Patents by Inventor Hang Ran

Hang Ran has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11469121
    Abstract: A spin coating device and method. The spin coating device includes a rotatable rotary shaft and sucker fixed on an end portion of the shaft, and an electromagnetic induction device below the sucker which includes an annular magnet fixed below the sucker, coil group formed by a first and second coil, and strip-shaped magnet fixed at the rotary shaft. A base on the sucker has a notch. The unbalanced centrifugal force during rotation of the sucker causes vibration. The electromagnetic induction device enables the centrifugal force generated during rotation of the sucker to be in balance with the magnetic force generated by the electromagnetic induction device to adjust the levelness of the sucker surface. The device does not need manual manipulation, enables the sucker to be more stable, reduces damage to the equipment due to vibration, and improves the effect of photoresist spin-coating while saving time and labor.
    Type: Grant
    Filed: May 25, 2018
    Date of Patent: October 11, 2022
    Assignee: SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
    Inventors: Shiliang Lu, Hang Ran, Yihui Li, Xiaoping Yan, Jun Zhao, Shanshan Chen
  • Publication number: 20200350182
    Abstract: A spin coating device and method. The spin coating device includes a rotatable rotary shaft and sucker fixed on an end portion of the shaft, and an electromagnetic induction device below the sucker which includes an annular magnet fixed below the sucker, coil group formed by a first and second coil, and strip-shaped magnet fixed at the rotary shaft. A base on the sucker has a notch. The unbalanced centrifugal force during rotation of the sucker causes vibration. The electromagnetic induction device enables the centrifugal force generated during rotation of the sucker to be in balance with the magnetic force generated by the electromagnetic induction device to adjust the levelness of the sucker surface. The device does not need manual manipulation, enables the sucker to be more stable, reduces damage to the equipment due to vibration, and improves the effect of photoresist spin-coating while saving time and labor.
    Type: Application
    Filed: May 25, 2018
    Publication date: November 5, 2020
    Inventors: Shiliang LU, Hang RAN, Yihui LI, Xiaoping YAN, Jun ZHAO, Shanshan CHEN
  • Patent number: D889340
    Type: Grant
    Filed: January 25, 2019
    Date of Patent: July 7, 2020
    Assignee: Chongqing Jinkang New Energy Automobile Co., Ltd.
    Inventors: Bo Lun, Yutong Wu, Wengang Yuan, Hang Ran