Patents by Inventor Harsh Sinha
Harsh Sinha has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20240046144Abstract: A metric predictor model for predicting values of a data metric is selected. The metric predictor model is trained using historical data related to the data metric. A predicted value of the data metric is obtained using the metric predictor model. A current value of the data metric is obtained using data other than the historical data. A difference between the predicted value and the current value is determined to meet a reporting criterion. In response to determining that the difference meets the reporting criterion, a notification descriptive of the difference is output.Type: ApplicationFiled: August 2, 2022Publication date: February 8, 2024Inventors: Utkarsh Ohm, Akshay Mehra, Dheeraj Reddy, Gokul Vasudeva, Harsh Sinha
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Patent number: 10770258Abstract: An electron-optical system for inspecting or reviewing an edge portion of a sample includes an electron beam source configured to generate one or more electron beams, a sample stage configured to secure the sample and an electron-optical column including a set of electron-optical elements configured to direct at least a portion of the one or more electron beams onto an edge portion of the sample. The system also includes a sample position reference device disposed about the sample and a guard ring device disposed between the edge of the sample and the sample position reference device to compensate for one or more fringe fields. One or more characteristics of the guard ring device are adjustable. The system also includes a detector assembly configured to detect electrons emanating from the surface of the sample.Type: GrantFiled: August 20, 2018Date of Patent: September 8, 2020Assignee: KLA-Tencor CorporationInventors: Xinrong Jiang, Christopher Sears, Harsh Sinha, David Trease, David Kaz, Wei Ye
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Publication number: 20190006143Abstract: An electron-optical system for inspecting or reviewing an edge portion of a sample includes an electron beam source configured to generate one or more electron beams, a sample stage configured to secure the sample and an electron-optical column including a set of electron-optical elements configured to direct at least a portion of the one or more electron beams onto an edge portion of the sample. The system also includes a sample position reference device disposed about the sample and a guard ring device disposed between the edge of the sample and the sample position reference device to compensate for one or more fringe fields. One or more characteristics of the guard ring device are adjustable. The system also includes a detector assembly configured to detect electrons emanating from the surface of the sample.Type: ApplicationFiled: August 20, 2018Publication date: January 3, 2019Inventors: Xinrong Jiang, Christopher Sears, Harsh Sinha, David Trease, David Kaz, Wei Ye
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Patent number: 10056224Abstract: An electron-optical system for inspecting or reviewing an edge portion of a sample includes an electron beam source configured to generate one or more electron beams, a sample stage configured to secure the sample and an electron-optical column including a set of electron-optical elements configured to direct at least a portion of the one or more electron beams onto an edge portion of the sample. The system also includes a sample position reference device disposed about the sample and a guard ring device disposed between the edge of the sample and the sample position reference device to compensate for one or more fringe fields. One or more characteristics of the guard ring device are adjustable. The system also includes a detector assembly configured to detect electrons emanating from the surface of the sample.Type: GrantFiled: August 8, 2016Date of Patent: August 21, 2018Assignee: KLA-Tencor CorporationInventors: Xinrong Jiang, Christopher Sears, Harsh Sinha, David Trease, David Kaz, Wei Ye
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Patent number: 9922269Abstract: Defect classification includes acquiring one or more images of a specimen including multiple defects, grouping the defects into groups of defect types based on the attributes of the defects, receiving a signal from a user interface device indicative of a first manual classification of a selected number of defects from the groups, generating a classifier based on the first manual classification and the attributes of the defects, classifying, with the classifier, one or more defects not manually classified by the manual classification, identifying the defects classified by the classifier having the lowest confidence level, receiving a signal from the user interface device indicative of an additional manual classification of the defects having the lowest confidence level, determining whether the additional manual classification identifies one or more additional defect types not identified in the first manual classification, and iterating the procedure until no new defect types are found.Type: GrantFiled: January 29, 2016Date of Patent: March 20, 2018Assignee: KLA-Tencor CorporationInventors: Sankar Venkataraman, Li He, John R. Jordan, III, Oksen Baris, Harsh Sinha
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Patent number: 9898811Abstract: Defect classification includes acquiring one or more images of a specimen, receiving a manual classification of one or more training defects based on one or more attributes of the one or more training defects, generating an ensemble learning classifier based on the received manual classification and the attributes of the one or more training defects, generating a confidence threshold for each defect type of the one or more training defects based on a received classification purity requirement, acquiring one or more images including one or more test defects, classifying the one or more test defects with the generated ensemble learning classifier, calculating a confidence level for each of the one or more test defects with the generated ensemble learning classifier and reporting one or more test defects having a confidence level below the generated confidence threshold via the user interface device for manual classification.Type: GrantFiled: June 24, 2015Date of Patent: February 20, 2018Assignee: KLA-Tencor CorporationInventors: Li He, Chien-Huei Adam Chen, Sankar Venkataraman, John R. Jordan, III, Huajun Ying, Harsh Sinha
