Abstract: A planar micromechanical actuator suspended on opposing suspension zones including a neutral axis between the opposing suspension zones, first to fourth segments into which the planar micromechanical actuator is segmented between the opposing suspension zones, each including a first electrode and a second electrode which form a capacitor and are isolatedly affixed to each other at opposite ends of the respective segment along a direction between the opposing suspension zones so as to form a gap between the first and second electrode along a thickness direction, the gap being offset to the neutral axis along the thickness direction, and wherein the first to fourth segments are configured such that the planar micromechanical actuator deflects into the thickness direction by the first and fourth segment bending into the thickness direction and the second and third segments bending contrary to the thickness direction upon a voltage being applied to the first and second electrodes of the first to fourth segments.

Abstract: A MEMS transducer for interacting with a volume flow of a fluid includes a substrate which includes a layer stack having a plurality of layers which form a plurality of substrate planes, and which includes a cavity within the layer stack. The MEMS transducer includes an electromechanical transducer connected to the substrate within the cavity and including an element which is deformable within at least one plane of movement of the plurality of substrate planes, deformation of the deformable element within the plane of movement and the volume flow of the fluid being causally correlated. The MEMS transducer includes an electronic circuit arranged within a layer of the layer stack, the electronic circuit being connected to the electromechanical transducer and being configured to provide a conversion between a deformation of the deformable element and an electric signal.

Abstract: A MEMS transducer for interacting with a volume flow of a fluid includes a substrate which includes a layer stack having a plurality of layers which form a plurality of substrate planes, and which includes a cavity within the layer stack. The MEMS transducer includes an electromechanical transducer connected to the substrate within the cavity and including an element which is deformable within at least one plane of movement of the plurality of substrate planes, deformation of the deformable element within the plane of movement and the volume flow of the fluid being causally correlated. The MEMS transducer includes an electronic circuit arranged within a layer of the layer stack, the electronic circuit being connected to the electromechanical transducer and being configured to provide a conversion between a deformation of the deformable element and an electric signal.

Abstract: The invention relates to electromagnetic radiation microoptical diffraction gratings and to a method suitable for the manufacture thereof. The diffraction gratings in accordance with the invention can be used as microspectrometers in the form of scanning microgratings. The microgratings are provided with a surface structure and are able to be manufactured cost effectively and in high volumes. The surface structure is formed at a surface of a substrate and is formed from linear structural elements arranged substantially equidistantly and aligned substantially parallel to one another. At least part of the surface of the substrate and of the structural elements is coated with at least one further layer which forms a uniform sinusoidal surface contoured in a wave-shape (sinusoidal) manner and having alternating arranged wave peaks and wave troughs. A reflective layer can additionally be applied to increase the intensity of reflected radiation.

Abstract: A micromechanical device with electrostatically caused deflection by a plate capacitor extending along and spaced apart from the neutral fiber of the deflectable element is improved with regard to its manufacturing complexity and/or with regard to its operating characteristics, such as, for example, maximum voltage applicable or deflectability, by using a continuous insulation layer between the distal and proximal electrodes of the plate capacitor, or else the proximal electrode is structured so as to have gaps at the segment boundaries where the distal electrode is mechanically fixed so as to be laterally spaced apart from the distal electrode. Both procedures avoid the problems of generating a roughness of the surface of the proximal electrode facing the distal electrode, as would otherwise be necessitated by etching an insulation layer for providing spacers between the distal and proximal electrodes at the segment boundaries.

Abstract: A planar micromechanical actuator suspended on opposing suspension zones including a neutral axis between the opposing suspension zones, first to fourth segments into which the planar micromechanical actuator is segmented between the opposing suspension zones, each including a first electrode and a second electrode which form a capacitor and are isolatedly affixed to each other at opposite ends of the respective segment along a direction between the opposing suspension zones so as to form a gap between the first and second electrode along a thickness direction, the gap being offset to the neutral axis along the thickness direction, and wherein the first to fourth segments are configured such that the planar micromechanical actuator deflects into the thickness direction by the first and fourth segment bending into the thickness direction and the second and third segments bending contrary to the thickness direction upon a voltage being applied to the first and second electrodes of the first to fourth segments.

Abstract: A MEMS transducer for interacting with a volume flow of a fluid includes a substrate including a cavity, and an electromechanical transducer connected to the substrate in the cavity and including an element deformable along a lateral movement direction, wherein a deformation of the deformable element along the lateral movement direction and the volume flow of the fluid are causally related.

Abstract: An ion-sensitive structure includes a semiconductor structure and a layer stack disposed on the semiconductor structure having a doped intermediate layer including a doping material and a first metal oxide material. The semiconductor structure is configured to change an electric characteristic based on a contact of the ion-sensitive structure with an electrolyte including ions.

Abstract: A MEMS transducer for interacting with a volume flow of a fluid includes a substrate including a cavity, and an electromechanical transducer connected to the substrate in the cavity and including an element deformable along a lateral movement direction, wherein a deformation of the deformable element along the lateral movement direction and the volume flow of the fluid are causally related.

