Patents by Inventor Hakan Elmali
Hakan Elmali has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20210225678Abstract: A substrate transport apparatus having a drive section and a scara arm operably connected to the drive section to move the scara arm. The scara arm has an upper arm and at least one forearm. The forearm is movably mounted to the upper arm and capable of holding a substrate thereon. The upper arm is substantially rigid and is adjustable for changing a predetermined dimension of the upper arm.Type: ApplicationFiled: January 26, 2021Publication date: July 22, 2021Inventors: Antonio F. PIETRANTONIO, Anthony Chesna, Hakan Elmali, Ulysses Gilchrist
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Patent number: 10903104Abstract: A substrate transport apparatus having a drive section and a scara arm operably connected to the drive section to move the scara arm. The scara arm has an upper arm and at least one forearm. The forearm is movably mounted to the upper arm and capable of holding a substrate thereon. The upper arm is substantially rigid and is adjustable for changing a predetermined dimension of the upper arm.Type: GrantFiled: November 27, 2018Date of Patent: January 26, 2021Assignee: Brooks Automation, Inc.Inventors: Antonio F. Pietrantonio, Anthony Chesna, Hakan Elmali, Ulysses Gilchrist
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Publication number: 20190096726Abstract: A substrate transport apparatus having a drive section and a scara arm operably connected to the drive section to move the scara arm. The scara arm has an upper arm and at least one forearm. The forearm is movably mounted to the upper arm and capable of holding a substrate thereon. The upper arm is substantially rigid and is adjustable for changing a predetermined dimension of the upper arm.Type: ApplicationFiled: November 27, 2018Publication date: March 28, 2019Inventors: Antonio F. Pietrantonio, Anthony Chesna, Hakan Elmali, Ulysses Gilchrist
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Patent number: 10141214Abstract: A substrate transport apparatus having a drive section and a scara arm operably connected to the drive section to move the scara arm. The scara arm has an upper arm and at least one forearm. The forearm is movably mounted to the upper arm and capable of holding a substrate thereon. The upper arm is substantially rigid and is adjustable for changing a predetermined dimension of the upper arm.Type: GrantFiled: September 29, 2015Date of Patent: November 27, 2018Assignee: Brooks Automation, Inc.Inventors: Antonio F. Pietrantonio, Anthony Chesna, Hakan Elmali, Ulysses Gilchrist
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Publication number: 20160020126Abstract: A substrate transport apparatus having a drive section and a scara arm operably connected to the drive section to move the scara arm. The scara arm has an upper arm and at least one forearm. The forearm is movably mounted to the upper arm and capable of holding a substrate thereon. The upper arm is substantially rigid and is adjustable for changing a predetermined dimension of the upper arm.Type: ApplicationFiled: September 29, 2015Publication date: January 21, 2016Inventors: Antonio F. Pietrantonio, Anthony Chesna, Hakan Elmali, Ulysses Gilchrist
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Patent number: 9147590Abstract: A substrate transport apparatus having a drive section and a scara arm operably connected to the drive section to move the scara arm. The scara arm has an upper arm and at least one forearm. The forearm is movably mounted to the upper arm and capable of holding a substrate thereon. The upper arm is substantially rigid and is adjustable for changing a predetermined dimension of the upper arm.Type: GrantFiled: February 15, 2013Date of Patent: September 29, 2015Assignee: Brooks Automation, Inc.Inventors: Antonio F. Pietrantonio, Anthony Chesna, Hakan Elmali, Ulysses Gilchrist
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Patent number: 6673161Abstract: A substrate handling end effector is provided. The substrate handling end effector has a vacuum chuck to support a semiconductor substrate thereon. A vacuum passage and a liquid passage are located in the vacuum chuck. The vacuum passage is adapted to be connected to a vacuum source and the liquid passage is adapted to be connected to a liquid source. The liquid passage is connected to the vacuum passage.Type: GrantFiled: July 3, 2001Date of Patent: January 6, 2004Assignee: Brooks Automation, Inc.Inventors: Tuan T. Ha, Hakan Elmali
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Patent number: 6643563Abstract: A method for moving a substrate to a predetermined location with a specified orientation with a robotic manipulator, the robotic manipulator having a plurality of joint actuators and an end-effector for holding the substrate, wherein the end-effector is independently rotatable with respect to the remaining robotic manipulator. The method can select a reference point on the end-effector for determining a position of the end-effector, wherein the reference point is offset from a wrist of the robotic manipulator, determining a motion path for movement of the end-effector of robotic arm toward predetermined location with specified orientation, and generating motion profiles for translational and rotational components of movement of the end-effector of robotic manipulator along the motion path.Type: GrantFiled: July 15, 2002Date of Patent: November 4, 2003Assignee: Brooks Automation, Inc.Inventors: Martin Hosek, Hakan Elmali
