Patents by Inventor Harald Kirchner
Harald Kirchner has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20160109679Abstract: There is provided an optical element unit comprising an optical element, a connector element, and an optical element holder. The optical element has a plane of main extension as well as an outer circumference and defines a radial direction. The connector element connects the optical element and the optical element holder, the connector element having a first connector part connected to the optical element at the outer circumference and a second connector part connected to the optical element holder. The first connector part and the second connector part are connected via at least one coupling part, the coupling part being compliant in the radial direction and substantially preventing rotation between the first connector part and the second connector part in a plane substantially parallel to the plane of main extension.Type: ApplicationFiled: September 8, 2015Publication date: April 21, 2016Inventors: Dirk Schaffer, Willi Heintel, Hagen Federau, Joachim Hartjes, Harald Kirchner
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Patent number: 9283770Abstract: The invention relates to an apparatus for thermal printing or embossing, comprising a film conveying section for a carrier film coated with a coloring agent, a print support for a printable medium and a printhead for selectively heating the carrier film in accordance with a predetermined printed image, so that the coloring agent is transferred from the carrier film to the printable medium in accordance with the predetermined printed image. The apparatus is characterized in that it further comprises a sensor device set up for recording a remaining pattern of the coloring agent on the carrier film after the heating of the carrier film and set up for generating a sensor signal on the basis of the recorded pattern. The invention additionally relates to a corresponding process for printed image inspection in thermal printing or embossing and to a computer program with program code for carrying out the process when the computer program is performed in a computer.Type: GrantFiled: July 9, 2013Date of Patent: March 15, 2016Assignee: ILLINOIS TOOL WORKS INC.Inventor: Harald Kirchner
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Patent number: 9134501Abstract: There is provided an optical element unit comprising an optical element, a connector element, and an optical element holder. The optical element has a plane of main extension as well as an outer circumference and defines a radial direction. The connector element connects the optical element and the optical element holder, the connector element having a first connector part connected to the optical element at the outer circumference and a second connector part connected to the optical element holder. The first connector part and the second connector part are connected via at least one coupling part, the coupling part being compliant in the radial direction and substantially preventing rotation between the first connector part and the second connector part in a plane substantially parallel to the plane of main extension.Type: GrantFiled: September 14, 2007Date of Patent: September 15, 2015Assignee: Carl Zeiss SMT GmbHInventors: Dirk Schaffer, Willi Heintel, Hagen Federau, Joachim Hartjes, Harald Kirchner
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Publication number: 20150174913Abstract: The invention relates to an apparatus for thermal printing or embossing, comprising a film conveying section for a carrier film coated with a coloring agent, a print support for a printable medium and a printhead for selectively heating the carrier film in accordance with a predetermined printed image, so that the coloring agent is transferred from the carrier film to the printable medium in accordance with the predetermined printed image. The apparatus is characterized in that it further comprises a sensor device set up for recording a remaining pattern of the coloring agent on the carrier film after the heating of the carrier film and set up for generating a sensor signal on the basis of the recorded pattern. The invention additionally relates to a corresponding process for printed image inspection in thermal printing or embossing and to a computer program with program code for carrying out the process when the computer program is performed in a computer.Type: ApplicationFiled: July 9, 2013Publication date: June 25, 2015Inventor: Harald Kirchner
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Patent number: 8441747Abstract: There is provided an optical module for microlithography. The optical module includes an optical element and a retaining device for holding the optical element. The optical element has (a) a main extension plane, in which it defines a radial direction R and a circumferential direction U, and (b) a free optical diameter and an overrun in the region of its outer periphery. The retaining device contacts the optical element in the region of the overrun, and is formed and/or contacts the optical element in such a manner that the overrun ratio, calculated from the overrun related to a minimum overrun necessary for the production of the optical element, is at most 1.5.Type: GrantFiled: September 14, 2007Date of Patent: May 14, 2013Assignee: Carl Zeiss SMT GmbHInventors: Willi Heintel, Hagen Federau, Joachim Hartjes, Harald Kirchner, Bernhard Geuppert, Ulrich Bingel, Tilman Schwertner