Abstract: A micromechanically produced optical device includes: a carrier for carrying the micromechanically produced device; a diffraction grating for diffracting light; a plate for carrying the diffraction grating; and deflectors for deflecting the plate in relation to the carrier, the deflectors comprising bearings for movably bearing the plate and a driver for moving the plate; the deflectors being configured for rotational deflection of the plate and for translational deflection of the plate.

Abstract: A robot handling apparatus is disclosed for assembling a vehicle pane on a body section of a vehicle body in an assembly station. The handling apparatus includes an interface for coupling the handling apparatus to the robot device, and a holding device for holding the vehicle pane in a pane plane. The holding device is moveable in a first translational degree of freedom along XR-linear axis of the handling apparatus in an XR-direction relative to the interface and parallel to the pane plane. The holding device is also moveable in a second translational degree of freedom along the Y-linear axis of the handling apparatus in a Y-direction relative to the interface and parallel to the pane plane.

Abstract: A micromechanically produced optical device includes: a carrier for carrying the micromechanically produced device; a diffraction grating for diffracting light; a plate for carrying the diffraction grating; and deflectors for deflecting the plate in relation to the carrier, the deflectors comprising bearings for movably bearing the plate and a driver for moving the plate; the deflectors being configured for rotational deflection of the plate and for translational deflection of the plate.

Abstract: An ion-sensitive structure includes a semiconductor structure and a layer stack disposed on the semiconductor structure having a doped intermediate layer including a doping material and a first metal oxide material. The semiconductor structure is configured to change an electric characteristic based on a contact of the ion-sensitive structure with an electrolyte including ions.

Abstract: A micromechanical device with electrostatically caused deflection by a plate capacitor extending along and spaced apart from the neutral fiber of the deflectable element is improved with regard to its manufacturing complexity and/or with regard to its operating characteristics, such as, for example, maximum voltage applicable or deflectability, by using a continuous insulation layer between the distal and proximal electrodes of the plate capacitor, or else the proximal electrode is structured so as to have gaps at the segment boundaries where the distal electrode is mechanically fixed so as to be laterally spaced apart from the distal electrode. Both procedures avoid the problems of generating a roughness of the surface of the proximal electrode facing the distal electrode, as would otherwise be necessitated by etching an insulation layer for providing spacers between the distal and proximal electrodes at the segment boundaries.

Abstract: A fluidic variable focal length optical lens has a sealed housing having a first fluidic chamber filled with a first fluidic medium and a second fluidic chamber filled with a second fluidic medium, the first and the second fluidic chamber being separated from each other by an elastic membrane, wherein the first and the second fluidic medium have different refractive indices, and a deformator configured to deform the membrane laterally within a pump zone, thereby laterally displacing the first fluidic medium from the pump zone to a lens zone and the second fluidic medium from the lens zone to the pump zone, so that the membrane also deforms in the lens zone and changes a focal length of the lens zone along a normal direction.

Abstract: The force on the electrodes of an electrostatic field is used so that lateral tensile or compressive forces result which can deform a deformable element or can strongly deflect a deflectable structure. For this, a micromechanical device includes, apart from an electrode and a deformable element, an insulating spacer layer via which the electrode is fixed to the deformable element, wherein the insulating spacer layer is structured into several spaced-apart segments along a lateral direction, so that by applying an electric voltage between the electrode and the deformable element lateral tensile or compressive forces bending the deformable element along the lateral direction result. Thereby, the problem that normally accompanies electrostatic drives, namely the problem of the pull-in effect, is overcome. The deflection of the deformable element can be much larger than the gaps of the two electrodes, i.e. the above-mentioned electrode and the deformable element. A usage as a sensor is also possible.

Abstract: Provided is a concept for variably guiding optical waves by using a layer-stack having an electro-optic core layer of electro-optic material for guiding light and an electrode arrangement with at least a first electrode layer in proximity to the electro-optic core layer, wherein the electrode arrangement is configured to activate an electro-optic effect in a region of the electro-optic core layer by an electric field generated by means of the electrode arrangement, such that a propagation of the light is manipulated in the region of the activated electro-optic effect.

Abstract: A micromechanical device includes a micromechanical functional structure and an electromagnetic radiation heating associated with the micromechanical functional structure, which is formed to cause a spatially and temporally defined temperature or a spatially and temporally defined temperature course in the micromechanical functional structure.

Abstract: An assembly method and a motor vehicle body having at least one marginal portion delimiting a bodywork opening is provided. The motor vehicle includes a plasma-treated gluing surface to which a seal is fastened in a materially joined manner.

Abstract: The force on the electrodes of an electrostatic field is used so that lateral tensile or compressive forces result which can deform a deformable element or can strongly deflect a deflectable structure. For this, a micromechanical device includes, apart from an electrode and a deformable element, an insulating spacer layer via which the electrode is fixed to the deformable element, wherein the insulating spacer layer is structured into several spaced-apart segments along a lateral direction, so that by applying an electric voltage between the electrode and the deformable element lateral tensile or compressive forces bending the deformable element along the lateral direction result. Thereby, the problem that normally accompanies electrostatic drives, namely the problem of the pull-in effect, is overcome. The deflection of the deformable element can be much larger than the gaps of the two electrodes, i.e. the above-mentioned electrode and the deformable element. A usage as a sensor is also possible.