Abstract: The invention discloses a device and an apparatus with the assistance of which a driver can locate his parked vehicle of unknown location. The information concerning the instantaneous location of the vehicle gained by a navigation system located in the vehicle is transferred, prior to or at completion of parking, to a mobile terminal which can be carried along by the driver when leaving his vehicle and stored therein. When needed, the driver can recall the information concerning the parked location from the memory of the mobile terminal for display on a monitor in a recognizable manner. Instead of direct storage in the mobile terminal, the information concerning the parked location can also be stored in a remote intermediate memory to which the terminal has access.

Abstract: By the selection of an optimized base (A') which is composed of n sampling functions (S.sub.1, S.sub.2, . . . S.sub.n), a better signal-to-noise ratio is obtained during measuring. After projections of the measured values (f*) obtained from the sampling by the formation of scalar products from the measured values and the sampling functions (f*.S.sup.T.sub.1, f*.S.sup.T.sub.2, . . . , f*.S.sup.T.sub.n), a final coordinate retransformation is carried out in order to get from the representation in the optimized base (A') to a representation in the unit base (A).

Abstract: A process and a system for measuring the temporal course of a recurring signal at at least one site of, measurement of a sample, the sample being impinged upon by a primary corpuscular beam and a secondary signal being derived from the sample. The process and the system has a primary beam current that is temporally variable. There is interaction between the primary beam and the sample. At least one part of the interaction between the primary beam and the sample is registered and/or recorded. The temporal relationship between a trigger signal, which is in a defined temporal relationship with the signal course to be measured, and the course of the primary wave current is measured. The registered and/or recorded values of the secondary signals are assigned to the points in time of the signal course to be measured according to the temporal relationship measured in the preceding step of the process.

Abstract: In electron beam measuring, it is often also necessary to measure the frequency range in addition to the measuring time range. In order to do this, according to the invented process, the output signal of the local oscillator of a spectrum analyzer, as is known from conventional high-frequency measuring, undergoes a first frequency conversion and subsequently is utilized for modulating the primary beam. Based on the potential contrast as a multiplicative interaction and the modulated primary beam, the under circumstances very high-frequency signal to be analyzed is transformed to an easily detected low intermediate frequency. Subsequently this intermediate frequency signal is transferred into an input frequency plane of the spectrum analyzer by a second frequency conversion. Both the variable input selection frequency or the fixed intermediate frequency of the spectrum analyzer may be the frequency . The measured result appears in the usual manner on the display of the spectrum analyzer.

Abstract: In conventional processes of electron beam measuring, the measurement of signals at a measuring point of a sample occurs following scanning and averaging procedures with the aid of potential contrasts. For this purpose, the point of measurement is impinged upon with a short primary electron pulse, which is released by a trigger pulse, which is synchronous to the signal to be measured. The average value of the secondary electron pulse stream resulting from very many primary electrons is measured and is a measure for the signal at the measuring position at the point in time of the impingement of the primary electrons. The generation of primary electron pulses occurs with a beam modulation system. As the primary electron pulses are generated in response to the trigger pulses, this system has to be designed very widebanded.

Abstract: A scanning microscope scans over the surface of a specimen to be tested in point-by-point fashion with a probe. The scan rate of the probe is controlled as dependent on a secondary electrical signal derived from the measuring point of the specimen surface and, thus, serves as a control signal to the output signal of a signal processing unit which is evaluated at a window discriminator or comparator. The output signal is supplied to a voltage controlled oscillator of the scan generator through an adjustable timer element. Simultaneously, the evaluated output signal is used for modulating the intensity of the write beam of a display means for controlling the intensity of the probe.

Abstract: A method and apparatus for detecting imaging measuring points which have a defined signal progression for testing an integrated circuit and wherein the signals at the measuring points have a defined signal progression and wherein a secondary particle signal is generated using a scanning particle microscope and which makes it possible to quickly locate a measuring point in an integrated circuit at which a defined signal is present or, respectively, assuming there are faults in the electronic modules to identify whether a defined signal has potentially failed and wherein the measured secondary particle signal is compared to the anticipated signal. The comparison can occur using a correlation method and the correlation can be accomplished with the assistance of an electronic correlator or also with the assistance of the particle beam itself. When the particle beam itself is used, the particle beam is modulated with the anticipated signal progression and the resulting secondary particle signal is integrated.

Abstract: A method and apparatus for detecting and imaging a voltage signal of at least one specific frequency at a measuring location of a test object, such as an integrated circuit, employ a scanning particle or radiation microscope for generating a voltage contrast signal whereby primary particles or radiation are pulsed or otherwise intensity-modulated with at least one specific frequency which frequency is different from at least one frequency of the signal at the test location. The voltage signal also includes an unmodulated topography component. The voltage contrast signal is mixed to a specific intermediate frequency and the resulting mixed signal is demodulated. The mixed signal is added to the unmodulated topography component and the result of the addition is displayed. The method and apparatus can be utilized to identify faulty electronic modules.

