Abstract: A method for producing a representation of an object using a particle beam, as well as a particle beam device for carrying out the method are disclosed. The system described herein is based on the object of specifying the method and the particle beam device for producing a representation of an object such that images which are produced, in particular including FFT images, are as free as possible of artifacts which are not caused by the object to be examined. This is achieved in particular in that pixel lives, line flyback times and pixel pause times are varied in raster patterns.

Abstract: A charged particle beam system for performing precession diffraction includes a lens 11 for focusing a beam 5 in an object plane 9, and an objective lens 13 having a diffraction plane 27. A doublet 53 of lenses 35, 63 images the diffraction plane 27 into an intermediate diffraction plane 69 where a multipole 55 is located. A doublet 57 of lenses 65, 93 images the intermediate diffraction plane 69 into an intermediate diffraction plane 71 where a multipole 59 is located. A first deflection system 15 upstream of the object plane 9 can tilt to change an angle of incidence of the beam on the object plane. A second deflection system 37 between lenses 35 and 63 tilts the beam such that the change of the angle of incidence of the charged particle beam on the object plane is compensated.

Abstract: A method for adjusting an operating parameter of a particle beam device and a sample holder, which is suitable in particular for performing the method are provided. An adjustment of an operating parameter of a particle beam device is possible without transfer of the sample holder out of the particle beam device. A reference sample is placed in a first sample receptacle, so that in ongoing operation of the particle beam device, the sample holder need only be positioned in such a way that the reference sample is bombarded and measured with the aid of a particle beam generated in the particle beam device.

Abstract: A method for producing a representation of an object using a particle beam, as well as a particle beam device for carrying out the method are disclosed. The system described herein is based on the object of specifying the method and the particle beam device for producing a representation of an object such that images which are produced, in particular including FFT images, are as free as possible of artifacts which are not caused by the object to be examined. This is achieved in particular in that pixel lives, line flyback times and pixel pause times are varied in raster patterns.

Abstract: A charged particle beam system for performing precession diffraction includes a lens 11 for focusing a beam 5 in an object plane 9, and an objective lens 13 having a diffraction plane 27. A doublet 53 of lenses 35, 63 images the diffraction plane 27 into an intermediate diffraction plane 69 where a multipole 55 is located. A doublet 57 of lenses 65, 93 images the intermediate diffraction plane 69 into an intermediate diffraction plane 71 where a multipole 59 is located. A first deflection system 15 upstream of the object plane 9 can tilt to change an angle of incidence of the beam on the object plane. A second deflection system 37 between lenses 35 and 63 tilts the beam such that the change of the angle of incidence of the charged particle beam on the object plane is compensated.

Abstract: A method for producing a representation of an object using a particle beam, as well as a particle beam device for carrying out the method are disclosed. The system described herein is based on the object of specifying the method and the particle beam device for producing a representation of an object such that images which are produced, in particular including FFT images, are as free as possible of artifacts which are not caused by the object to be examined. This is achieved in particular in that pixel lives, line flyback times and pixel pause times are varied in raster patterns.

Abstract: A method for adjusting an operating parameter of a particle beam device and a sample holder, which is suitable in particular for performing the method are provided. An adjustment of an operating parameter of a particle beam device is possible without transfer of the sample holder out of the particle beam device. A reference sample is placed in a first sample receptacle, so that in ongoing operation of the particle beam device, the sample holder need only be positioned in such a way that the reference sample is bombarded and measured with the aid of a particle beam generated in the particle beam device.

Abstract: An electron beam device having a specimen holder, in particular for a transmission electron microscope (TEM), which makes it possible to identify the specimen holder in a simple manner is described. Therefore, the electron beam device has at least one specimen holder having at least one holding element for holding a specimen and at least one identification unit. Furthermore, the electron beam device has a reading unit for reading the identification unit without contact, a goniometer, into which the specimen holder may be inserted, and a controller for controlling the movement modes of the goniometer, via which the movement modes of the goniometer are controlled on the basis of the identification data supplied by the identification unit and of corresponding data stored in the controller.

