Abstract: A radiation detector includes a signal readout substrate. The signal readout substrate is constructed by arranging pixel units having pixel electrodes in a two-dimensional matrix form on a front surface of a substrate. On a front surface of the signal readout substrate, formed is a photoconductive layer having crystallinity. On a front surface of the photoconductive layer, formed is a contact assistance layer having conductivity. On a front surface of the contact assistance layer, formed is a common electrode. A surface area per unit region of the front surface of the contact assistance layer is smaller than a surface area per unit region of the front surface of the photoconductive layer. In addition, the contact assistance layer is formed so as to include the common electrode and so as to be included in the front surface of the photoconductive layer when viewed from the front.

Abstract: Not only is a common electrode suppressed from having a high resistance, but the common electrode is also prevented from peeling. A radiation detector 1 includes a signal readout substrate 2. The signal readout substrate 2 is constructed by arranging pixel units 4 having pixel electrodes 7 in a two-dimensional matrix form on a front surface 3a of a substrate 3. On a front surface 2a of the signal readout substrate 2, formed is a photoconductive layer 17 having crystallinity. On a front surface 17a of the photoconductive layer 17, formed is a contact assistance layer 30 having conductivity. On a front surface 30a of the contact assistance layer 30, formed is a common electrode 18. A surface area per unit region of the front surface 30a of the contact assistance layer 30 is smaller than a surface area per unit region of the front surface 17a of the photoconductive layer 17.

Abstract: A dry process system comprising a chamber having an inlet for reaction gas and an exhaust port for exhaust gas, at least one pair of electrodes connected with an alternating current power source through a blocking capacitor, respectively, and one or more magnetic field applying means for generating a magnetic field nearly parallel to a surface of each electrode. The distance between adjacent electrodes is set to the extent that electrons can travel nearly without collision in the space between the adjacent electrodes. Since the distance between adjacent electrodes is narrow, one plasma generated in the neighborhood of one of the adjacent electrode and the other plasma generated in the neighborhood of another electrode can commingle with each other so that the distribution of plasma is made nearly equal, thus a nearly uniform plasma can be formed without a rotating magnetic field.

Abstract: In a dry process apparatus comprising a reactor, a first and a second electrodes mounted inside the reactor, the first electrode being provided to mount a material to be processed thereon, and a high-frequency power supply electrically connected to the first or the second electrode to create an alternating electric field, a permanent magnet in the form of a ring with an N-pole and an S-pole is provided to generate a magnetic field that interacts with the alternating electric field to induce a magnetron discharge in the space above the material to be processed.