Abstract: A manufacturing method of micro fluid actuator includes: providing a substrate; depositing a first protection layer on a first surface of the substrate; depositing an actuation region on the first protection layer; applying lithography dry etching to a portion of the first protection layer to produce at least one first protection layer flow channel; applying wet etching to a portion of a main structure of the substrate to produce a chamber body and a first polycrystalline silicon flow channel region, while a region of an oxidation layer middle section of the main structure is not etched; applying reactive-ion etching to a portion of a second surface of the substrate to produce at least one substrate silicon flow channel; and applying dry etching to a portion of a silicon dioxide layer to produce at least one silicon dioxide flow channel.

Abstract: A thin profile gas transporting device includes a gas collecting plate, a valve sheet, a discharge sheet, and a gas pump. The gas pump is disposed on the gas collecting plate. The gas collecting plate, the valve sheet, and the discharge sheet are stacked and assembled sequentially. Through simplifying the structures of the gas collecting plate and the discharge sheet, the thicknesses of the gas collecting plate and the discharge sheet can be reduced. Moreover, through the arrangement of several pressure relief holes, the pressure relieving operation can be performed rapidly and quietly.

Abstract: An earphone includes an earphone body, a loudspeaker embedded on the wearing surface of the earphone body, a gas bag disposed on the base member of the earphone body, a gas actuator disposed on the base member of the earphone body, and a valve component having a valve unit. When the gas actuator and the valve component are driven, the valve unit is opened to control gas introduction of the gas actuator, and the gas actuator is actuated to transmit the gas to the ventilating channel for gas collection, and the gas actuator further transmits the gas to the gas bag for inflating the gas bag, so that the gas bag is expanded and protruded out of the wearing surface, thereby capable of allowing the earphone to be stably worn and attached to a user's ear portion.

Abstract: A gas transportation device is provided and includes an outer housing, a valve body and an actuator. The valve body includes a gas outlet plate, a valve plate and a first plate. The gas outlet plate includes plural outlet apertures, the first plate includes plural first orifices, the valve plate includes plural valve openings, the plural valve openings are misaligned with the plural first orifices and corresponding in position to the plural outlet apertures. The actuator having an actuating component in rectangular shape is stacked and disposed on the valve body. When the actuator is driven, through the structure that the plural first orifices and the plural valve openings are misaligned, the valve body is operated to open a flow path when an airflow is in a forward direction, and the valve body is operated to seal the flow path when the airflow is in a reverse direction.

Abstract: An air detection system is provided and includes an intelligent device and an internet of things processing device. The intelligent device includes an inlet, an outlet, a gas-flowing channel, a control module and a gas detection module. The gas-flowing channel is disposed between the inlet and the outlet. The control module is disposed in the intelligent device and includes a processor and a transmission unit. The gas detection module is disposed in the gas-flowing channel and electrically connected to the control module. The gas detection module includes a piezoelectric actuator and at least one sensor. The piezoelectric actuator inhales gas into the gas-flowing channel through the inlet and discharges the gas through the outlet. The sensor detects the introduced gas to obtain gas information and transmits the gas information to the control module. The internet of things processing device is connected to the transmission unit of the intelligent device for receiving the gas information.

Abstract: A power driver of an unmanned aerial vehicle is disclosed and includes a main body, a fluid actuation system and a controller, wherein the fluid actuation system includes a driving zone, a converging chamber, a plurality of valves and a fluid discharging zone. The driving zone includes a plurality of flow guiding units which arranged in series, parallel or series-parallel, each of the flow guiding unit generates an inside pressure gradient after being actuated, so as to inhale fluid and diverge fluid by guiding channels, and flow into the convergence chamber for storage, wherein the amount of the fluid transported is controlled by the plurality of valves disposed in the connection channels through the controller, and fluid is finally converged to the fluid discharging zone for discharging the specific transportation amount of fluid.

