Patents by Inventor Harald Gartner

Harald Gartner has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • ROTATABLE SPUTTER TARGET
    Publication number: 20150090587
    Abstract: A target arrangement for providing material to be deposited on a substrate is provided. The target arrangement includes a target part (210) made of the material to be deposited. The target part may substantially have the shape of a hollow cylinder having an inner (260) and an outer (250) diameter, wherein the hollow cylinder includes a cylindrical surface (211) and two face surfaces (212). The target arrangement may further include a connection arrangement comprising a recess (230) within at least one of the face surfaces of target part. Also, a deposition apparatus including the target arrangement and a method for mounting a target arrangement in a deposition chamber are described.
    Type: Application
    Filed: December 9, 2011
    Publication date: April 2, 2015
    Applicant: APPLIED MATERIALS, INC.
    Inventors: Harald Gartner, Thomas Berger