Abstract: In a high resolution imaging system for close inspection of sub-micrometer structures, a scanning electron microscope includes a detector objective essentially composed of an immersion lens and an annular detector which is arranged between a source side electrode lying at a positive potential and a middle electrode of the immersion lens which likewise lies at a variable positive potential and is arranged concentrically relative to a beam axis of a scanning microscope. The middle electrode and the source side electrode are preferrably formed as truncated cones. The two-stage deflection element for positioning the primary electron beam on the specimen is preferrably integrated into the source side electrode of the immersion lens, the source side electrode being composed of an annular diaphragm and a hollow cylinder.

Abstract: An improved particle beam apparatus for imaging line-shaped subjects onto an image surface, for example, a row of perforations of an aperture diaphragm on a surface of a semiconductor member to be structured characterized by the isotropic and anisotropic distortions being compensated by the insertion of a first multi-pole optics into the beam path under the subject. Astigmatisms produced by the first multi-pole optics are compensated by a second multi-pole optic that is inserted in the beam path immediately above the imaging lens.

Abstract: In a flat picture-reproducing device having a phosphor-coated faceplate (1) and a tray-shaped rear housing (2), a cathode formed by a periodic array of heating wires (7) is provided. This heating-wire array is followed by layers of focusing wires (8) and attracting wires (9) and by a perforated anode (5). A segmented counterelectrode (6) is located behind the heating wires (7).

Abstract: An image forming alpha filter having pole pieces with straight edges is disclosed which has good local resolution and very good energy resolution. It includes three deflection regions, which are separated from one another by relatively large interspaces.

Abstract: The invention is directed to an image forming omega filter having pole pieces with straight edges which has good local resolution and very good energy resolution. The omega filter includes four deflection regions, with deflection angles greater than 90.degree..

Abstract: An electron beam apparatus has a primary beam directed onto a point of a specimen to generate emerging secondary electrons that proceed to a detector after traversing an electrical extraction field. The extraction field is provided between electrodes arranged in a plane perpendicular to the optical axis of the electron beam device and a magnetic field is provided perpendicular to the electrical extraction field to compensate for the forces of the extraction field exerted on the primary beam yet to promote extraction of the secondary electrons.

Abstract: In a corpuscular-optical beam path, the generation of short electron pulses with steep leading edges is to be effected without a probe movement in the probe plane taking place. For this purpose, the particle beam blanking system comprises at least two deflection systems and a knife edge arranged between two deflection systems in an intermediate image plane, the operating parameters of the deflection systems and the knife edge being matched to the energy distribution of the particles in such a fashion that shifting of the particle beam in the probe plane disappears.