Abstract: A micromechanical sensor comprising a substrate (5) and at least one mass (6) which is situated on the substrate (5) and which moves relative to the substrate (5) is used to detect motions of the sensor due to an acceleration force and/or Coriolis force which occur(s). The mass (6) and the substrate (5) and/or two masses (5, 7) which move toward one another are connected by at least one bending spring device (6). The bending spring device (6) has a spring bar (9) and a meander (10), provided thereon, having a circle of curvature (K1; K6; K8; K9; K11) whose midpoint (MP1; MP6; MP8; MP9; MP11) and radius of curvature (r1; r6; r8; r9; r11) are inside the meander (10). For reducing stresses that occur, in addition to the radius of curvature (r1; r6; r8; r9; r11) having the inner midpoint (MP1; MP6; MP8; MP9; MP11), the meander (10) has at least one further radius of curvature (r2; r3; r4; r5; r7; r10) having a midpoint (MP2; MP3; MP4; MP5; MP7; MP10) outside the meander (10).

Abstract: A micromechanical sensor comprising a substrate (5) and at least one mass (6) which is situated on the substrate (5) and which moves relative to the substrate (5) is used to detect motions of the sensor based on an acceleration force and/or Coriolis force which occur(s). The mass (6) and the substrate (5) and/or two masses which move toward one another are connected by at least one bending spring device (1) for a relative rotational motion. The bending spring device (1) has multiple, in particular two, spring bars (2) extending essentially parallel to one another for improving the linear spring characteristic of the bending spring device during the rotational motion, and at least one meander (3) on at least one, preferably on all, of the spring bars (2).

Abstract: A microgyroscope is used to determine rotational motions about at least one of three perpendicular spatial axes x, y, and z. The microgyroscope has a substrate (1) on which multiple masses (2x, 2y, 9) which oscillate parallel to the plane of the substrate (1) in an x-y plane are situated. Some of the oscillating masses (2x, 2y) are attached to the substrate (1) by means of springs and anchorings. Drive elements (4a, 4b) are used to maintain oscillating vibrations of the masses (2x, 2y, 9) which are subjected to Coriolis forces when the substrate (1) rotates about any given spatial axis. Sensor elements detect the deflections of the masses (2x, 2y, 9) due to the Coriolis forces generated.

Abstract: A micromechanical sensor comprising a substrate (5) and at least one mass (6) which is situated on the substrate (5) and which moves relative to the substrate (5) is used to detect motions of the sensor due to an acceleration force and/or Coriolis force which occur(s). The mass (6) and the substrate (5) and/or two masses (5, 7) which move toward one another are connected by at least one bending spring device (6). The bending spring device (6) has a spring bar (9) and a meander (10), provided thereon, having a circle of curvature (K1; K6; K8; K9; K11) whose midpoint (MP1; MP6; MP8; MP9; MP11) and radius of curvature (r1; r6; r8; r9; r11) are inside the meander (10). For reducing stresses that occur, in addition to the radius of curvature (r1; r6; r8; r9; r11) having the inner midpoint (MP1; MP6; MP8; MP9; MP11), the meander (10) has at least one further radius of curvature (r2; r3; r4; r5; r7; r10) having a midpoint (MP2; MP3; MP4; MP5; MP7; MP10) outside the meander (10).

Abstract: A micro gyroscope for determining rotational movements about three spatial axes x, y and z, which are perpendicular to one another has a substrate (I) on which a plurality of masses (2, 3) oscillating tangentially about the z axis, which is perpendicular to the substrate (I), are arranged. The oscillating masses (2, 3) are fastened on the substrate (I) by means of springs (5, 6, 8) and tie bolts (7, 9). Driving elements (II) serve to maintain oscillating, tangential vibrations of the masses (2, 3) about the z axis, as a result of which, upon rotation of the substrate (I) about any spatial axis, the masses (2, 3) are subjected to Corolis forces and deflections caused as a result. Sensor elements detect the deflections of the masses (2, 3) on the basis of the Corolis forces generated. Some of the masses (2, 3) oscillating about the z axis are mounted in a tiltable manner substantially about the x axis which runs parallel to the substrate (I).

Abstract: A micromechanical sensor comprising a substrate (5) and at least one mass (6) which is situated on the substrate (5) and which moves relative to the substrate (5) is used to detect motions of the sensor due to an acceleration force and/or Coriolis force which occur(s). The mass (6) and the substrate (5) and/or two masses (5, 7) which move toward one another are connected by at least one bending spring device (6). The bending spring device (6) has a spring bar (9) and a meander (10), provided thereon, having a circle of curvature (K1; K6; K8; K9; K11) whose midpoint (MP1; MP6; MP8; MP9; MP11) and radius of curvature (r1; r6; r8; r9; r11) are inside the meander (10). For reducing stresses that occur, in addition to the radius of curvature (r1; r6; r8; r9; r11) having the inner midpoint (MP1; MP6; MP8; MP9; MP11), the meander (10) has at least one further radius of curvature (r2; r3; r4; r5; r7; r10) having a midpoint (MP2; MP3; MP4; MP5; MP7; MP10) outside the meander (10).

