Abstract: A method and apparatus for measuring the spatial uniformity of the intensity of a radiation beam from a radiation source based on a single sampling time and/or a single pulse of radiation. The measuring apparatus includes a plurality of radiation detectors positioned on planar mounting plate to form a radiation receiving area that has a shape and size approximating the size and shape of the cross section of the radiation beam. The detectors concurrently receive portions of the radiation beam and transmit electrical signals representative of the intensity of impinging radiation to a signal processor circuit connected to each of the detectors and adapted to concurrently receive the electrical signals from the detectors and process with a central processing unit (CPU) the signals to determine intensities of the radiation impinging at each detector location.