Patents by Inventor Harri VÄHÄMÄKI

Harri VÄHÄMÄKI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Protecting a target pump interior with an ALD coating
    Patent number: 9869020
    Abstract: An apparatus and method for protecting a target pump interior, where a target pump (10) inlet is provided with an inlet manifold (20) and a target pump outlet with an exhaust manifold (30). The target pump interior is exposed to sequential self-saturating surface reactions by sequential inlet of reactive gases according to an ALD method via the inlet manifold into the target pump interior and outlet of reaction residue via the exhaust manifold, while the target pump is kept running or not running. A technical effect of the invention is protecting a pump interior, which can be also an assembled pump interior, by a conformal protective coating.
    Type: Grant
    Filed: April 10, 2013
    Date of Patent: January 16, 2018
    Assignee: Picosun Oy
    Inventors: Timo Malinen, Harri Vähämäki
  • Protecting a target pump interior with an ALD coating
    Publication number: 20160076148
    Abstract: An apparatus and method for protecting a target pump interior, where a target pump (10) inlet is provided with an inlet manifold (20) and a target pump outlet with an exhaust manifold (30). The target pump interior is exposed to sequential self-saturating surface reactions by sequential inlet of reactive gases according to an ALD method via the inlet manifold into the target pump interior and outlet of reaction residue via the exhaust manifold, while the target pump is kept running or not running. A technical effect of the invention is protecting a pump interior, which can be also an assembled pump interior, by a confomral protective coating.
    Type: Application
    Filed: April 10, 2013
    Publication date: March 17, 2016
    Applicant: Picosun Oy
    Inventors: Timo MALINEN, Harri VÄHÄMÄKI