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Patent number: 9696268Abstract: One embodiment relates to a method for automated review of defects detected in a defective die on the target substrate. The method includes: performing an automated review of the defects using an secondary electron microscope (SEM) so as to obtain electron-beam images of the defects; performing an automated classification of the defects into types based on morphology of the defects as determined from the electron-beam images; selecting defects of a specific type for automated energy-dispersive x-ray (EDX) review; and performing the automated EDX review on the defects of the specific type. In addition, automated techniques are disclosed for obtaining an accurate reference so as to improve the usefulness of the EDX results. Furthermore, an automated method of classifying the defects based on the EDX results is disclosed which provides a final pareto that combines both morphological and elemental information. Other embodiments, aspects and features are also disclosed.Type: GrantFiled: October 21, 2015Date of Patent: July 4, 2017Assignee: KLA-Tencor CorporationInventors: Harsh Sinha, Dmitry Spivak, Huina Xu, Hong Xiao, Rohit Bothra
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Publication number: 20170047193Abstract: An electron-optical system for inspecting or reviewing an edge portion of a sample includes an electron beam source configured to generate one or more electron beams, a sample stage configured to secure the sample and an electron-optical column including a set of electron-optical elements configured to direct at least a portion of the one or more electron beams onto an edge portion of the sample. The system also includes a sample position reference device disposed about the sample and a guard ring device disposed between the edge of the sample and the sample position reference device to compensate for one or more fringe fields. One or more characteristics of the guard ring device are adjustable. The system also includes a detector assembly configured to detect electrons emanating from the surface of the sample.Type: ApplicationFiled: August 8, 2016Publication date: February 16, 2017Inventors: Xinrong Jiang, Christopher Sears, Harsh Sinha, David Trease, David Kaz, Wei Ye
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Publication number: 20160358041Abstract: Defect classification includes acquiring one or more images of a specimen including multiple defects, grouping the defects into groups of defect types based on the attributes of the defects, receiving a signal from a user interface device indicative of a first manual classification of a selected number of defects from the groups, generating a classifier based on the first manual classification and the attributes of the defects, classifying, with the classifier, one or more defects not manually classified by the manual classification, identifying the defects classified by the classifier having the lowest confidence level, receiving a signal from the user interface device indicative of an additional manual classification of the defects having the lowest confidence level, determining whether the additional manual classification identifies one or more additional defect types not identified in the first manual classification, and iterating the procedure until no new defect types are found.Type: ApplicationFiled: January 29, 2016Publication date: December 8, 2016Inventors: Sankar Venkataraman, Li He, John R. Jordan, III, Oksen Baris, Harsh Sinha
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Publication number: 20160116425Abstract: One embodiment relates to a method for automated review of defects detected in a defective die on the target substrate. The method includes: performing an automated review of the defects using an secondary electron microscope (SEM) so as to obtain electron-beam images of the defects; performing an automated classification of the defects into types based on morphology of the defects as determined from the electron-beam images; selecting defects of a specific type for automated energy-dispersive x-ray (EDX) review; and performing the automated EDX review on the defects of the specific type. In addition, automated techniques are disclosed for obtaining an accurate reference so as to improve the usefulness of the EDX results. Furthermore, an automated method of classifying the defects based on the EDX results is disclosed which provides a final pareto that combines both morphological and elemental information. Other embodiments, aspects and features are also disclosed.Type: ApplicationFiled: October 21, 2015Publication date: April 28, 2016Applicant: KLA-TENCOR CORPORATIONInventors: Harsh SINHA, Dmitry SPIVAK, Huina XU, Hong XIAO, Rohit BOTHRA
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Patent number: 9318395Abstract: One embodiment relates to a method of preparation of a sample of a substrate for sub-surface review using a scanning electron microscope apparatus. A defect at a location indicated in a first results file is re-detected, and the location of the defect is marked with at least one discrete marking point having predetermined positioning relative to the location of the defect. The location of the defect may be determined relative to the design for the device, and a cut location and a cut angle may be determined in at least a partly-automated manner using that information. Another embodiment relates to a system for preparing a sample for sub-surface review. Another embodiment relates to a method for marking a defect for review on a target substrate. Other embodiments, aspects and feature are also disclosed.Type: GrantFiled: November 28, 2012Date of Patent: April 19, 2016Assignee: KLA-Tencor CorporationInventors: Cecelia Campochiaro, Hong Xiao, Michael Van Riet, Benjamin James Thomas Clarke, Harsh Sinha