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Patent number: 7760327Abstract: There is provided an optical element comprising an optical element body, a reflecting area and an optical passageway. The optical element body defines an axis of rotational symmetry. The reflecting area is disposed on the optical element body and adapted to be optically used in an exposure process. The optical passageway is arranged within the optical element body and allows light to pass the optical element body, the optical passageway being arranged eccentrically with respect to the axis of rotational symmetry.Type: GrantFiled: March 31, 2006Date of Patent: July 20, 2010Assignee: Carl Zeiss SMT AGInventors: Hans-Jürgen Scherle, Yim-Bun Patrick Kwan, Stefan Xalter, Johannes Lippert, Ulrich Weber, Bernhard Geuppert, Bernhard Gellrich, Jens Kugler, Franz Sorg, Willi Heintel, Harald Kirchner, Wolfgang Keller, Andreas Frommeyer, Fraser G. Morrison
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Publication number: 20090147229Abstract: There is provided an optical element unit comprising an optical element, a connector element, and an optical element holder. The optical element has a plane of main extension as well as an outer circumference and defines a radial direction. The connector element connects the optical element and the optical element holder, the connector element having a first connector part connected to the optical element at the outer circumference and a second connector part connected to the optical element holder. The first connector part and the second connector part are connected via at least one coupling part, the coupling part being compliant in the radial direction and substantially preventing rotation between the first connector part and the second connector part in a plane substantially parallel to the plane of main extension.Type: ApplicationFiled: September 14, 2007Publication date: June 11, 2009Applicant: CARL ZEISS SMT AGInventors: Dirk Schaffer, Willi Heintel, Hagen Federau, Joachim Hartjes, Harald Kirchner
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Patent number: 7448763Abstract: An optical subassembly with an optical element, for example a mirror element (7), has an optical surface (9) and bearing points (12) arranged on the circumference. The optical element (7) is connected to a mount (13) at the bearing points (12) via connecting elements (14, 15, 16, 17, 18). Stress-decoupling cutouts, for example curved slots (11), are provided between the optical surface (9) and the bearing points (12).Type: GrantFiled: December 3, 2003Date of Patent: November 11, 2008Assignee: Carl Zeiss SMT AGInventors: Andreas Frommeyer, G Fraser Morrison, Wolfgang Keller, Yim-Bun Patrick Kwan, Harald Kirchner, Willi Heintel
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Patent number: 7428037Abstract: There is provided an optical component. The optical component includes a material having a surface that heats to a maximum temperature (Tmax) when subjected to radiation. The material has a temperature-dependent coefficient of thermal expansion (?(T)) of about zero at a temperature T0 that is approximately equal to Tmax. The optical component is suitable for use in any of an illumination system, a projection objective or a projection exposure system, as employed, for example, for EUV microlithography.Type: GrantFiled: January 24, 2005Date of Patent: September 23, 2008Assignee: Carl Zeiss SMT AGInventors: Timo Laufer, Jean-Noel Fehr, Harald Kirchner, Andreas Ochse
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Publication number: 20080204689Abstract: There is provided an optical module for microlithography. The optical module includes an optical element and a retaining device for holding the optical element. The optical element has (a) a main extension plane, in which it defines a radial direction R and a circumferential direction U, and (b) a free optical diameter and an overrun in the region of its outer periphery. The retaining device contacts the optical element in the region of the overrun, and is formed and/or contacts the optical element in such a manner that the overrun ratio, calculated from the overrun related to a minimum overrun necessary for the production of the optical element, is at most 1.5.Type: ApplicationFiled: September 14, 2007Publication date: August 28, 2008Applicant: Carl Zeiss SMT AGInventors: Willi Heintel, Bernhard Geuppert, Ulrich Bingel, Joachim Hartjes, Hagen Federau, Harald Kirchner, Tilman Schwertner