Abstract: An electron beam device having a specimen holder, in particular for a transmission electron microscope (TEM), which makes it possible to identify the specimen holder in a simple manner is described. Therefore, the electron beam device has at least one specimen holder having at least one holding element for holding a specimen and at least one identification unit. Furthermore, the electron beam device has a reading unit for reading the identification unit without contact, a goniometer, into which the specimen holder may be inserted, and a controller for controlling the movement modes of the goniometer, via which the movement modes of the goniometer are controlled on the basis of the identification data supplied by the identification unit and of corresponding data stored in the controller.

Abstract: The invention is directed to a high-voltage lead-through arrangement for introducing a high voltage into an enclosure wherein a vacuum is maintained such as for particle-beam apparatus. The arrangement includes: a high-voltage electrode for carrying a high potential; an insulator enclosing the high-voltage electrode and having a surface defining a boundary with the vacuum; and, an outer low-voltage electrode surrounding the insulator for carrying a low potential. The electrodes are spaced from each other by an electrode spacing measured along the surface of the insulator. The high-voltage electrode and the insulator conjointly define a first region wherein the high potential is present to a good approximation; and the first region is bounded by the insulator surface for a first distance of up to approximately 1/10 of the electrode spacing.

Abstract: A dot matrix print head with a moveable print needle guide. The dot matrix print head includes an elastic adjustment element mounted in the housing of the dot matrix print head and extending at least approximately parallel to the print needles. The movement of the guide relative to the housing is adjustable.

Abstract: A matrix print head includes a magnetic yoke plate, magnetic pole defining cores annularly arranged on the yoke plate, electromagnetic coils mounted on the cores, a permanent magnet plate arranged in magnetic conductive relationship to the yoke plate; the yoke plate, the cores, coils, and permanent magnet plate establishing an electromagnetic assembly, there being additionally an armature assembly including an armature plate and a plurality of deflectable radially extending armature arms, the armature assembly being arranged in relation to the electromagnetic assembly such that the armature arms cooperate with the electromagnetic cores, there being print elements such as styli connected to the armature arms; the improvement disclosed is comprised of the following features, the armature plate and the armature arms are physically separated from each other but resiliently interconnected to establish a single uncritical parasitic air gap; and the magnetic yoke and armature plates are radially, inwardly recessed v

Abstract: The armature assembly for matrix print heads having a plurality of magnetic drives for a corresponding plurality of print elements is made by providing an annular armature ring and positioning a disc annulus inside the armature ring in a concentric relation thereto; a resilient arm ring is superimposed upon the disc and armature ring so as to establish concentric placement thereto; the arm ring is fastened to the armature ring and the arms of the arm ring to the disc such that the ring arms extend above an annular gap between the armature ring and the disk; subsequent slots are thermally cutting into the disk to obtain individual armature arms, the slots extending into and through said annulus to divide the annulus into individual arms that remain connected to the armature ring on account of the fastening. The disk may have been cut out from the armature ring.

Abstract: A dot matrix print head which has on the side of the print countersupport (1) a print needle adjustment unit (3) with an electromagnetically drivable guide orifice (7) for the print needles (4) on an adjustment element (6). To provide a precise adjustment for the guide orifice (7) with controllable production tolerances, with flat design of the print head in the area of the guide orifice (7), and with easy installation, to provide a changeover for several guide orifices (7), and to define reliable end positions of the guide orifices (7), the adjustment element (6) consists of a guide support (7) mounted in the area of the print needle drive unit (2) and swiveling by means of a play-free joint (8). An electromagnet (15), fastened next to the guide support (7), is mounted on an armature bridge (13) supported in a play-free swivel bearing (14) running crossways to the guide support (7). The armature bridge (13) rests on the guide support (7) by spaced supporting projections (18), (19).

Abstract: A print head includes a coil carrier having upwardly bent legs serving as yokes and being arranged around or upon a permanent magnet whose outer face is coplanar with the end faces of the yokes; a cover plate is mounted on and in that plane having apertures adjacent the space between the permanent magnet and the closest yoke. A set of armature plates is resiliently mounted on the other side of the cover plate respectively adjacent the apertures which are filled with nonmagnetizable material, and the magnet plate of each armature has affixed to it thin, side-wall type members converging towards a main apex-point to which the stylus is mounted.