Patents by Inventor Han-Jong Chia

Han-Jong Chia has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11758737
    Abstract: A ferroelectric memory device includes a first conductive region, a second conductive region and a ferroelectric structure. The second conductive region is disposed over the first conductive region. The ferroelectric structure includes a plurality of different ferroelectric materials stacked between the first conductive region and the second conductive region.
    Type: Grant
    Filed: May 28, 2020
    Date of Patent: September 12, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventor: Han-Jong Chia
  • Patent number: 11756987
    Abstract: A memory device, transistor, and methods of making the same, the memory device including a memory cell including: a bottom electrode layer; a high-k dielectric layer disposed on the bottom electrode layer; a discontinuous seed structure comprising discrete particles of a metal disposed on the high-k dielectric layer; a ferroelectric (FE) layer disposed on the seed structure and directly contacting portions of high-k dielectric layer exposed through the seed structure; and a top electrode layer disposed on the FE layer.
    Type: Grant
    Filed: April 14, 2021
    Date of Patent: September 12, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Han-Jong Chia, Mauricio Manfrini
  • Patent number: 11744080
    Abstract: A memory device, a semiconductor device and manufacturing methods for forming the memory device and the semiconductor device are provided. The memory device include a stacking structure, a switching layer, channel layers and pairs of conductive pillars. The stacking structure includes alternately stacked isolation layers and word lines, and extends along a first direction. The stacking structure has a staircase portion and a connection portion at an edge region of the stacking structure. The connection portion extends along the staircase portion and located aside the staircase portion, and may not be shaped into a staircase structure. The switching layer covers a sidewall of the stacking structure. The channel layers cover a sidewall of the switching layer, and are laterally spaced apart from one another along the first direction. The pairs of conductive pillars stand on the substrate, and in lateral contact with the switching layer through the channel layers.
    Type: Grant
    Filed: December 15, 2020
    Date of Patent: August 29, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Meng-Han Lin, Han-Jong Chia, Yi-Ching Liu, Chia-En Huang, Sheng-Chen Wang, Feng-Cheng Yang, Chung-Te Lin
  • Patent number: 11729997
    Abstract: Memory devices and methods of forming the memory devices are disclosed herein. The memory devices include a resistive memory array including a first resistive memory cell, a staircase contact structure adjacent the resistive memory array, and an inter-metal dielectric layer over the staircase contact structure. The memory devices further include a first diode and a second diode over the inter-metal dielectric layer. The memory devices further include a first conductive via electrically coupling the first diode to a first resistor of the first resistive memory cell and a second conductive via electrically coupling the second diode to a second resistor of the first resistive memory cell.
    Type: Grant
    Filed: April 13, 2021
    Date of Patent: August 15, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Meng-Han Lin, Chih-Yu Chang, Han-Jong Chia, Sai-Hooi Yeong, Yu-Ming Lin
  • Publication number: 20230255032
    Abstract: A memory device includes a multi-layer stack including a plurality of first conductive lines and a plurality of second conductive lines. The first conductive lines are stacked on one another. The second conductive lines cross over the plurality of first conductive lines, wherein widths of the plurality of second conductive lines are increased as the plurality of second conductive lines become close to a middle portion of the multi-layer stack.
    Type: Application
    Filed: April 6, 2023
    Publication date: August 10, 2023
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Meng-Han Lin, Mauricio MANFRINI, Han-Jong Chia
  • Patent number: 11723209
    Abstract: A three-dimensional memory device and a manufacturing method thereof are provided. The three-dimensional memory device includes first and second stacking structures, isolation pillars, gate dielectric layers, channel layers and conductive pillars. The stacking structures are laterally spaced apart from each other. The stacking structures respectively comprises alternately stacked insulating layers and conductive layers. The isolation pillars laterally extend between the stacking structures. The isolation pillars further protrude into the stacking structures, and a space between the stacking structures is divided into cell regions. The gate dielectric layers are respectively formed in one of the cell regions, and cover opposing sidewalls of the stacking structures and sidewalls of the isolation pillars. The channel layers respectively cover an inner surface of one of the gate dielectric layers.
