Patents by Inventor Harit Maganlal Gadhia

Harit Maganlal Gadhia has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Quick swap chuck with vacuum holding interchangeable top plate
    Patent number: 11794314
    Abstract: An apparatus for securing a substrate includes a detachable plate configured to reversibly attach to a base of a chuck. The base of the chuck includes one or more base-substrate vacuum inlet channels and one or more base-plate inlet channels. The detachable plate includes one or more first vacuum reservoirs and second vacuum reservoirs. The detachable plate is further configured to establish a fluidic connection between the one or more first vacuum reservoirs and the base-plate inlet channels for forming a first vacuum seal between the detachable plate and the base. The detachable plate further includes one or more pass-through channels for fluidic connection with the one or more second vacuum reservoirs for forming a second vacuum seal between the detachable plate and the substrate.
    Type: Grant
    Filed: December 27, 2021
    Date of Patent: October 24, 2023
    Assignee: KLA Corporation
    Inventors: Lim Chow Tian, Rajeev Patil, Harit Maganlal Gadhia
  • QUICK SWAP CHUCK WITH VACUUM HOLDING INTERCHANGEABLE TOP PLATE
    Publication number: 20230069384
    Abstract: An apparatus for securing a substrate includes a detachable plate configured to reversibly attach to a base of a chuck. The base of the chuck includes one or more base-substrate vacuum inlet channels and one or more base-plate inlet channels. The detachable plate includes one or more first vacuum reservoirs and second vacuum reservoirs. The detachable plate is further configured to establish a fluidic connection between the one or more first vacuum reservoirs and the base-plate inlet channels for forming a first vacuum seal between the detachable plate and the base. The detachable plate further includes one or more pass-through channels for fluidic connection with the one or more second vacuum reservoirs for forming a second vacuum seal between the detachable plate and the substrate.
    Type: Application
    Filed: December 27, 2021
    Publication date: March 2, 2023
    Inventors: Lim Chow Tian, Rajeev Patil, Harit Maganlal Gadhia