Abstract: A detection device (10) includes a transmitter (110), a receiver (120), and a control unit (140). The transmitter (110) is capable of transmitting an electromagnetic wave. The receiver (120) is capable of receiving a signal (S1), that is, the electromagnetic wave transmitted from the transmitter (110) and reflected by an object (O). The control unit (140) controls the size of an instantaneous field of view (so-called IFOV) of the receiver (120).

Abstract: An electromagnetic wave from a transmitter (100) is emitted toward the outside of a first angular range (AR). A receiver (200) cannot detect an electromagnetic wave reflected at a position somewhat close to a sensor device (10), specifically, an electromagnetic wave reflected at a position apart from the sensor device (10) by less than a distance R1. Specifically, when the electromagnetic wave is reflected at the position apart from the sensor device (10) by less than the distance R1, the electromagnetic wave reaches the sensor device (10) before the first angular range (AR) reaches a Y axis. Consequently, the electromagnetic wave reflected at the position somewhat close to the sensor device (10) is not detected by the receiver (200).

Abstract: In method and apparatus for obtaining a scanning electron microscope image devoid of distortion by measuring a scanning distortion and calibrating the scanning distortion, there occurs a problem that an error takes place in dimension control owing to a scanning distortion of an electron beam. To cope with this problem, an image is obtained by scanning a predetermined region with the electron beam, a plurality of regions are selected from the image, the pattern pitch is measured in each of the regions and a scanning distortion amount is calculated from the result of measurement and then corrected.

Abstract: Correction of widths obtained by measurement of a sample with the use of a scanning electron microscope is executed with greater precision. A standard sample for correction comprises a plurality of correction mark members, the respective correction mark members, being lined up at specified intervals in a specified direction, and respective widths thereof, in the specified direction, differing from each other so as to be of respective sizes as pre-set. Measurement of the respective widths of the correction mark members is made to obtain respective measurement widths while authorized widths of the correction mark members are kept stored in an image processing unit of the scanning electron microscope to thereby find differences between the respective measurement widths, and authorized widths corresponding thereto, and the differences are stored as respective correction functions to correct the measurement width of the sample.

Abstract: The present invention provides a standard reference component for calibration for performing magnification calibration used in the scanning electron microscope with high precision, and provides a scanning electron microscope technique using it.

Abstract: In method and apparatus for obtaining a scanning electron microscope image devoid of distortion by measuring a scanning distortion and calibrating the scanning distortion, there occurs a problem that an error takes place in dimension control owing to a scanning distortion of an electron beam. To cope with this problem, an image is obtained by scanning a predetermined region with the electron beam, a plurality of regions are selected from the image, the pattern pitch is measured in each of the regions and a scanning distortion amount is calculated from the result of measurement and then corrected.

Abstract: Correction of widths obtained by measurement of a sample with the use of a scanning electron microscope is executed with greater precision. Use is made of a standard sample 40 for correction comprising a plurality of correction mark members 42a, 42b, . . . , the respective correction mark members 42a, 42b, being lined up at specified intervals kept therebetween in a specified direction, and respective widths thereof, in the specified direction, differing from each other so as to be of respective sizes as pre-set. Measurement of the respective widths of the correction mark members 42a, 42b, . . . is made to obtain respective measurement widths while authorized widths of the respective widths of the correction mark members 42a, 42b, . . .

Abstract: The present invention provides a standard reference component for calibration for performing magnification calibration used in the scanning electron microscope with high precision, and provides a scanning electron microscope technique using it.

Abstract: An optical pickup device for focusing a light beam includes a focus error detecting optical element which splits and leads return light to a photodetector. The focus error detecting element has an area quadrisected by two division lines defining a plane substantially perpendicular to the optical path of the return light for applying astigmatism to the return light in directions rotated by 90° from each other and for separating the return light into at least four by the respective quadrants. The photodetector has a plurality of spaced light receiving elements for receiving the separated return light, each receiving element has contour lines corresponding to the division lines on an image plane on which a light beam is shaped into a circular beam. The light receiving elements are comprised of two light receiving areas divided by a bisect line extending substantially in parallel with one of the contour lines.

Abstract: In an optical pickup, the focal position of the reflected light from the information bearing surface where information is to be reproduced and that of the reflected light from other information bearing surfaces are adjusted by an optical device such that the two reflected light components are separated optically.

Abstract: An optical pickup device has an irradiation optical system for focusing a light beam to form a spot on a track on an information recording surface of an optical recording medium, and a light detection optical system for leading return light reflected back from the spot to a photodetector. The optical pickup device also has a focus error detecting optical element and a photodetector.

