Patents by Inventor Hari Sriraman Pathangi

Hari Sriraman Pathangi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Enabling scanning electron microscope imaging while preventing sample damage on sensitive layers used in semiconductor manufacturing processes
    Patent number: 11631602
    Abstract: During electron beam imaging of a semiconductor wafer, the electron beam is adjusted to a first electron dose/nm2/time value below a damage threshold for an image frame grab of a site on the semiconductor wafer. Then the electron beam is adjusted to a second electron dose/nm2/time value different from the first electron dose/nm2/time value for a second image frame grab of the site. The second electron dose/nm2/time value can be above the damage threshold.
    Type: Grant
    Filed: February 23, 2021
    Date of Patent: April 18, 2023
    Assignee: KLA CORPORATION
    Inventor: Hari Sriraman Pathangi
  • Using absolute Z-height values for synergy between tools
    Patent number: 11600497
    Abstract: A semiconductor review tool receives absolute Z-height values for the semiconductor wafer, such as a semiconductor wafer with a beveled edge. The absolute Z-height values can be determined by a semiconductor inspection tool. The semiconductor review tool reviews the semiconductor wafer within a Z-height based on the absolute Z-height values. Focus can be adjusted to within the Z-height.
    Type: Grant
    Filed: March 31, 2020
    Date of Patent: March 7, 2023
    Assignee: KLA CORPORATION
    Inventors: Sandeep Madhogarhia, Hari Sriraman Pathangi, Rohit Bhat
  • USING ABSOLUTE Z-HEIGHT VALUES FOR SYNERGY BETWEEN TOOLS
    Publication number: 20200321221
    Abstract: A semiconductor review tool receives absolute Z-height values for the semiconductor wafer, such as a semiconductor wafer with a beveled edge. The absolute Z-height values can be determined by a semiconductor inspection tool. The semiconductor review tool reviews the semiconductor wafer within a Z-height based on the absolute Z-height values. Focus can be adjusted to within the Z-height.
    Type: Application
    Filed: March 31, 2020
    Publication date: October 8, 2020
    Inventors: Sandeep Madhogarhia, Hari Sriraman Pathangi, Rohit Bhat