Patents by Inventor Hajimu Kawa

Hajimu Kawa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for preparing perfluorocarbon-substituted methanols
    Publication number: 20060287540
    Abstract: Methods for producing perfluorocarbon monomethanols or dimethanols are disclosed. The methods of the invention can provide branched perfluorocarbon monomethanols or dimethanols with good purity and yields.
    Type: Application
    Filed: August 24, 2006
    Publication date: December 21, 2006
    Applicant: EXFLUOR RESEARCH CORPORATION
    Inventor: Hajimu Kawa
  • Method for preparing perfluorocarbon-substituted methanols
    Publication number: 20060079701
    Abstract: Methods for producing perfluorocarbon monomethanols or dimethanols are disclosed. The methods of the invention can provide branched perfluorocarbon monomethanols or dimethanols with good purity and yields.
    Type: Application
    Filed: November 29, 2005
    Publication date: April 13, 2006
    Applicant: EXFLUOR RESEARCH CORPORATION
    Inventor: Hajimu Kawa
  • Method of making a semiconductor device using a pellicle that is transparent at short wavelengths
    Publication number: 20040137371
    Abstract: In semiconductor manufacturing, a pellicle film (28) is used to protect the surface of a reticle (24). The reticle (24) is used in an optical microlithography system (10) to pattern semiconductor wafers (18). To work properly, the pellicle (28) must be transparent at the particular wavelength of light used to expose photoresist through the reticle (24). The pellicle (28) is made more transparent to short wavelength light used by the optical microlithography system by removing unwanted hydrogen in the pellicle (28). The unwanted hydrogen is removed by exposing the pellicle (28) to a gas containing fluorine. This unwanted hydrogen apparently came as artifacts of the process of the making the pellicle (28), particularly the chemicals introduced to terminate the polymerization process and the ones used as solvents.
    Type: Application
    Filed: January 9, 2003
    Publication date: July 15, 2004
    Inventors: Cesar M. Garza, Thomas Ray Bierschenk, Han-Chao Wei, Hajimu Kawa
  • Method for preparing perfluorocarbon-substituted methanols
    Publication number: 20030130547
    Abstract: Methods for producing perfluorocarbon monomethanols or dimethanols are disclosed. The methods of the invention can provide branched perfluorocarbon monomethanols or dimethanols with good purity and yields.
    Type: Application
    Filed: October 21, 2002
    Publication date: July 10, 2003
    Applicant: EXFLUOR RESEARCH CORPORATION
    Inventor: Hajimu Kawa
  • Perfluoro group-containing compounds and hardened polymer of the same
    Patent number: 6559268
    Abstract: A perfluoro group-containing compound are represented by the following formula (I): —Rf— is a perfluoro group; and —A represents —OH or a group: or —CyF2y+1 or —CzF2z−1 and a perfluoro group-containing polymerizable compound represented by the following formula (II): R1—O—CH2—CH(OH)—CH2—O—Rf—B  (II) In Formula (II), —Rf— is a perfluoro group; —B is —OH or —O—CH2—CH(OH)—CH2—O—R2, or —CyF2y+1 or —CzF2z−1; and R1 and R2 each is a dehydroxyl residue of a (meth)acryloyl group-containing compound or a vinyl group-containing compound. The hardened polymer from the compound has water-repellency, oil-repellency and adhering ability.
    Type: Grant
    Filed: March 17, 2000
    Date of Patent: May 6, 2003
    Assignee: Kyoeisha Chemcial Co., Ltd.
    Inventors: Junichi Ikeda, Hajimu Kawa
  • Method for preparing perfluorocarbon-substituted methanols
    Patent number: 6479712
    Abstract: Methods for producing perfluorocarbon monomethanols or dimethanols are disclosed. The methods of the invention can provide branched perfluorocarbon monomethanols or dimethanols with good purity and yields.
    Type: Grant
    Filed: July 13, 1999
    Date of Patent: November 12, 2002
    Assignee: Exfluor Research Corporation
    Inventor: Hajimu Kawa
  • Liquid-phase fluorination
    Patent number: 5753776
    Abstract: This invention pertains to a method for liquid phase fluorination for perfluorination of a wide variety of hydrogen-containing compounds.
    Type: Grant
    Filed: June 6, 1995
    Date of Patent: May 19, 1998
    Assignee: Exfluor Research Corporation
    Inventors: Thomas R. Bierschenk, Timothy J. Juhlke, Hajimu Kawa, Richard J. Lagow
  • Liquid-phase fluorination
    Patent number: 5674949
    Abstract: This invention pertains to a method for liquid-phase fluorination for perfluorination of a wide variety of hydrogen-containing compounds.
    Type: Grant
    Filed: June 6, 1995
    Date of Patent: October 7, 1997
    Assignee: Exfluor Research Corporation
    Inventors: Thomas R. Bierschenk, Timothy Juhlke, Hajimu Kawa, Richard J. Lagow
  • Liquid phase fluorination
    Patent number: 5571870
    Abstract: This invention pertains to a method for liquid phase fluorination for perfluorination of a wide variety of hydrogen-containing compounds.
    Type: Grant
    Filed: May 10, 1994
    Date of Patent: November 5, 1996
    Assignee: Exfluor Research Corporation
    Inventors: Thomas R. Bierschenk, Timothy Juhlke, Hajimu Kawa, Richard J. Lagow
  • Fluorination of acetals, ketals and orthoesters
    Patent number: 5557012
    Abstract: This invention pertains to perfluoropolyethers and perhalogenated chlorofluoroether polymers that can be prepared by fluorinating polymers made by the polymerization of acetals, ketals, polyacetals, polyketals and orthoesters with elemental fluorine.
