Patents by Inventor Harish V PENMETHSA

Harish V PENMETHSA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SUBSTRATE FLIPPING IN VACUUM FOR DUAL SIDED PVD SPUTTERING
    Publication number: 20240096687
    Abstract: A module of a processing system for flipping a substrate in vacuum includes a clamp assembly for securing the substrate, a first motor assembly coupled to the clamp assembly for rotating the clamp assembly, and a second motor assembly coupled to the first motor assembly for raising and lowering the first motor assembly and the clamp assembly.
    Type: Application
    Filed: November 28, 2023
    Publication date: March 21, 2024
    Inventors: Harish V PENMETHSA, Suresh PALANISAMY, Dinesh RAJAMANICKAM, Naresh Kumar ASOKAN