Abstract: A valve on which a valve plate is arranged in a valve housing interior space of a valve housing and fixed to a shaft, in which the valve plate together with the shaft can be displaced back and forth in directions parallel to a shaft longitudinal axis between a closed position and an intermediate position, and by rotation of the shaft about the shaft longitudinal axis can be pivoted back and forth between the intermediate position and a maximum open position. A shaft leadthrough for sealing the shaft with respect to the valve housing has a bellows which can be expanded and pushed together in the directions parallel to the shaft longitudinal axis, a first bellows end of this bellows being fixed to the valve housing, and a shaft sealing ring in which the shaft is rotatably mounted, being arranged on a second bellows end.

Abstract: A seal support ring (1) for a valve (2), particularly a vacuum valve, which has a throughflow opening (3) and a basic body (4), which annularly surrounds the throughflow opening, and a fastener arrangement (5) for fastening the seal support ring to a valve housing (6) of the valve. The basic body has a first side (7) on which the seal support ring, in a mounted state on the valve housing, lies against the valve housing, and the seal support ring has a seal ring (8) made from an elastomer which, in its position on the basic body, surrounds the throughflow opening. A casing wall (9) is arranged on the basic body and at least partially surrounds the throughflow opening and, on a second side (10) of the basic body (4) opposite the first side, protrudes from the basic body and has a larger inside diameter than the seal ring.

Abstract: The invention relates to a vacuum valve for substantially gas-tight closure of a first valve opening including a valve seat, a closure element for substantially gas-tight closure of the first valve opening, and a drive unit for providing a movement of the closure element relative to the valve seat. The closure element is designed to be flexible in such a way that a spatial expansion of the closure element in the closed position is variable in a direction parallel to the opening axis as a function of an applied differential pressure.

Abstract: Disclosed is a vacuum valve system for a vacuum transport system, including a valve seat assembly having a first valve opening defining an opening axis and a first sealing surface surrounding the first valve opening; a closure component for closing of the first valve opening with a second sealing surface corresponding to the first sealing surface; and a drive unit for the closure component. The valve seat assembly can be combined with the transport tube to provide a gas-tight transition between the valve seat assembly and the transport tube, and the first valve opening. At least the valve seat assembly and the closure component are formed as separate system components that can be modular, and the closure component the valve seat assembly can be modular so that the open position and the closed position for the closure component is driven by the drive unit.

Abstract: The invention relates to a gas inlet valve for the controlled inlet of a process gas into a vacuum process chamber, wherein the gas inlet valve comprises: a gas flow unit with a gas inlet, a gas outlet and an inner volume which has free access to the gas inlet and to the gas outlet, wherein the gas flow unit has a sealing surface in the inner volume, an adjusting device with an adjusting unit, wherein the adjusting unit projects into the inner volume and is adjustably mounted outside the gas flow unit in the adjusting device, wherein the adjusting unit has a plate which is arranged inside the inner volume, wherein the plate can be brought into a closed position by means of the adjusting device, in which the plate rests on the sealing surface and thus prevents a gas flow, and wherein the plate can be brought by means of the adjusting device into an open position in which the plate is spaced from the sealing surface and thus allows a gas flow, two flexible sealing elements, which are fixed in each case to the g

Abstract: An arrangement with a valve having a valve housing and a closure member mounted for movement in an interior space of the valve housing between a closed position and an open position by a valve drive. The closure member closes valve housing openings in the closed position and opens them in the open position. The arrangement has an attachment part with an attachment part housing and a push tube, and the push tube is mounted displaceably in the attachment part housing. The attachment part housing and the push tube together enclose a line cavity of the attachment part for conducting a fluid through the attachment part. The attachment part housing is fastened on the outside to the valve housing, and the push tube can be pushed through the interior space of the valve housing when the closure member is in the open position.

Abstract: A seal support ring (1) for a valve (2), particularly a vacuum valve, which has a throughflow opening (3) and a basic body (4), which annularly surrounds the throughflow opening, and a fastener arrangement (5) for fastening the seal support ring to a valve housing (6) of the valve. The basic body has a first side (7) on which the seal support ring, in a mounted state on the valve housing, lies against the valve housing, and the seal support ring has a seal ring (8) made from an elastomer which, in its position on the basic body, surrounds the throughflow opening. A casing wall (9) is arranged on the basic body and at least partially surrounds the throughflow opening and, on a second side (10) of the basic body (4) opposite the first side, protrudes from the basic body and has a larger inside diameter than the seal ring.

Abstract: Disclosed is a regulating vacuum having a first valve seat having a first valve opening defining a first opening axis and a first sealing surface surrounding the first valve opening, and a first valve disk having a first contact surface corresponding to the first sealing surface. The valve includes a drive unit coupled to the first valve disk to adjust at least between an open position to a closed position. The regulating vacuum valve has at least one second valve seat, having a second valve opening with a second sealing surface. In addition, a second valve disk having a second contact surface corresponding to the second sealing surface is provided. An overall valve opening of the regulating vacuum valve is formed by the first valve opening as a first valve partial opening and the second valve opening as a second valve partial opening.

Abstract: The invention relates to a vacuum valve having a screw element for coupling a first component of the vacuum valve to a second component. The screw element has a force transfer surface section between a threaded surface section having a first thread and an engagement surface section, arranged in a first gas region, for a tool. The first and second component are coupled by a thread engagement, carried out through a passage hole in the first component, between the first thread and a second thread assigned to the second component. The screw element has a sealing surface section between the threaded surface section and the engagement surface section. Between the sealing surface section and a sealing face of the first component, a sealing seal element is arranged so the first gas region is separated in a gas-tight or particle-tight manner from a third gas region.

Abstract: A valve, in particular a vacuum valve, in which, in order to close a passage opening, in particular of the valve, at least one closure member can be moved by a valve drive, starting from a maximum open position, in which the closure member opens the passage opening at least partially, first on a first partial path into an intermediate position, and the closure member can be moved, starting from the intermediate position, on at least one second partial path which is angled away from the first partial path into a closed position, in which the closure member closes the passage opening, the valve drive having at least two cylinder spaces which are loadable in each case with a pressure medium, at least one piston being mounted displaceably in each of the cylinder spaces, and the pistons being supported on one another by way of at least one prestressing element.

Abstract: A valve, in particular a vacuum valve, in which, in order to close a passage opening, in particular of the valve, at least one closure member can be moved by a valve drive, starting from a maximum open position, in which the closure member opens the passage opening at least partially, first on a first partial path into an intermediate position, and the closure member can be moved, starting from the intermediate position, on at least one second partial path which is angled away from the first partial path into a closed position, in which the closure member closes the passage opening, the valve drive having at least two cylinder spaces which are loadable in each case with a pressure medium, at least one piston being mounted displaceably in each of the cylinder spaces, and the pistons being supported on one another by way of at least one prestressing element.