Patents by Inventor Hartmut Runge

Hartmut Runge has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • High speed ion beam switching arrangement for use in the production of determinate solid body dopings by means of ion implantation
    Patent number: 3970854
    Abstract: An arrangement for high speed ion beam switching in the production of determinate implantation doses for the doping, by ion implantation, in solid bodies, in which an electrode, preferably a diaphragm is interposed in the path of an ion beam from an ion source, and to which a potential is intermittently connected and disconnected in a controlled manner, to produce a potential wall which is disposed in the beam path of the ions, which has a value exceeding the kinetic energy of the ions, whereby the latter cannot pass therethrough.
    Type: Grant
    Filed: May 20, 1974
    Date of Patent: July 20, 1976
    Assignee: Siemens Aktiengesellschaft
    Inventors: Hartmut Boroffka, Eberhard Krimmel, Hartmut Runge