region being adjacent to the second region, forming a mask layer over the material layer, the mask layer covering the first region and the second region, and forming a patterning layer over the mask layer. The patterning layer covers the first region and the second region and including openings corresponding to the first region. The plurality of openings includes a first opening adjacent to a boundary between the first region and the second region and a second opening further away from the boundary. Along a plane parallel to a top surface of the substrate, a size of the first opening is greater than a size of the second opening.
    Type: Grant
    Filed: September 10, 2020
    Date of Patent: February 7, 2023
    Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
    Inventors: Jia He, Haihui Huang, Fandong Liu, Yaohua Yang, Peizhen Hong, Zhiliang Xia, Zongliang Huo, Yaobin Feng, Baoyou Chen, Qingchen Cao
  • Patent number: 11152389
    Abstract: A method for reducing an epitaxial growth loading effect in a patterned device includes forming a first trench and a second trench in a substrate and in a first insulating layer over the substrate to form a low pattern density region and a high pattern density region. The first trench has a larger cross-sectional area than the second trench. The method further includes isolating the first trench from the second trench by using a first mask. The method further include disposing a second insulating layer in the first trench. The method further includes removing a portion of the first mask in order to expose the second trench. The method further includes growing an epitaxial layer in the second trench.
    Type: Grant
    Filed: April 16, 2020
    Date of Patent: October 19, 2021
    Assignee: Yangtze Memory Technologies Co., Ltd.
    Inventors: Zhen Fang, Haihui Huang, Er Jiang Xu, Meng Wang
  • Publication number: 20210151458
    Abstract: Embodiments of semiconductor devices and methods for forming the semiconductor devices are disclosed. In an example, a method for forming device openings includes forming a material layer over a first region and a second region of a substrate, the first region being adjacent to the second region, forming a mask layer over the material layer, the mask layer covering the first region and the second region, and forming a patterning layer over the mask layer. The patterning layer covers the first region and the second region and including openings corresponding to the first region. The plurality of openings includes a first opening adjacent to a boundary between the first region and the second region and a second opening further away from the boundary. Along a plane parallel to a top surface of the substrate, a size of the first opening is greater than a size of the second opening.
    Type: Application
    Filed: September 10, 2020
    Publication date: May 20, 2021
    Applicant: Yangtze Memory Technologies Co., Ltd.
    Inventors: Jia HE, Haihui HUANG, Fandong LIU, Yaohua YANG, Peizhen HONG, Zhiliang XIA, Zongliang HUO, Yaobin FENG, Baoyou CHEN, Qingchen CAO
  • Patent number: 10804283
    Abstract: Embodiments of semiconductor devices and methods for forming the semiconductor devices are disclosed. In an example, a method for forming device openings includes forming a material layer over a first region and a second region of a substrate, the first region being adjacent to the second region, forming a mask layer over the material layer, the mask layer covering the first region and the second region, and forming a patterning layer over the mask layer. The patterning layer covers the first region and the second region and including openings corresponding to the first region. The plurality of openings includes a first opening adjacent to a boundary between the first region and the second region and a second opening further away from the boundary. Along a plane parallel to a top surface of the substrate, a size of the first opening is greater than a size of the second opening.
    Type: Grant
    Filed: July 26, 2018
    Date of Patent: October 13, 2020
    Assignee: Yangtze Memory Technologies Co., Ltd.
    Inventors: Jia He, Haihui Huang, Fandong Liu, Yaohua Yang, Peizhen Hong, Zhiliang Xia, Zongliang Huo, Yaobin Feng, Baoyou Chen, Qingchen Cao
  • Publication number: 20200243561
    Abstract: A method for reducing an epitaxial growth loading effect in a patterned device includes forming a first trench and a second trench in a substrate and in a first insulating layer over the substrate to form a low pattern density region and a high pattern density region. The first trench has a larger cross-sectional area than the second trench. The method further includes isolating the first trench from the second trench by using a first mask. The method further include disposing a second insulating layer in the first trench. The method further includes removing a portion of the first mask in order to expose the second trench. The method further includes growing an epitaxial layer in the second trench.
    Type: Application
    Filed: April 16, 2020
    Publication date: July 30, 2020
    Applicant: Yangtze Memory Technologies Co., Ltd.
    Inventors: Zhen FANG, Haihui HUANG, Er Jiang XU, Meng WANG
  • Patent number: 10692882
    Abstract: The present disclosure describes methods and patterned devices for reducing a loading effect between a low pattern density region and a high pattern density region. The patterned device includes a substrate, a first insulating layer over the substrate, a low pattern density region, a high pattern density region, a second insulating layer, and an epitaxial grown layer. The low pattern density region includes a first trench in the first insulating layer and the substrate. The high pattern density region includes a second trench in the first insulating layer and the substrate. The second insulating layer is formed in the first trench. The epitaxial grown layer is formed in the second trench. The first trench has a larger cross-sectional area than the second trench.
    Type: Grant
    Filed: July 26, 2018
    Date of Patent: June 23, 2020
    Assignee: Yangtze Memory Technologies Co., Ltd.