    Type: Grant
    Filed: January 26, 2021
    Date of Patent: August 8, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Meng-Han Lin, Chun-Fu Cheng, Feng-Cheng Yang, Sheng-Chen Wang, Yu-Chien Chiu, Han-Jong Chia
  • Patent number: 11716909
    Abstract: A magnetic tunnel junction (MTJ) element is provided. The MTJ element includes a reference layer, a tunnel barrier layer disposed over the reference layer, a free layer disposed over the tunnel barrier layer, and a diffusion barrier layer disposed over the free layer. The MU element in accordance with the present disclosure exhibits a low resistance desired for a low-power write operation, and a high TIM coefficient desired for a low bit-error-rate (BER) read operation.
    Type: Grant
    Filed: October 14, 2020
    Date of Patent: August 1, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Ya-Ling Lee, Tsann Lin, Han-Jong Chia
  • Patent number: 11716857
    Abstract: A semiconductor memory device includes a stack of alternating insulating layers and first conductive layers disposed over a substrate; a plurality of memory cell strings penetrating the stack over the substrate, each memory cell string comprising a central portion extending through the stack, a semiconductor layer surrounding the central portion, and a ferroelectric layer surrounding the semiconductor layer, and the central portion comprising a channel isolation structure and a second conductive layer and a third conductive layer at two sides of the channel isolation structure; and a plurality of cell isolation structures penetrating the conductive layers and the insulating layers over the substrate and disposed between two memory cell strings, each cell isolation structure comprising a top portion and a bottom portion adjoined to the top portion and different from the top portion.
    Type: Grant
    Filed: June 17, 2021
    Date of Patent: August 1, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Yu-Chien Chiu, Meng-Han Lin, Chun-Fu Cheng, Han-Jong Chia, Chung-Wei Wu, Zhiqiang Wu
  • Publication number: 20230230921
    Abstract: A semiconductor device includes a semiconductor substrate, first and second stack units disposed over the semiconductor substrate, and a feature disposed between the first and second stack units. Each of the first and second stack units includes at least one stack that includes a conductive film and a dielectric film stacked on each other. The feature includes a plurality of repeating units and a plurality of separators disposed to alternate with the repeating units. Each of the repeating units includes an inner portion including a pair of conductive pillars, and an outer portion including a memory film and a channel film. A method for manufacturing the semiconductor device is also disclosed.
    Type: Application
    Filed: January 18, 2022
    Publication date: July 20, 2023
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Meng-Han LIN, Bo-Feng YOUNG, Han-Jong CHIA, Sai-Hooi YEONG
  • Publication number: 20230225135
    Abstract: A magnetoresistive stack/structure and method of manufacturing same comprising wherein the stack/structure includes a seed region, a fixed magnetic region disposed on and in contact with the seed region, a dielectric layer(s) disposed on the fixed magnetic region and a free magnetic region disposed on the dielectric layer(s). In one embodiment, the seed region comprises an alloy including nickel and chromium having (i) a thickness greater than or equal to 40 Angstroms (+/?10%) and less than or equal to 60 Angstroms (+/?10%), and (ii) a material composition or content of chromium within a range of 25-60 atomic percent (+/?10%) or 30-50 atomic percent (+/?10%).
    Type: Application
    Filed: March 17, 2023
    Publication date: July 13, 2023
    Applicant: Everspin Technologies, Inc.
    Inventors: Jijun SUN, Sanjeev AGGARWAL, Han-Jong CHIA, Jon M. SLAUGHTER, Renu WHIG
  • Publication number: 20230225131
    Abstract: A memory device includes a first etch stop layer, an etch stop pattern, a second etch stop layer, a plurality of stacks and a first conductive pillar. The etch stop pattern is disposed in the first etch stop layer. The second etch stop layer is disposed on the first etch stop layer and the etch stop pattern, wherein a material of the etch stop pattern is different from a material of the first etch stop layer and a material of the second etch stop layer. The stacks are disposed on the second etch stop layer. The first conductive pillar is disposed between the stacks, wherein the first conductive pillar extends along the stacks and the second etch stop layer to be in physical contact with the etch stop pattern.
