Abstract: A thin film deposition apparatus used to manufacture large substrates on a mass scale and that allows high-definition patterning, and a method of manufacturing an organic light-emitting display apparatus using the same, the apparatus includes a loading unit fixing a substrate onto an electrostatic chuck; a deposition unit including a chamber maintained in a vacuum state and a thin film deposition assembly disposed in the chamber, separated from the substrate by a predetermined distance, to deposit a thin film on the substrate fixed on the electrostatic chuck; an unloading unit separating the substrate on which a deposition process is completed, from the electrostatic chuck; a first circulation unit sequentially moving the electrostatic chuck on which the substrate is fixed, to the loading unit, the deposition unit, and the unloading unit; and a second circulation unit returning the electrostatic chuck separated from the substrate to the loading unit from the unloading unit, wherein the first circulation unit

Abstract: A thin film deposition apparatus that forms a thin film on a substrate includes: a deposition source that discharges a deposition material; a deposition source nozzle unit that is disposed at a side of the deposition source and includes a plurality of deposition source nozzles; a patterning slit sheet that is disposed opposite to the deposition source nozzle unit and includes a plurality of patterning slits; and a blocking member that is disposed between the substrate and the deposition source, wherein the thin film deposition apparatus is separated from the substrate by a predetermined distance, the substrate is moved relative to the thin film deposition apparatus, and the blocking member is moved along with the substrate to screen at least one portion of the substrate.

Abstract: A thin film deposition apparatus that includes a thin film deposition assembly incorporating: a deposition source that discharges a deposition material; a deposition source nozzle unit that is disposed at a side of the deposition source and includes a plurality of deposition source nozzles arranged in a first direction; a patterning slit sheet that is disposed opposite to the deposition source nozzle unit and includes a plurality of patterning slits arranged in the first direction; and a barrier plate assembly including a plurality of barrier plates that are disposed between the deposition source nozzle unit and the patterning slit sheet in the first direction, and partition a space between the deposition source nozzle unit and the patterning slit sheet into a plurality of sub-deposition spaces, wherein each of the barrier plates is separate from the patterning slit sheet.

Abstract: A thin film deposition apparatus and an organic light-emitting display device by using the same. The thin film deposition apparatus includes an electrostatic chuck, an a plurality of chambers; at least one thin film deposition assembly; a carrier; a first power source plug; and a second power source plug. The electrostatic chuck includes a body having a supporting surface that contacts a substrate to support the substrate, wherein the substrate is a deposition target; an electrode embedded into the body and applying an electrostatic force to the supporting surface; and a plurality of power source holes formed to expose the electrode and formed at different locations on the body. The plurality of chambers are maintained in a vacuum state. The at least one thin film deposition assembly is located in at least one of the plurality of chambers, is separated from the substrate by a predetermined distance, and is used to form a thin film on the substrate supported by the electrostatic chuck.

Abstract: A thin film deposition apparatus and a method of manufacturing an organic light-emitting display device using the thin film deposition apparatus. The thin film deposition apparatus includes a plurality of thin film deposition assemblies, each of which includes: a deposition source that discharges a deposition material; a deposition source nozzle unit that is disposed at a side of the deposition source and includes a plurality of deposition source nozzles; a patterning slit sheet that is disposed opposite to the deposition source nozzle unit and includes a plurality of patterning slits arranged in a first direction; and a barrier plate assembly that is disposed between the deposition source nozzle unit and the patterning slit sheet, in the first direction. The barrier plate assembly includes a plurality of barrier plates that partition a space between the deposition source nozzle unit and the patterning slit sheet into a plurality of sub-deposition spaces.

Abstract: A method for in-situ polycrystalline thin film growth is provided. A catalyst enhanced chemical vapor deposition (CECVD) apparatus is used to grow the polycrystalline silicon thin film. No subsequent annealing or dehydrogenating process is needed. The method comprises exhausting a chamber to form a vacuum chamber, and then purging vacuum chamber and introducing a catalyst. A substrate is then placed in the vacuum chamber and reaction gas is injected into the chamber. The reaction gas reacts with the catalyst in the chamber to grow a polycrystalline thin film on the substrate. The inventive method reduces processing time and production cost and can be used to fabricate larger devices due to the elimination of bulky annealing equipment.

