Patents by Inventor Hanh Tuong Ha

Hanh Tuong Ha has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lower electrode assembly of plasma processing chamber
    Patent number: 9412555
    Abstract: A lower electrode assembly for use in a plasma processing chamber comprises a metal base and upper and lower edge rings. The metal base comprises metal plates brazed together and forming a brazed line on a lower side surface of the base, an edge ring support surface extending horizontally inwardly from the lower side surface and an upper side surface above the edge ring support surface. The upper edge ring comprises a lower surface mounted on the edge ring support surface and the lower edge ring surrounds the lower side surface of the base with a gap between opposed surfaces of the upper and lower edge rings and between the lower edge ring and the outer periphery of the base. The gap has an aspect ratio of total gap length to average gap width sufficient to impede arcing at the location of the braze line.
    Type: Grant
    Filed: October 30, 2009
    Date of Patent: August 9, 2016
    Assignee: LAM RESEARCH CORPORATION
    Inventors: Jason Augustino, Quan Chau, Keith William Gaff, Hanh Tuong Ha, Brett C. Richardson, Harmeet Singh
  • LOWER ELECTRODE ASSEMBLY OF PLASMA PROCESSING CHAMBER
    Publication number: 20100108261
    Abstract: A lower electrode assembly for use in a plasma processing chamber comprises a metal base and upper and lower edge rings. The metal base comprises metal plates brazed together and forming a brazed line on a lower side surface of the base, an edge ring support surface extending horizontally inwardly from the lower side surface and an upper side surface above the edge ring support surface. The upper edge ring comprises a lower surface mounted on the edge ring support surface and the lower edge ring surrounds the lower side surface of the base with a gap between opposed surfaces of the upper and lower edge rings and between the lower edge ring and the outer periphery of the base. The gap has an aspect ratio of total gap length to average gap width sufficient to impede arcing at the location of the braze line.
    Type: Application
    Filed: October 30, 2009
    Publication date: May 6, 2010
    Applicant: Lam Research Corporation
    Inventors: Jason Augustino, Quan Chau, Keith William Gaff, Hanh Tuong Ha, Brett C. Richardson, Harmeet Singh