    Type: Application
    Filed: January 12, 2022
    Publication date: July 13, 2023
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Meng-Han Lin, Han-Jong Chia, Feng-Cheng Yang
  • Publication number: 20230215761
    Abstract: A memory device includes first transistor over a semiconductor substrate, wherein the first transistor includes a first word line extending over the semiconductor substrate; a second transistor over the semiconductor substrate, wherein the second transistor includes a second word line extending over the first word line; a first air gap extending between the first word line and the second word line; a memory film extending along and contacting the first word line and the second word line; a channel layer extending along the memory film; a source line extending along the channel layer, wherein the memory film is between the source line and the word line; a bit line extending along the channel layer, wherein the memory film is between the bit line and the word line; and an isolation region between the source line and the bit line.
    Type: Application
    Filed: March 6, 2023
    Publication date: July 6, 2023
    Inventors: Sheng-Chen Wang, Kai-Hsuan Lee, Sai-Hooi Yeong, Chia-Ta Yu, Han-Jong Chia
  • Publication number: 20230209837
    Abstract: A memory device, transistor, and methods of making the same, the memory device including a memory device including: a ferroelectric (FE) structure including: a dielectric layer, an FE layer disposed on the dielectric layer, and an interface metal layer disposed on the FE layer, in which the interface metal layer comprises W, Mo, Ru, TaN, or a combination thereof to induce the FE layer to have an orthorhombic phase; and a top electrode layer disposed on the interface metal.
    Type: Application
    Filed: February 13, 2023
    Publication date: June 29, 2023
    Inventors: Han-Jong CHIA, Mauricio MANFRINI
  • Patent number: 11690229
    Abstract: A magnetoresistive stack/structure and method of manufacturing same comprising wherein the stack/structure includes a seed region, a fixed magnetic region disposed on and in contact with the seed region, a dielectric layer(s) disposed on the fixed magnetic region and a free magnetic region disposed on the dielectric layer(s). In one embodiment, the seed region comprises an alloy including nickel and chromium having (i) a thickness greater than or equal to 40 Angstroms (+/?10%) and less than or equal to 60 Angstroms (+/?10%), and (ii) a material composition or content of chromium within a range of 25-60 atomic percent (+/?10%) or 30-50 atomic percent (+/?10%).
    Type: Grant
    Filed: December 23, 2020
    Date of Patent: June 27, 2023
    Assignee: EVERSPIN TECHNOLOGIES, INC.
    Inventors: Jijun Sun, Sanjeev Aggarwal, Han-Jong Chia, Jon M. Slaughter, Renu Whig
  • Patent number: 11678492
    Abstract: A memory device, a semiconductor device and a manufacturing method of the memory device are provided. The memory device includes first, second and third stacking structures, first and second channel structures, a gate dielectric layer, a switching layer, and first and second gate structures. The first, second and third stacking structures are laterally spaced apart from one another, and respectively comprise a conductive layer, an isolation layer and a channel layer. The third stacking structure is located between the first and second stacking structures. The first channel structure extends between the channel layers in the first and third stacking structures. The second channel structure extends between the channel layers in the second and third stacking structures. The gate dielectric layer and the first gate structure wrap around the first channel structure. The switching layer and the second gate structure wrap around the second channel structure.
    Type: Grant
    Filed: January 27, 2021
    Date of Patent: June 13, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Meng-Han Lin, Feng-Cheng Yang, Sheng-Chen Wang, Han-Jong Chia
  • Patent number: 11672126
    Abstract: A three-dimensional memory device including first and second stacking structures and first and second conductive pillars is provided. The first stacking structure includes first stacking layers stacked along a vertical direction. Each first stacking layer includes a first gate layer, a first channel layer, and a first ferroelectric layer between the first gate and channel layers. The second stacking structure is laterally spaced from the first stacking structure and includes second stacking layers stacked along the vertical direction. Each second stacking layer includes a second gate layer, a second channel layer, and a second ferroelectric layer is between the second gate and channel layers. The first and second gate layers are disposed between the first and second ferroelectric layers, and the first and second conductive pillars extend along the vertical direction in contact respectively with the first and second channel layers.
