Abstract: A durable photoreceptor having improved flexibility comprising a metal- or metal-coated flexible substrate and an inorganic photoconductor layer in charge blocking contact, the photoreceptor being obtained by initially bombarding the metal substrate, as cathode, with positive ions of an inert gas of low ionization potential under glow discharge in the presence of oxygen; and exposing the resulting oxide-coated substrate to a vapor cloud of photoconductor material consisting essentially of charged and uncharged material in an electrical field, utilizing the metal substrate as a cathode and a donor of said vapor cloud of photoconductor material or container thereof as an anode, the latter step being effected in combination with at least part of the initial bombardment step.