Abstract: A machine learning model that uses composite metrology data determines at least one parameter of a device under test using measured metrology data from the device. The composite metrology data is generated by merging measured metrology data from a reference device with synthetic metrology data calculated from a model of the reference device. The composite metrology data may be generated further based on a synthetic metrology data calculated from a model for a modified reference device. The modified reference device may be generated using variations of at least one parameter of the model to expand the parameter space of the training range.

Abstract: A data analysis apparatus, a data analysis method, a method of generating a trained model, a system, and a program that allow highly accurate and easy analysis of an FT-IR spectrum are provided. The data analysis apparatus includes an obtaining unit that obtains an analysis target which is an FT-IR spectrum, a trained model, and an analyzer that inputs the analysis target to the trained model. The trained model is machine-trained so as to output, when the trained model receives input of an FT-IR spectrum, information indicating whether or not the inputted FT-IR spectrum includes a peak derived from a trained atomic group. The trained atomic group includes an atomic group containing at least three atoms.

Abstract: A meter display identification system and a meter display identification method for identifying type information of a meter included in a figure identification code displayed on the meter panel side of the meter, including an image acquisition module configured to collect image information, whose an imaging area includes a display area of the figure identification code and a display area of target data on the meter panel, of the meter panel, a meter type identification module configured to identify type information of the meter by identifying the figure identification code from image information collected by the image acquisition module, a text detection module configured to identify a display area of the target data based on the type information and a display area of the figure identification code, and a text identification module configured to perform text identification on image information in a display area of the target data are provided.