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Publication number: 20070014037Abstract: An optical subassembly with an optical element, for example a mirror element (7), has an optical surface (9) and bearing points (12) arranged on the circumference. The optical element (7) is connected to a mount (13) at the bearing points (12) via connecting elements (14, 15, 16, 17, 18). Stress-decoupling cutouts, for example curved slots (11), are provided between the optical surface (9) and the bearing points (12).Type: ApplicationFiled: December 3, 2003Publication date: January 18, 2007Inventors: Andreas Frommeyer, G. Morrison, Wolfgang Keller, Yim-Bun Kwan, Harald Kirchner, Willi Heintel
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Publication number: 20060262704Abstract: There is provided an optical element comprising an optical element body, a reflecting area and an optical passageway. The optical element body defines an axis of rotational symmetry. The reflecting area is disposed on the optical element body and adapted to be optically used in an exposure process. The optical passageway is arranged within the optical element body and allows light to pass the optical element body, the optical passageway being arranged eccentrically with respect to the axis of rotational symmetry.Type: ApplicationFiled: March 31, 2006Publication date: November 23, 2006Inventors: Hans-Jurgen Scherle, Yim-Bun Kwan, Stefan Xalter, Johannes Lippert, Ulrich Weber, Bernhard Geuppert, Bernhard Gellrich, Jens Kugler, Franz Sorg, Willi Heintel, Harald Kirchner, Wolfgang Keller, Andreas Frommeyer, Fraser Morrison
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Publication number: 20050280910Abstract: The invention relates to a method for the targeted deformation of an optical element, in particular a mirror that is positioned in an optical system. The optical element or a support element, on which the optical element is placed in such a way that forces acting on the support element cause a deformation of the optical element itself, are connected to a fixed structure indirectly by means of fixing elements or connecting members. The desired deformation of the optical element is achieved by a targeted variation of the fixing elements to modify the forces exerted in the fixing process on the optical element or the support element and/or the action of the moment of force and/or torque of the connecting members on the fixing elements.Type: ApplicationFiled: November 18, 2004Publication date: December 22, 2005Inventors: Jean Fehr, Johannes Lippert, Steffen Fritzsche, Michael Muehlbeyer, Harald Kirchner
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Publication number: 20050207001Abstract: There is provided an optical component. The optical component includes a material having a surface that heats to a maximum temperature (Tmax) when subjected to radiation. The material has a temperature-dependent coefficient of thermal expansion (?(T)) of about zero at a temperature T0 that is approximately equal to Tmax. The optical component is suitable for use in any of an illumination system, a projection objective or a projection exposure system, as employed, for example, for EUV microlithography.Type: ApplicationFiled: January 24, 2005Publication date: September 22, 2005Inventors: Timo Laufer, Jean-Noel Fehr, Harald Kirchner, Andreas Ochse
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Patent number: 6360740Abstract: A system for assisted breathing has a ventilator delivers a breathing gas to a living creature in order to facilitate, support and/or control the breathing of the living creature. The respiratory musculature is weakened during treatment with a ventilator, long-term treatment in particular, and this results in longer treatment times, especially weaning times. Accordingly, a stimulation apparatus, devised for connection to the living creature, is incorporated into the system for assisted breathing in order to stimulate the respiratory nervous system and/or respiratory musculature of the living creature. Weakening of the respiratory musculature can be reduced by the stimulation apparatus emitting a stimulation signal at specific intervals.Type: GrantFiled: October 13, 1999Date of Patent: March 26, 2002Assignee: Siemens Elema ABInventors: Leif Ward, Siegfried Kallert, Harald Kirchner, Brigitte Stroetmann
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Patent number: 5709072Abstract: A method of dyeing of short-staple fiber of cotton, synthetics or blends thereof in which the sliver if formed into a roving package on a perforated sleeve in a flyer frame with a slight twist and with a uniform winding density and the roving package is then subjected to dyeing and the dyed roving package is then delivered directly to the final spinning frame. The dyeing of the flyer slubbing is possible because of a package before final spinning, but not in the flock form with a stability of the flyer slubbing afforded by the slight twist imparted thereto in the flyer frame.Type: GrantFiled: March 8, 1996Date of Patent: January 20, 1998Assignee: "WFG" Colcoton-Garn Hasenack & Co.Inventors: Klaus Hasenack, Peter Krummenast, Harald Kirchner, Markus Spieker