Abstract: A micro pump includes a base plate, a valve membrane, an upper covering plate and a pump core module. The valve membrane is disposed in a valve membrane accommodation slot of the base plate, seals a fluid channel of the base plate and includes a valve aperture where a protruding portion of the base plate extended through. The upper covering plate is accommodated in an upper covering plate accommodation slot of the base plate and includes a fluid relief aperture sealed by the valve membrane, a fluid converging groove and a fluid converging channel between the fluid converging groove and a fluid-outlet channel of the base plate. The pump core module is accommodated within a pump accommodation slot of the base plate. By actuating the pump core module, the fluid passes through the fluid channel, the valve aperture, the fluid converging groove, and is discharged out through the fluid-outlet channel.

Abstract: An actuating breathable material structure is disclosed and includes a supporting main body, a plurality of actuating breathable units and a plurality of micro processing chips. The supporting main body is made of a supporting matrix. The plurality of actuating breathable units and the plurality of micro processing chips are compounded and are integrally formed with the supporting matrix into one piece. By controlling the actuation of the plurality of actuating breathable units through the plurality of micro processing chips, a breathing effect resulting from gas transportation in a specific direction is performed.

Abstract: A gas detection device manufactured by a semiconductor process includes a substrate, a microelectromechanical element, a light-emitting element, a particle-sensing element, a gas-sensing element, a driving-chip element and an encapsulation layer. The driving-chip element controls driving operations of the microelectromechanical element, the light-emitting element, the particle-sensing element and the gas-sensing element, respectively. When the microelectromechanical element is enabled to actuate transportation of gas, the gas is introduced into the gas detection device through an inlet aperture of the substrate. Scattered light spots generated by the light beam of the light-emitting element irradiating on suspended particles contained in the gas are received by the particle-sensing element to generate a detection datum of the suspended particles. The gas-sensing element detects the gas passing through and generates a detection datum of hazardous gas contained in the gas.

Abstract: A wearable display device includes a device body, a heat dissipation processing module, and an inflation actuation module. The device body includes a front cover, a side cover, a fillable gas bag, a circuit board, and a microprocessor. The heat dissipation processing module includes a first actuator corresponding to the microprocessor for performing heat exchange for the microprocessor. The inflation actuation module includes a base member, a gas communication channel, a second actuator, and a valve component. When the second actuator and the valve component are driven, the valve component is opened to control gas introduction of the second actuator, and the second actuator is actuated to transmit the gas to the gas communication channel for gas collection, and the second actuator further transmits the gas to the fillable gas bag for inflating the fillable gas bag, so as to allow a user to wear the wearable display device stably.

Abstract: A blood glucose monitoring and controlling system includes a detecting device and a liquid supplying device. The detecting device includes a first microneedle patch, a liquid pumping actuator, a sensor and a monitoring and controlling chip. The liquid supplying device includes a second microneedle patch, a liquid supplying actuator, a liquid supplying chamber and a liquid supplying and controlling chip. The detecting device is used to measure the blood glucose level of the user, and the liquid supplying device is used to supply insulin liquid. While the detecting device measures that the blood glucose level of the user is abnormal, the liquid supplying device is actuated to inject the insulin liquid into the user's body, thereby stabilizing the user's blood glucose level constantly.

Abstract: A MEMS pump includes a first substrate, a first oxide layer, a second substrate, a second oxide layer, a third substrate and a piezoelectric element sequentially stacked to form the entire structure of the MEMS pump. The first substrate has a first thickness and at least one inlet aperture. The first oxide layer has at least one fluid inlet channel and a convergence chamber, wherein the fluid inlet channel communicates with the convergence chamber and the inlet aperture. The second substrate has a second thickness and a through hole, and the through hole is misaligned with the inlet aperture and communicates with the convergence chamber. The second oxide layer has a first chamber with a concave central portion. The third substrate has a third thickness and a plurality of gas flow channels, wherein the gas flow channels are misaligned with the through hole.

