Abstract: An apparatus for the implementation of plasma etching processes providing a process chamber, an upper electrode, and a lower electrode. The upper electrode comprises an anode member, movable with respect to the process chamber, and provides a gas shower for delivering a highly reactive gas, such as a gas containing fluorine or chlorine, into the process chamber. The lower electrode provides a surface for holding a substrate to be etched, the lower electrode being supplied with a high-frequency negative voltage and cooled by an outside source. The process chamber is shaped to press the substrate to the lower electrode when the process chamber is lowered upon the substrate in preparation for operation. The process chamber presses the substrate around a continuous periphery of the substrate. The process chamber is provided with exhaust gas export holes which can be progressively aligned with matching holes in a perforated disk rotatably mounted to an outside surface of the process chamber.

Abstract: The method relates to manufacturing contact spring sockets with a plurality of radially inward bowed contact springs clamped at one end in an approximately cylindrical socket body, formed by a thin-walled deformable sleeve. After introduction of the straight contact springs into the socket body from one socket end, they are made fast by deformation of the socket material and their free ends are brought into supporting abutment on an annulus. This is associated with a mandrel for assisting assembly, which passes through it and which is during manufacture introduced co-axially into the socket body and finally withdrawn from it. Subsequently the mandrel together with the annulus is introduced into the socket body. The contact springs are then, by applying axial pressure on their ends, converted into a shape bowed into the interior of the socket until they abut the mandrel.

Abstract: A connector, for a multiconductor flat cable, composed of three rows of connection contacts mounted at a defined distance from one another in an elongate body of insulating material, with the connection contacts having the shape of sockets or pins which extend toward one surface or side of the insulating body. The connection contacts are each connected, via a center connecting section, with respective conductor terminals which are spaced slightly differently from one another than the associated connection contacts and each has the shape of a pair of contact fingers which extend approximately mutually parallel toward the opposite side or surface of the insulating body. The conductor terminals are longitudinally located such that each conductor of the flat cable will be pressed between a respective pair of contact fingers so as to pierce or displace the insulation surrounding the conductor and contact same.

Abstract: A method relates to manufacturing contact spring sockets with a plurality of contact springs, clamped at one end in an approximately cylindrical thin-walled socket body and bowed radially inward. The straight contact springs are introduced in the socket body into the annular space between a mandrel and the socket wall and subsequently when in an aligned state relative to each other are pressed against an annular head at the front end of the line connector which partly projects into the socket body and are made fast in this position at one end. Deformation of the socket body for elastically bowing the contact springs can be omitted according to the invention, if after introduction of the contact springs into the annular space of the socket body an insert ring (10) is introduced into the latter fitting adjacent the socket innner wall, whose internal diameter is smaller than the external diameter of the annulus plus twice the diameter of the contact springs.

Abstract: The method relates to manufacturing contact spring sockets with a plurality of radially inward bowed contact springs (9) clamped at one end in an approximately cylindrical socket body (1), formed by a thin-walled deformable sleeve. The straight contact springs, formed by sections of a contact spring wire, are introduced into the socket body and made fast at their front ends to a central head (10) at the front end of a line connector (2) by deformation of the socket material. The free ends of the contact springs (9) are brought into supporting abutment on an annulus (5) at the pin insertion end.