Abstract: A film tray for fabricating a flexible display, the film tray preventing a flexible substrate or film from sagging. The film tray includes a support plate and at least one pair of clamps, each clamp of the at least one pair of clamps located along an opposite edge of the support plate to fix a flexible film. A first clamp of the at least one pair clamps is aligned with a second clamp of the least one pair of clamps. Each clamp includes an open-shut part adapted to be opened to receive the flexible substrate or film and adapted to be shut to fix the flexible substrate or film and a support part separated from the open-shut part by a predetermined space to support the flexible substrate or film at a predetermined level when the open-shut part is closed.

Abstract: A laser patterning apparatus for handling a donor film and improving compression uniformity between the donor film and an acceptor substrate is provided. The laser patterning apparatus includes: a stage that supports an acceptor substrate; a shielding mask that is placed on the acceptor substrate to form a pattern and is attached to a donor film on one surface thereof; a laser gun that is disposed at an upper part of the stage to radiate laser light to a portion of the donor film through the pattern of the shielding mask; a pressing member that corresponds to a portion of the shielding mask; and an actuator that is connected to one side of the pressing member to press the pressing member.

Abstract: A holder for fabricating an organic light emitting display comprises: a holder main body; and a plurality of supporters provided on opposite sides of the holder main body; wherein each supporter has a ‘?’-shape and comprises a side wall having a predetermined height, and a supporting plate bent from the side wall. The supporting plate is formed with a plurality of stepped parts to support a substrate, a film tray and a mask, to hold the substrate, the film tray and the mask while the substrate, the film tray and the mask are being transported, and to prevent a pattern from being distorted, thereby transporting and processing a substrate, a film tray and a mask in a single chamber at the same time.

Abstract: Disclosed is a method of forming a pattern on a mask sheet including an attaching portion to be attached to a mask frame, and a pattern area in which the pattern is formed. The method includes positioning the mask sheet on an auxiliary sheet with a thickness greater than the thickness of the mask sheet, fastening the auxiliary sheet to the mask frame, applying a stretching force to the mask sheet and the auxiliary sheet, and forming the pattern on the pattern area of the mask sheet. Thus, a predetermined pattern is formed on a mask sheet while a uniformly distributed external force is applied to the mask sheet, so that bending or deflecting out of plane by the mask sheet is prevented, thereby forming a precise mask pattern.

Abstract: A mask frame on which a mask, having a pattern area and a mask edge defining the pattern area, is fixed comprises: a through opening corresponding to the pattern area; and a base corresponding to the mask edge. The base is provided with discharging holes formed therein, and a vacuum pump is coupled to the discharging holes so that the mask is fixed to the mask frame without damaging the pattern formed on the pattern area of the mask.

Abstract: A substrate support plate transfer apparatus for fabricating an organic light emitting display is disclosed. In one embodiment, the apparatus includes a quartz plate transferred into a bonding processing chamber for an organic light emitting device, a protection frame on which the quartz plate is placed in order to transfer the quartz plate into the chamber, and a frame-shaped supporting plate including a sliding transfer device for helping the transfer of the protection frame and installed in the chamber. The quartz plate has a rigidity capable of enduring pressure in the bonding process applied to a large sized substrate, and the apparatus provides for convenient replacement of the quartz plate.

Abstract: A laser patterning apparatus for handling a donor film and improving compression uniformity between the donor film and an acceptor substrate is provided. The laser patterning apparatus includes: a stage that supports an acceptor substrate; a shielding mask that is placed on the acceptor substrate to form a pattern and is attached to a donor film on one surface thereof; a laser gun that is disposed at an upper part of the stage to radiate laser light to a portion of the donor film through the pattern of the shielding mask; a pressing member that corresponds to a portion of the shielding mask; and an actuator that is connected to one side of the pressing member to press the pressing member.