Abstract: A micro fluid actuator includes an orifice layer, a flow channel layer, a substrate, a chamber layer, a vibration layer, a lower electrode layer, a piezoelectric actuation layer and an upper electrode layer, which are stacked sequentially. An outflow aperture, a plurality of first inflow apertures and a second inflow aperture are formed in the substrate by an etching process. A storage chamber is formed in the chamber layer by the etching process. An outflow opening and an inflow opening are formed in the orifice layer by the etching process. An outflow channel, an inflow channel and a plurality of columnar structures are formed in the flow channel layer by a lithography process. By providing driving power which have different phases to the upper electrode layer and the lower electrode layer, the vibration layer is driven to displace in a reciprocating manner, so as to achieve fluid transportation.

Abstract: A method for notifying a service life of a filter includes steps of providing a filter for filtering an air pollution source; providing a gas detection device for detecting the air pollution source and outputting the detection data of the air pollution source; providing a connection device for receiving, computing and comparing the detection data of the air pollution source detected by the gas detection device, so as to display a reducing rate of filtering efficiency for the filter; and when the reducing rate of filtering efficiency for the filter reaches a preset alert value, the connection device sends out a notification alert of replacing the filter.

Abstract: An air motor is provided for converting electrical energy into kinetic energy, and using the kinetic energy to generate a specified air pressure and a specified airflow rate. The air motor comprises plural air motor units, each of which includes a main body and a piezoelectric actuator. The piezoelectric actuator is disposed within the main body. When the piezoelectric actuator is enabled, the air within the main body is controlled and driven to flow. The air motor can be used to replace various types of motors, compressors or engines.

Abstract: A particle detecting device is provided. The particle detecting device includes a resonator and a piezoelectric actuator. The piezoelectric actuator is used to transport a gas into the resonator, and a mass and a concentration of the screened and required-diameter particles are detected through the resonator. Thus, the air quality can be monitored immediately anytime and anywhere.

Abstract: A particle detecting device is provided. The particle detecting device includes an impactor, a resonator and a piezoelectric actuator. A gas containing a plurality of suspended particles is transported into the impactor and is impacted by the impactor for performing separation and screening based on different diameters of the suspended-particles. Moreover, screened and required-diameter particles from the impactor are collected by the resonator to detect a mass and a concentration of the screened and required-diameter particles. Thus, the air quality can be monitored anytime and anywhere.

Abstract: A method of air quality notification is disclosed. The method includes steps of providing a portable air quality monitoring device for monitoring air quality. The portable air quality monitoring device monitors the ambient air quality at a location in a monitoring period of time to generate a monitoring data, and has a GPS component to generate a position data of the location, both of them can be integrated as a notification data and delivered. A cloud data processing device is provided for receiving the notification data delivered from the portable air quality monitoring device, wherein the notification data is processed, calculated and converted to generate a push data, and the push data is delivered at a push period through a push notification service. A notification receiving device is provided for receiving the push data delivered from the cloud data processing device, so as to display the push data immediately.

Abstract: An actuator includes a suspension plate, an outer frame, one or more supporting elements, a piezoelectric sheet, an inlet plate, and a resonance sheet. The suspension plate, the outer frame, the supporting element, the piezoelectric sheet, the inlet plate, and the resonance sheet are fabricated as a modular structure, and the modular structure has a length, a width, and a height.

Abstract: A MEMS pump includes a first substrate, a first oxide layer, a second substrate, a second oxide layer, a third substrate and a piezoelectric element sequentially stacked to form a modular structure. The first substrate has an inlet aperture. The first oxide layer has at least one fluid inlet channel and a convergence chamber. One end of the fluid inlet channel is in communication with the convergence chamber and the other end of the fluid inlet channel is in communication with the inlet aperture. The second substrate has a through hole misaligned with the inlet aperture and in communication with the convergence chamber. The second oxide layer has a gas chamber with a concave central portion. The third substrate has a plurality of gas flow channels misaligned with the through hole. The modular structure has a length, a width and a height.