Abstract: A laser system, which is used in material processing to produce a radiation line of small width and uniform high intensity in the longitudinal direction, produces radiation that has different mode numbers M2 perpendicular to the propagation direction.

Abstract: A laser system, which is used in material processing to produce a radiation line of small width and uniform high intensity in the longitudinal direction, produces radiation that has different mode numbers M2 perpendicular to the propagation direction.

Abstract: A device is obtained for converting the intensity distribution of a laser beam in particular into an intensity distribution which falls constantly along an axis from one side to the other in that a homogenizer (10), which mutually superimposes the sub-beams of the laser beam such that when a laser beam with a specific intensity distribution passes through the homogenizer, a homogenization of the intensity distribution of the laser beam is promoted, is combined with at least one inverter (24, 26) which inverts the intensity distribution of a sub-region, in particular a sub-beam or a plurality of adjacent sub-beams, along at least one axis along which the intensity is to be converted. The extent of the fall in intensity from one side to the other can be controlled by means of the number of the inverters.

Abstract: A device is obtained for converting the intensity distribution of a laser beam in particular into an intensity distribution which falls constantly along an axis from one side to the other in that a homogenizer (10), which mutually superimposes the sub-beams of the laser beam such that when a laser beam with a specific intensity distribution passes through the homogenizer, a homogenization of the intensity distribution of the laser beam is promoted, is combined with at least one inverter (24, 26) which inverts the intensity distribution of a sub-region, in particular a sub-beam or a plurality of adjacent sub-beams, along at least one axis along which the intensity is to be converted. The extent of the fall in intensity from one side to the other can be controlled by means of the number of the inverters.

Abstract: An optical apparatus for the homogenization of laser radiation, in particular of an excimer laser, and for the generation of several lighting fields (F1, F2) from this radiation comprises a plurality of acentric lens segments (G1a, G1b, G1c, G1d; G2a, G2b, G2c, G2d). The acentric lens segments are characterized in that they are segments of cylindrical lenses with an axis of symmetry and that the portion of the cylindrical lens which contains the axis of symmetry is not part of the acentric lens segment. Several groups (G1, G2) of acentric cylindrical lens segments are provided, with each group generating a lighting field (F1, F2) of homogeneous energy density. A collecting lens (S) is arranged downstream of the acentric lens segments, which generates the lighting fields (F1, F2) on a work plane (E).

Abstract: An optical device is described for generating a sharp illuminating line on an illuminating plane from a high-power laser beam. The sharp illuminating line includes long and short axes. The optical device comprises an anamorphic setup of imaging and homogenizing optical systems for the separate imaging and homogenizing of the laser beam in the directions of the long and short axes. For imaging and homogenizing the laser beam in the direction of the short axes, a slit is illuminated homogeneously and the slit is imaged on the illumination plane by reducing optics.

Abstract: An apparatus for laser machining by creating a plurality of discrete and separate beams which are sent to a deflecting device including a support and a plurality of individual elements that act independently and are individually controlled to machine different points on the workpiece simultaneously.

Abstract: An optical device for homogenizing a light beam comprises a plurality of first lenses on which the light beam impinges from one side. At the side on which the light beam impinges the first lenses are convex, while they are prismatic at the opposite side at which the light beam emerges from the lenses. At least one convergent lens is disposed downstream of the lenses mentioned in the direction of the light beam. Instead of giving the first lenses a prismatic configuration it is also possible to make the first lenses plano-convex and arrange second lenses of plano-concave shape downstream of the first lenses in the direction of the light beam.

Abstract: For monitoring the working of a workpiece (W) with pulsed radiation of an excimer laser the workpiece surface is periodically illuminated with visible light (B) synchronously with at least some of the laser pulses. A mirror arrangement (S) separates visible light from ultraviolet laser light so that an image corresponding to the working operation can be picked up with a video camera (VK).