Abstract: The invention provides a chuck plate assembly that includes a shadow mask formed with a predetermined pattern; a shadow mask frame holding the shadow mask and having heat-radiating and cooling functions; a substrate aligned with the shadow mask and onto which deposition materials from a deposition source are deposited; and a chuck plate, attaching the substrate to the shadow mask, that includes a refrigerant circulating duct. The temperature of the substrate is optimized in consideration of the temperature of the shadow mask so that an alignment error due to thermal deformation is minimized. That is, the temperature of the shadow mask itself is prevented from rising, and thereby prevents deformation of the shadow mask due to thermal expansion, which improves the precision of a substrate pattern position.

Abstract: A method and an apparatus for fabricating an organic light emitting display, in which a large-sized transmissible film is fabricated to be easily used in an affixing process for a large-sized substrate. The apparatus includes: a first chamber including a plurality of first through holes and having a first transmissible film sealing the plurality of first through holes, the first chamber adapted to affix a first substrate having an Organic Light Emitting Diode (OLED) to a second substrate having a desiccant agent; and a second chamber having a second through hole in a predetermined region and having a second transmissible film sealing the second through hole, the second chamber adapted to harden a sealant interposed between the first and second substrates to seal the first substrate to the second substrates.

Abstract: A holder for fabricating an organic light emitting display comprises: a holder main body; and a plurality of supporters provided on opposite sides of the holder main body; wherein each supporter has a ‘?’-shape and comprises a side wall having a predetermined height, and a supporting plate bent from the side wall. The supporting plate is formed with a plurality of stepped parts to support a substrate, a film tray and a mask, to hold the substrate, the film tray and the mask while the substrate, the film tray and the mask are being transported, and to prevent a pattern from being distorted, thereby transporting and processing a substrate, a film tray and a mask in a single chamber at the same time.

Abstract: A catalyst-enhanced chemical vapor deposition (CECVD) apparatus and a deposition method, in which tension is applied to a catalyst wire in order to prevent the catalyst wire from sagging due to thermal deformation, and additional gas is used to prevent foreign material from being generated. The CECVD apparatus may be constructed with a process chamber, a showerhead to introduce process gas into process chamber, a tensile catalyst wire structure provided in the process chamber to decompose the gas introduced from the showerhead, and a substrate on which the gas decomposed by the catalyst wire structure is deposited, so that the tension is applied to a catalyst wire in order to prevent the catalyst wire from sagging due to thermal deformation, and additional gas is used to prevent foreign material from being generated, thereby eliminating occurrences of non-uniform temperatures of a substrate and non-uniform film growth, and concomitantly enhancing the durability of the catalyst wire.

Abstract: An alignment system, a vertical tray transporting assembly and a deposition apparatus having the same allow alignment of high precision, and perform a stable deposition process in a short period of time, minimize the effect of fine particles during transportation, and secure a sufficient uniformity of a mask by fixing and supporting a vertically disposed substrate using a fixing holder member and an auxiliary attaching member in a tray of a vertical in-line deposition alignment system.

Abstract: A mask frame on which a mask, having a pattern area and a mask edge defining the pattern area, is fixed comprises: a through opening corresponding to the pattern area; and a base corresponding to the mask edge. The base is provided with discharging holes formed therein, and a vacuum pump is coupled to the discharging holes so that the mask is fixed to the mask frame without damaging the pattern formed on the pattern area of the mask.

Abstract: Disclosed are a holding tray, a substrate alignment system using the same and a method thereof. More specifically, the present invention relates to a holding tray for substrate capable of accomplishing high-precision alignment and conducting a stable deposition. A holding means is included in at least one side of the substrate to hold and support the substrate in a manner that the substrate is vertically held and supported on a flat surface of the holding tray during a vacuum process. The holding tray according to the present invention, the substrate alignment system using the same, and the method thereof include a substrate on which a deposition is made, a frame formed to receive the substrate, a tray formed to receive the frame, and at least one holding means formed to hold the substrate on the frame.