Abstract: A recording disk has a surface provided with guide grooves for controlling the position of a recording head, and recording bits formed in the guide grooves for high-density recording. The recording bits have the shape of a tadpole in a plane. The width Ws of the recording bits is greater than the width Wg of the guide grooves. An AFM probe serving as a recording head travels along the guide grooves without running off the guide grooves. When a tip part of the AFM probe coincides with the recording bit, the tip part drops deep into the guide groove, whereby the recording bit is detected.

Abstract: An optical pickup for reading information from a recording medium comprises a light illuminating portion for illuminating a plurality of light beams having different wavefronts onto a recording surface of the recording medium to create a plurality of light spots including a first light spot and a second light spot. The first and second light spots at least partially overlap with each other. A detector receives light beams reflected by the recording medium. The detector has a first light-receiving surface for receiving reflected light of the first light spot and a second light-receiving surface for receiving reflected light of the second light spot.

Abstract: Disclosure is a pickup device of an apparatus for recording or reproducing information, by irradiation of a light beam, to and from a multi-layered recording medium having a plurality of recording layers laminated through spacer layers and formed on the recording layer a pre-pit region having a reflectivity different from a reflectivity of the surrounding. The device includes an illumination optical system having an objective lens for focusing a light beam onto any of the recording layers of the multi-layered recording medium, and a detecting optical system including a photodetector for receiving and photoelectrically converting reflection light from the recording layer of the multi-layered recording medium through the objective lens. The photodetector has a normalized detector size of a size of 10 &mgr;m2 to 50 &mgr;m2.

Abstract: A recording disk has a surface provided with guide grooves for controlling the position of a recording head, and recording bits formed in the guide grooves for high-density recording. The recording bits have the shape of a tadpole in a plane. The width Ws of the recording bits is greater than the width Wg of the guide grooves. An AFM probe serving as a recording head travels along the guide grooves without running off the guide grooves. When a tip part of the AFM probe coincides with the recording bit, the tip part drops deep into the guide groove, whereby the recording bit is detected.

Abstract: A recording and reproducing or observing apparatus based on a laser beam deflection detection method in which an object has a very small area for reflecting light. A laser beam emitted by a semiconductor laser diode passes through a collimator lens and a stop. The beam passes through the lens and stop and is reflected by a polarization beam splitter and focused by an objective lens onto a surface of a cantilever. Reflected light from the cantilever surface is focused by the lens before being received by a position sensor. Either the incident light or the reflected light passes through an optical path that is substantially 90 degrees relative to the optical axis of the other light.

Abstract: An optical pickup apparatus for properly detecting crosstalk amounts to a read signal for one track from adjacent tracks thereof and their balance. A difference between a second read signal value for one track at a time point when a first read signal value for one adjacent track is smaller than a first threshold value and a third read signal value for the other adjacent track is larger than a second threshold value and a second read signal value at a time point when the first read signal value is larger than the second threshold value and the third read signal value is smaller than the first threshold value is formed as a value indicative of a balance level of crosstalks to the second read signal.

Abstract: An object of the present invention is to provide a novel tracking method and device, suitable for use in a recording means applying the technology of a scanning probe microscope, for recording and/or reproducing high-density information of a size of several tens of nm or less at high speed and with high accuracy. The tracking method and device includes a recording medium having bumpy structures for tracking, which are formed on the surface thereof, a cantilever having a tip for writing in, reading out and erasing information, and means for detecting bending and torsion of the cantilever. Further, the tip and the recording medium are moved relative to each other in the direction in which a fixed end and a free end of the cantilever are coupled to each other, in a state in which the tip has been brought into proximity to or contact with the recording medium.

Abstract: An optical pickup device for writing or reading data from an optical information recording medium has a recording layer whose state changes in response to a density of intensity of an irradiated light beam and a track being used for a tracking servo control system. The device includes a first light spot irradiating element for irradiating a writing or reading light beam onto the recording layer to form a writing or reading spot and a second light spot irradiating element for irradiating at least one controlling light beam onto the recording layer to form a controlling spot having a major axis extending along the track and being longer than a transverse axis perpendicular to the major axis within a level of luminous flux density keeping an original state of the recording layer, whereby a tracking servo control signal having a sufficient level is obtained.

Abstract: An optical pickup device for writing or reading data from an optical information recording medium has a recording layer whose state changes in response to a density of intensity of an irradiated light beam and a track being used for a tracking servo control system. The device includes a first light spot irradiating element for irradiating a writing or reading light beam onto the recording layer to form a writing or reading spot and a second light spot irradiating element for irradiating at least one controlling light beam onto the recording layer to form a controlling spot having a major axis extending along the track and being longer than a transverse axis perpendicular to the major axis within a level of luminous flux density keeping an original state of the recording layer, whereby a tracking servo control signal having a sufficient level is obtained.