Abstract: A measurement processing arrangement for processing of signal curves of periodic high frequency measured signals through parallel measurement processing units include n number of preceding gate circuits which periodically process n number of chronologically offset measured signals and form n averages over m number of respective samples.

Abstract: A scanning microscope scans over the surface of a specimen to be tested in point-by-point fashion with a probe. The scan rate of the probe is controlled as dependent on a secondary electrical signal derived from the measuring point of the specimen surface and, thus, serves as a control signal to the output signal of a signal processing unit which is evaluated at a window discriminator or comparator. The output signal is supplied to a voltage controlled oscillator of the scan generator through an adjustable timer element. Simultaneously, the evaluated output signal is used for modulating the intensity of the write beam of a display for controlling the intensity of the probe.

Abstract: A method and arrangement for imaging surface structures and distributions of voltages of a specimen using a scanning microscope that includes a detector system for detecting secondary electrons triggered at the specimen to be investigated. The detector system used includes a plurality of individual detectors arranged symmetrically relative to the specimen so that the secondary particles can be extracted largely symmetrically and independent of the emission point and emission angle. To detect secondary particles emitted in the direction of the symmetry axis of the detector system, an extraction field is generated with time dependent signals so that the secondary particles are accelerated in a momentarily highly asymmetrical field which is symmetrical on a chronological average, the secondary particles being deflected in a direction of regions sensitive to the secondary particles.

Abstract: A method and apparatus for detecting imaging measuring points which have a defined signal progression for testing an integrated circuit and wherein the signals at the measuring points have a defined signal progression and wherein a secondary particle signal is generated using a scanning particle microscope and which makes it possible to quickly locate a measuring point in an integrated circuit at which a defined signal is present or, respectively, assuming there are faults in the electronic modules to identify whether a defined signal has potentially failed and wherein the measured secondary particle signal is compared to the anticipated signal. The comparison can occur using a correlation method and the correlation can be accomplished with the assistance of an electronic correlator or also with the assistance of the particle beam itself. When the particle beam itself is used, the particle beam is modulated with the anticipated signal progression and the resulting secondary particle signal is integrated.

Abstract: A method and apparatus for detecting and imaging a voltage signal of at least one specific frequency at a measuring location of a test object, such as an integrated circuit, employ a scanning particle or radiation microscope for generating a voltage contrast signal whereby primary particles or radiation are pulsed or otherwise intensity-modulated with at least one specific frequency which frequency is different from at least one frequency of the signal at the test location. The voltage contrast signal is mixed to a specific intermediate frequency and the resulting mixed signal is demodulated. The method and apparatus can be utilized to identify faulty electronic modules.

Abstract: A method and apparatus for determination of specific points on a specimen carrying a signal having a specific signal frequency by use of a scanning microscope. A detector provides a secondary electrical signal corresponding to respective particular scan points. An output of the detector connects to first and second evaluation circuits which each output a signal based on and representative of the specific signal frequency. The first evaluation circuit has a band-width substantially narrower than the second evaluation circuit. An output signal of the second evaluation circuit determines when to switch a scanning generator of the scanning microscope from a first scan rate to a second slower scan rate. The output signal of the first evaluation circuit is employed for evaluation relative to the specific points carrying the specific signal frequency.

Abstract: With the method and apparatus for the detection and/or imaging of a measuring point which carries a voltage at least of a specific frequency, wherein, in a scanning particle or radiation microscope, a voltage contrast signal is further processed into a measuring signal by a lock-in amplifier, a spectral analysis of a voltage carried at the measuring point is possible even when one or more frequencies from the spectrum of this signal are unknown. A reference signal is supplied to the lock-in amplifier at a frequency fb which is varied over a frequency range. A signal regarding the magnitude of the frequency fb of the reference signal is transmitted to a device for the recording of the measuring signal so that the measuring signal can be indicated in dependence upon the frequency fb of the reference signal.

Abstract: A circuit for preventing burn-in spots on the picture screen 23 of a visual display 2 comprising an electron beam 19 that is intensity modulated and positioned controlled by way of a deflection system 21, 22 as, for example, for a scanning electron microscope. The protection to prevent burn-in spots utilizes a circuit wherein the signal input 24 of at least one deflection system 21 is electrically connected to a differentiator which produces an output that is connected to the first input of a comparator which also receives a reference voltage and the comparator output is switched to the input of a retriggable trigger circuit so as to control the intensity of the electron beam 19 and thus prevent burn-in on the picture screen.