Patents by Inventor Hamid Noobakhsh

Hamid Noobakhsh has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Electrostatic chuck having thermally isolated zones with minimal crosstalk
    Patent number: 11088005
    Abstract: A substrate support assembly includes a ceramic puck and a thermally conductive base having an upper surface that is bonded to the ceramic puck. The thermally conductive base includes a plurality of thermal zones and a thermally managed material embedded in the thermally conductive base at the upper surface of the thermally conductive base in one or more of the plurality of thermal zones. The thermally managed material has different thermal conductive properties along a first direction and a second direction. The thermally conductive base further includes a plurality of thermal isolators that extend from the upper surface of the thermally conductive base towards a lower surface of the thermally conductive base between two or more of the plurality of thermal zones without contacting the lower surface of the thermally conductive base. Each of the plurality of thermal isolators provides a degree of thermal isolation.
    Type: Grant
    Filed: May 23, 2019
    Date of Patent: August 10, 2021
    Assignee: Applied Materials, Inc.
    Inventors: Vijay D. Parkhe, Konstantin Makhratchev, Jason Della Rosa, Hamid Noobakhsh, Brad L. Mays, Douglas A. Buchberger, Jr.
  • ELECTROSTATIC CHUCK HAVING THERMALLY ISOLATED ZONES WITH MINIMAL CROSSTALK
    Publication number: 20190279893
    Abstract: A substrate support assembly includes a ceramic puck and a thermally conductive base having an upper surface that is bonded to the ceramic puck. The thermally conductive base includes a plurality of thermal zones and a thermally managed material embedded in the thermally conductive base at the upper surface of the thermally conductive base in one or more of the plurality of thermal zones. The thermally managed material has different thermal conductive properties along a first direction and a second direction. The thermally conductive base further includes a plurality of thermal isolators that extend from the upper surface of the thermally conductive base towards a lower surface of the thermally conductive base between two or more of the plurality of thermal zones without contacting the lower surface of the thermally conductive base. Each of the plurality of thermal isolators provides a degree of thermal isolation.
    Type: Application
    Filed: May 23, 2019
    Publication date: September 12, 2019
    Inventors: Vijay D. Parkhe, Konstantin Makhratchev, Jason Della Rosa, Hamid Noobakhsh, Brad L. Mays, Douglas A. Buchberger, JR.
  • PLASMA RESISTANT CERAMIC COATED CONDUCTIVE ARTICLE
    Publication number: 20130284373
    Abstract: To manufacture a ceramic coated article, at least one surface of a conductive article is roughened to a roughness of approximately 100 micro-inches (?in) to approximately 300 ?in. The conductive article may then be heated and coated with a ceramic coating comprising a yttrium containing oxide to a thickness of approximately 10-40 mil.
    Type: Application
    Filed: November 28, 2012
    Publication date: October 31, 2013
    Applicant: APPLIED MATERIALS, INC.
    Inventors: Jennifer Y. Sun, Biraja P. Kanungo, Ren-Guan Duan, Hamid Noobakhsh, Junhan Yuh, Dmitry Lubomirsky