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Publication number: 20030108415Abstract: A method for moving a substrate to a predetermined location with a specified orientation with a robotic manipulator, the robotic manipulator having a plurality of joint actuators and an end-effector for holding the substrate, wherein the end-effector is independently rotatable with respect to the remaining robotic manipulator. The method comprises selecting a reference point on the end-effector for determining a position of the end-effector, wherein the reference point is offset from a wrist of the robotic manipulator, determining a motion path for movement of the end-effector of robotic arm toward predetermined location with specified orientation, and generating motion profiles for translational and rotational components of movement of the end-effector of robotic manipulator along the motion path.Type: ApplicationFiled: July 15, 2002Publication date: June 12, 2003Inventors: Martin Hosek, Hakan Elmali
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Patent number: 6567711Abstract: A system for extracting a signal component from an output signal of a dynamic system. The system comprises a state observer and a corrector filter. The state observer is adapted to track a signal component that represents dominant dynamics in the output signal of the dynamic system and provide an estimation signal representing an estimated signal component in the output signal of the dynamic system. The corrector filter is adapted to compensate for a mismatch between the estimation signal and the actual signal component that represents the dominant dynamics in the output signal. A combination of the estimation signal with an output signal of the corrector filter can provide a synthesized signal including the signal component that represents the dominant dynamics in the output signal.Type: GrantFiled: August 28, 2000Date of Patent: May 20, 2003Assignee: Brooks AutomationInventors: Martin Hosek, Jairo Terra Moura, Hakan Elmali
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Publication number: 20030005947Abstract: A substrate handling end effector is provided. The substrate handling end effector has a vacuum chuck to support a semiconductor substrate thereon. A vacuum passage and a liquid passage are located in the vacuum chuck. The vacuum passage is adapted to be connected to a vacuum source and the liquid passage is adapted to be connected to a liquid source. The liquid passage is connected to the vacuum passage.Type: ApplicationFiled: July 3, 2001Publication date: January 9, 2003Inventors: Tuan T. Ha, Hakan Elmali
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Patent number: 6216058Abstract: A system for providing the reliable and numerically efficient generation of time-optimum trajectories with easy-to-track or continuous acceleration profiles for simple and blended moves of single- and multi-arm robotic manipulators, such as an extension and retraction move along a straight line or a rotary move following a circular arc, with velocity, acceleration, jerk, and jerk rate constraints. A time-optimum trajectory is the set of the position, velocity, and acceleration profiles which describe the move of a selected end effector along a given path in the shortest time possible without violating given constraints, with a special case being an optimum abort trajectory, which brings the moving arm into complete rest in the shortest time. The invention involves firstly identifying the set of fundamental trajectory shapes which cover all possible combinations of constraints for a given category of moves, e.g.Type: GrantFiled: May 28, 1999Date of Patent: April 10, 2001Assignee: Brooks Automation, Inc.Inventors: Martin Hosek, Hakan Elmali
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Patent number: 5934424Abstract: Torsional vibrations in a rotating structure having a relatively large mass and subject to varying frequencies of torsional excitation are damped by determining the frequency of torsional excitation of the rotating structure and coupling to the rotating structure a damping pendulum of smaller mass to provide an absorber unit rotating therewith. The angular displacement of the damping pendulum relative to the rotating structure is continuously monitored, and the frequency of excitation is determined. The monitored displacement of the damping pendulum together with the mass damper characteristics of the absorber unit are processed to output a signal which produces a control torque on the damping pendulum proportional to the monitored displacement of the damping pendulum with a controlled time delay to produce control torque on the damping pendulum substantially equal to the torsional excitation of the rotating structure.Type: GrantFiled: November 1, 1996Date of Patent: August 10, 1999Assignee: The University of ConnecticutInventors: Martin Hosek, Hakan Elmali, Nejat Olgac