Abstract: A micro gyroscope determine three-dimensional rotational movements is mounted on a substrate on which a plurality of masses tangentially oscillate about the z axis perpendicular to the substrate. The oscillating masses are fastened to the substrate by springs and bolts. Driving elements maintain oscillating tangential vibrations of the masses about the z axis. Upon rotation of the substrate about any spatial axis, the masses are subjected to deflections caused by Corolis forces that are detected by sensor elements. Certain masses oscillating about the z axis are tiltable about the x axis, while some others are tiltable about the y axis. At least one other mass is configured to deflect radially to the z axis in a x-y plane parallel to the plane of the substrate. This mass is assigned a sensor element that can deflect radially with respect to the axis but cannot oscillate about the z axis.

Abstract: A micromechanical rate-of-rotation sensor for detecting a rate of rotation about a sense axis includes a substrate, a detection unit, means for generating a rotational oscillation of the detection unit about a drive axis which is orthogonal to the sense axis, and a central suspension means rotatably coupling the detection unit to the substrate in a fulcrum of the detection unit. The central suspension means is configured to permit the detection unit to perform a detection movement about a detection axis orthogonal to the sense axis in the form of a rotational oscillation about the central suspension means. The sensor also includes at least two second suspension means coupling the detection unit and the substrate for providing a response behavior specific to rotation about at least one of the drive axis and the detection axis.

Abstract: A microgyroscope is used to determine rotational motions about at least one of three perpendicular spatial axes x, y, and z. The microgyroscope has a substrate (1) on which multiple masses (2x, 2y, 9) which oscillate parallel to the plane of the substrate (1) in an x-y plane are situated. Some of the oscillating masses (2x, 2y) are attached to the substrate (1) by means of springs and anchorings. Drive elements (4a, 4b) are used to maintain oscillating vibrations of the masses (2x, 2y, 9) which are subjected to Coriolis forces when the substrate (1) rotates about any given spatial axis. Sensor elements detect the deflections of the masses (2x, 2y, 9) due to the Coriolis forces generated.

Abstract: A micromechanical sensor comprising a substrate (5) and at least one mass (6) which is situated on the substrate (5) and which moves relative to the substrate (5) is used to detect motions of the sensor due to an acceleration force and/or Coriolis force which occur(s). The mass (6) and the substrate (5) and/or two masses (5, 7) which move toward one another are connected by at least one bending spring device (6). The bending spring device (6) has a spring bar (9) and a meander (10), provided thereon, having a circle of curvature (K1; K6; K8; K9; K11) whose midpoint (MP1; MP6; MP8; MP9; MP11) and radius of curvature (r1; r6; r8; r9; r11) are inside the meander (10). For reducing stresses that occur, in addition to the radius of curvature (r1; r6; r8; r9; r11) having the inner midpoint (MP1; MP6; MP8; MP9; MP11), the meander (10) has at least one further radius of curvature (r2; r3; r4; r5; r7; r10) having a midpoint (MP2; MP3; MP4; MP5; MP7; MP10) outside the meander (10).

Abstract: A micromechanical sensor comprising a substrate (5) and at least one mass (6) which is situated on the substrate (5) and which moves relative to the substrate (5) is used to detect motions of the sensor based on an acceleration force and/or Coriolis force which occur(s). The mass (6) and the substrate (5) and/or two masses which move toward one another are connected by at least one bending spring device (1) for a relative rotational motion. The bending spring device (1) has multiple, in particular two, spring bars (2) extending essentially parallel to one another for improving the linear spring characteristic of the bending spring device during the rotational motion, and at least one meander (3) on at least one, preferably on all, of the spring bars (2).

Abstract: A micro gyroscope for determining rotational movements about three spatial axes x, y and z, which are perpendicular to one another has a substrate (1) on which a plurality of masses (2, 3) oscillating tangentially about the z axis, which is perpendicular to the substrate (1), are arranged. The oscillating masses (2, 3) are fastened on the substrate (1) by means of springs (5, 6, 8) and the bolts (7, 9). Driving elements (11) serve to maintain oscillating tangential vibrations of the masses (2, 3) about the z axis as a result of which, upon rotation of the substrate (1) about any spatial axis, the masses (2, 3) are subjected to Corolis forces and deflections caused as a result. Sensor elements detect the deflections of the masses (2, 3) on the basis of the Corolis forces generated. Some of the masses (2, 3) oscillating about the z axis are mounted in a tiltable manner substantially about the x axis which runs parallel to the substrate (1).

Abstract: A micromechanical rate-of-rotation sensor for detecting a rate of rotation about a sense axis includes a substrate, a detection unit, means for generating a rotational oscillation of the detection unit about a drive axis which is orthogonal to the sense axis, and a central suspension means rotatably coupling the detection unit to the substrate in a fulcrum of the detection unit. The central suspension means is configured to permit the detection unit to perform a detection movement about a detection axis orthogonal to the sense axis in the form of a rotational oscillation about the central suspension means. The sensor also includes at least two second suspension means coupling the detection unit and the substrate for providing a response behavior specific to rotation about at least one of the drive axis and the detection axis.