    Type: Grant
    Filed: June 5, 1995
    Date of Patent: September 17, 1996
    Assignee: Exfluor Research Corporation
    Inventors: Thomas R. Bierschenk, Timothy J. Juhlke, Hajimu Kawa, Richard J. Lagow
  • Fluorination of acetals, ketals and orthoesters
    Patent number: 5543567
    Abstract: This invention pertains to perfluoropolyethers and perhalogenated chlorofluoroether polymers that can be prepared by fluorinating polymers made by the polymerization of acetals, ketals, polyacetals, polyketals and orthoesters with elemental fluorine.
    Type: Grant
    Filed: June 5, 1995
    Date of Patent: August 6, 1996
    Assignee: Exfluor Research Corporation
    Inventors: Thomas R. Bierschenk, Timothy J. Juhlke, Hajimu Kawa, Richard J. Lagow
  • Perfluorinated polyethers
    Patent number: 5539059
    Abstract: This invention pertains to perfluoropolyethers and perhalogenated chlorofluoropolyethers that can be prepared by fluorinating addition polymers made by polymerizing epoxides.
    Type: Grant
    Filed: June 6, 1995
    Date of Patent: July 23, 1996
    Assignee: Exfluor Research Corporation
    Inventors: Thomas R. Bierschenk, Timothy Juhlke, Hajimu Kawa, Richard J. Lagow
  • Fluorination of acetals, ketals and orthoesters
    Patent number: 5523496
    Abstract: Perfluoropolyethers and perhalogenated chlorofluoroether polymers are disclosed that can be prepared by fluorinating polymers made by the polymerization of acetals, ketals, polyacetals, polyketals and orthoesters with elemental fluorine.
    Type: Grant
    Filed: April 5, 1994
    Date of Patent: June 4, 1996
    Assignee: Exfluor Research Corporation
    Inventors: Thomas R. Bierschenk, Timothy J. Juhlke, Hajimu Kawa, Richard J. Lagow
  • Perfluorinates polyethers
    Patent number: 5506309
    Abstract: This invention pertains to perfluoropolyethers and perhalogenated chlorofluoropolyethers that can be prepared by fluorinating addition polymers made by polymerizing epoxides.
    Type: Grant
    Filed: June 6, 1995
    Date of Patent: April 9, 1996
    Assignee: Exfluor Research Corporation
    Inventors: Thomas R. Bierschenk, Timothy Juhulke, Hajimu Kawa, Richard J. Lagow
  • Liquid phase fluorination
    Patent number: 5461117
    Abstract: This invention pertains to a method for liquid phase fluorination for perfluorination of a wide variety of hydrogen-containing compounds.
    Type: Grant
    Filed: June 13, 1994
    Date of Patent: October 24, 1995
    Assignee: Exfluor Research Corporation
    Inventors: Thomas R. Bierschenk, Timothy J. Juhlke, Hajimu Kawa, Richard J. Lagow
  • Method of producing perfluorocarbon halides
    Patent number: 5455373
    Abstract: A method of producing perfluorocarbon halides in a one-pot reaction is described. The method employs a perfluorocarbon acid, a first halogenating agent and a second halogen which drives the reaction forward. Novel perfluorocarbon halides and a direct method for producing perfluorocarbon hypohalites also are described.
    Type: Grant
    Filed: February 28, 1994
    Date of Patent: October 3, 1995
    Assignee: Exfluor Research Corporation
    Inventor: Hajimu Kawa
  • Liquid-phase fluorination
    Patent number: 5332790
    Abstract: This invention pertains to a method for liquid phase fluorination for perfluorination of a wide variety of hydrogen-containing compounds.
    Type: Grant
    Filed: March 8, 1993
    Date of Patent: July 26, 1994
    Assignee: Exfluor Research Corporation
    Inventors: Thomas R. Bierschenk, Timothy Juhlke, Hajimu Kawa, Richard J. Lagow
  • Liquid-phase fluorination
    Patent number: 5322903
    Abstract: This invention pertains to a method for liquid phase fluorination for perfluorination of a wide variety of hydrogen-containing compounds.
    Type: Grant
    Filed: January 17, 1992
    Date of Patent: June 21, 1994
    Assignee: Exfluor Research Corporation
    Inventors: Thomas R. Bierschenk, Timothy Juhlke, Hajimu Kawa, Richard J. Lagow
  • Liquid-phase fluorination
    Patent number: 5322904
    Abstract: This invention pertains to a method for liquid phase fluorination for perfluorination of a wide variety of hydrogen-containing compounds.
    Type: Grant
    Filed: March 8, 1993
    Date of Patent: June 21, 1994
    Assignee: Exfluor Research Corporation
    Inventors: Thomas R. Bierschenk, Timothy J. Juhlke, Hajimu Kawa, Richard J. Lagow
  • Fluorination of acetals, ketals and orthoesters
    Patent number: 5300683
    Abstract: This invention pertains to perfluoropolyethers and perhalogenated chlorofluoroether polymers that can be prepared by fluorinating polymers made by the polymerization of acetals, ketals, polyacetals, polyketals and orthoesters with elemental fluorine.
    Type: Grant
    Filed: October 26, 1992
    Date of Patent: April 5, 1994
    Assignee: Exfluor Research Corporation
    Inventors: Thomas R. Bierschenk, Timothy Juhlke, Hajimu Kawa, Richard J. Lagow