    Inventors: Zhen Fang, Haihui Huang, Er Jiang Xu, Meng Wang
  • Publication number: 20190355739
    Abstract: The present disclosure describes methods and patterned devices for reducing a loading effect between a low pattern density region and a high pattern density region. The patterned device includes a substrate, a first insulating layer over the substrate, a low pattern density region, a high pattern density region, a second insulating layer, and an epitaxial grown layer. The low pattern density region includes a first trench in the first insulating layer and the substrate. The high pattern density region includes a second trench in the first insulating layer and the substrate. The second insulating layer is formed in the first trench. The epitaxial grown layer is formed in the second trench. The first trench has a larger cross-sectional area than the second trench.
    Type: Application
    Filed: July 26, 2018
    Publication date: November 21, 2019
    Applicant: Yangtze Memory Technologies Co., Ltd.
    Inventors: Zhen FANG, Haihui Huang, Er Jiang Xu, Meng Wang
  • Publication number: 20190013327
    Abstract: Embodiments of semiconductor devices and methods for forming the semiconductor devices are disclosed. In an example, a method for forming device openings includes forming a material layer over a first region and a second region of a substrate, the first region being adjacent to the second region, forming a mask layer over the material layer, the mask layer covering the first region and the second region, and forming a patterning layer over the mask layer. The patterning layer covers the first region and the second region and including openings corresponding to the first region. The plurality of openings includes a first opening adjacent to a boundary between the first region and the second region and a second opening further away from the boundary. Along a plane parallel to a top surface of the substrate, a size of the first opening is greater than a size of the second opening.
    Type: Application
    Filed: July 26, 2018
    Publication date: January 10, 2019
    Applicant: Yangtze Memory Technologies Co., Ltd.
    Inventors: Jia He, Haihui Huang, Fandong Liu, Yaohua Yang, Peizhen Hong, Zhiliang Xia, Zongliang Huo, Yaobin Feng, Baoyou Chen, Qingchen Cao
  • Patent number: 9369082
    Abstract: A mobile charging system includes a foldable solar panel and a battery configured to receive electricity generated by the solar panel and to charge one or more electric vehicles. The mobile charging system is configured to be towed or driven to locations to provide services to users. Users can park their electric vehicles under the shade of the solar panel, getting electricity either through the battery or directly from the solar panel, the hydro generator, or the wind turbine. The users can also get food from the kitchen, cooked from an electric stove or oven or microwave, cold drinks from the vending machine or refrigerator, and get online from the wireless router. Operators of the charging systems can broadcast their positions. Users can find the positions of the available systems using apps, and request services to be delivered at the user locations.
    Type: Grant
    Filed: June 18, 2015
    Date of Patent: June 14, 2016
    Inventors: Haihui Huang, Feng Ma
  • Publication number: 20150288317
    Abstract: A mobile charging system includes a foldable solar panel and a battery configured to receive electricity generated by the solar panel and to charge one or more electric vehicles. The mobile charging system is configured to be towed or driven to locations to provide services to users. Users can park their electric vehicles under the shade of the solar panel, getting electricity either through the battery or directly from the solar panel, the hydro generator, or the wind turbine. The users can also get food from the kitchen, cooked from an electric stove or oven or microwave, cold drinks from the vending machine or refrigerator, and get online from the wireless router. Operators of the charging systems can broadcast their positions. Users can find the positions of the available systems using apps, and request services to be delivered at the user locations.
    Type: Application
    Filed: June 18, 2015
    Publication date: October 8, 2015
    Inventors: HAIHUI HUANG, FENG MA
  • Publication number: 20140349464
    Abstract: A method for forming dual shallow trench isolation (STI) structure, which includes a first etching process for forming a deep STI structure in a logic region using a hard mask layer as a mask and a second etching process for forming a shallow STI structure in a pixel region using a photoresist as a mask. Independence between these two etching processes can avoid the prior art problems of double slope profile of the sidewalls of the deep STI structure and a thickness inconsistency of the hard mask layer between on the pixel region and on the logic region.
    Type: Application
    Filed: October 16, 2013
    Publication date: November 27, 2014
    Applicant: Shanghai Huali Microelectronics Corporation
    Inventors: Yushu YANG, Wei QIN, Haihui HUANG
  • Publication number: 20110320359
    Abstract: A secure communication method and device based on application layer for mobile financial service. According to the invention, the exchanged messages in the financial transaction are few, and the requirement for the processing capability of the mobile terminal is low. The invention uses the digital signature technology for information abstract based on asymmetric secret keys, and the integrity of the transaction information is guaranteed and non-repudiation requirement is met. The invention also uses digital envelop technology based on asymmetric secret keys, and the secrecy of the transaction information. The strand space theory proves that the security of the preferred embodiment of the invention can be guaranteed.
    Type: Application
    Filed: June 22, 2009
    Publication date: December 29, 2011
    Inventors: Dake Li, Jinji Zhao, Xin Lin, Haihui Huang
  • Publication number: 20110061061
    Abstract: A method for overload control between a first application and a second application based on Diameter protocol, comprising: when the first application is overloaded, overload control information is set and sent to the second application; and the second application takes an action according to the overload control information. The invention also provides a Diameter protocol based network element comprising an overload control initiating device configured to: set overload control information to be sent to an opposite network element communicating with the network element when overload happens. In addition, the invention further provides a Diameter protocol based network element comprising an overload control response device configured to: when receiving overload control information sent by the opposite side, take an action according to the overload control information.
    Type: Application
    Filed: May 15, 2008
    Publication date: March 10, 2011
    Applicant: ALCATEL LUCENT
    Inventors: Xu Chen, Yongbo Niu, Haihui Huang