    Type: Grant
    Filed: December 30, 2020
    Date of Patent: June 6, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chao-I Wu, Sai-Hooi Yeong, Yu-Ming Lin, Han-Jong Chia
  • Publication number: 20230157028
    Abstract: A memory device includes a first stacking structure, a second stacking structure, a plurality of first isolation structures, gate dielectric layers, channel layers and channel layers. The first stacking structure includes a plurality of first gate layers, and a second stacking structure includes a plurality of second gate layers, where the first stacking structure and the second stacking structure are located on a substrate and separated from each other through a trench. The first isolation structures are located in the trench, where a plurality of cell regions are respectively confined between two adjacent first isolation structures of the first isolation structures in the trench, where the first isolation structures each includes a first main layer and a first liner surrounding the first main layer, where the first liner separates the first main layer from the first stacking structure and the second stacking structure.
    Type: Application
    Filed: January 17, 2023
    Publication date: May 18, 2023
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Sheng-Chen Wang, Meng-Han Lin, Sai-Hooi Yeong, Yu-Ming Lin, Han-Jong Chia
  • Publication number: 20230157031
    Abstract: A memory device includes metal interconnect structures embedded within dielectric material layers that overlie a top surface of a substrate, a thin film transistor embedded in a first dielectric material layer selected from the dielectric material layers, and is vertically spaced from the top surface of the substrate, and a ferroelectric memory cell embedded within the dielectric material layers. A first node of the ferroelectric memory cell is electrically connected to a node of the thin film transistor through a subset of the metal interconnect structures that is located above, and vertically spaced from, the top surface of the substrate.
    Type: Application
    Filed: January 17, 2023
    Publication date: May 18, 2023
    Inventors: Bo-Feng YOUNG, Mauricio MANFRINI, Sai-Hooi YEONG, Han-Jong CHIA, Yu-Ming LIN
  • Publication number: 20230157034
    Abstract: A memory device includes a bit line, a word line, a memory cell, select bit lines, and a controller. The memory cell includes a first transistor, data storage elements, and second transistors corresponding to the data storage elements. The first transistor includes a gate electrically coupled to the word line, a first source/drain, and a second source/drain. Each of the select bit lines is electrically coupled to a gate of a corresponding second transistor. Each data storage element and the corresponding second transistor are electrically coupled in series between the first source/drain of the first transistor and the bit line. The controller turns ON the first transistor and a selected second transistor, and, while the first transistor and the selected second transistor are turned ON, applies different voltages to the bit line to perform corresponding different operations on the data storage element coupled to the selected second transistor.
    Type: Application
    Filed: January 19, 2023
    Publication date: May 18, 2023
    Inventors: Meng-Han LIN, Sai-Hooi YEONG, Han-Jong CHIA, Chenchen Jacob WANG, Yu-Ming LIN
  • Publication number: 20230147923
    Abstract: In an embodiment, a device includes: a first dielectric layer having a first sidewall; a second dielectric layer having a second sidewall; a word line between the first dielectric layer and the second dielectric layer, the word line having an outer sidewall and an inner sidewall, the inner sidewall recessed from the outer sidewall, the first sidewall, and the second sidewall; a memory layer extending along the outer sidewall of the word line, the inner sidewall of the word line, the first sidewall of the first dielectric layer, and the second sidewall of the second dielectric layer; and a semiconductor layer extending along the memory layer.
    Type: Application
    Filed: January 3, 2023
    Publication date: May 11, 2023
    Inventors: Bo-Feng Young, Sai-Hooi Yeong, Han-Jong Chia, Sheng-Chen Wang, Yu-Ming Lin