Abstract: The invention relates to an apparatus and a method for characterizing a microlithographic mask. According to one aspect, an apparatus according to the invention comprises at least one light source which emits coherent light, an illumination optical unit which produces a diffraction-limited light spot on the mask from the coherent light of the at least one light source, a scanning device, by use of which it is possible to implement a scanning movement of the diffraction-limited light spot relative to the mask, a sensor unit, and an evaluation unit for evaluating the light that is incident on the sensor unit and has come from the mask, an output coupling element for coupling out a portion of the coherent light emitted by the at least one light source, and an intensity sensor for capturing the intensity of this output coupled portion.

Abstract: The invention relates to an apparatus and a method for characterizing a microlithographic mask. According to one aspect, an apparatus according to the invention comprises at least one light source which emits coherent light, an illumination optical unit which produces a diffraction-limited light spot on the mask from the coherent light of the at least one light source, a scanning device, by use of which it is possible to implement a scanning movement of the diffraction-limited light spot relative to the mask, a sensor unit, and an evaluation unit for evaluating the light that is incident on the sensor unit and has come from the mask, an output coupling element for coupling out a portion of the coherent light emitted by the at least one light source, and an intensity sensor for capturing the intensity of this output coupled portion.

Abstract: A production system and method for producing different shell assembly variants of specific vehicle types is disclosed. The system has several clamping frames adapted to the different shell assembly variants for receiving respective component variants, a magazine in which the clamping frames can be positioned, a clamping station by which, in accordance with a presettable production sequence of the shell assembly variants, the corresponding component variants can be positioned on the clamping frames in a respectively preset joining arrangement, a joining station by which, in accordance with the presettable production sequence, the component variants positioned on the clamping frames can be connected to each other to form the corresponding shell assembly variants, a transport device by which, in accordance with the presettable production sequence, the corresponding clamping frames can be moved to and from the magazine, the clamping station, and the joining station exclusively in translation in a plane.

Abstract: A handling system for handling different component variants, in particular sheet metal component variants, is disclosed. The handling system has a gripping tool including several adjustable fasteners, by which the different component variants can be fixed in a predetermined position on the gripping tool. The gripping tool includes several adjustable abutment mechanisms for placement on the different component variants. The abutment mechanisms each include a plurality of pin-like elements which can be adjusted in their longitudinal direction into different positions for placement on the different component variants. A method for operating a handling system for different component variants is also disclosed.

Abstract: A production system and method for producing different shell assembly variants of specific vehicle types is disclosed. The system has several clamping frames adapted to the different shell assembly variants for receiving respective component variants, a magazine in which the clamping frames can be positioned, a clamping station by which, in accordance with a presettable production sequence of the shell assembly variants, the corresponding component variants can be positioned on the clamping frames in a respectively preset joining arrangement, a joining station by which, in accordance with the presettable production sequence, the component variants positioned on the clamping frames can be connected to each other to form the corresponding shell assembly variants, a transport device by which, in accordance with the presettable production sequence, the corresponding clamping frames can be moved to and from the magazine, the clamping station, and the joining station exclusively in translation in a plane.

Abstract: The forming tool is provided for sheet-metal components and embodied in particular as a forming gripper. The forming tool can be positioned and handled in an automated manner by an industrial robot system. The forming tool has a component-probing system, which contains a probing element that is displaceable upon contact with the component. The displacement of the probing element can be ascertained by a measuring system. Furthermore, a suitable method for positioning the forming tool is provided.

Abstract: The invention relates to a tool device for forming a section of a body. The device includes at least one moveable retaining device and at least one forming punch moveable in the direction of the retaining device. The section to be formed is arranged between the retaining device and the forming punch. The forming punch during the forming is moved from an initial position into a defined end position relative to the section to be formed. In order to limit the construction space and the forces to be applied, the tool device includes a wedge element which is in contact with the retaining device and/or a die such that a movement of the wedge element effects a movement of the retaining device and/or of the die in the forming direction. Furthermore, a forming method is provided with the aid of the tool device.

Abstract: A method and a tool arrangement for deforming at least one section of a less precisely positioned body by such an amount that the section to be deformed lies in a more precisely defined position with respect to the body. A tool arrangement includes at least one retaining device and at least one forming die moveable in the direction of the retaining device. The section (28) to be deformed is arranged between the retaining device and the forming die. In order to improve the quality of the deformed body, the deforming movement of the forming die is controlled depending on the position of the forming die without fixed counterpart holder in a controlled manner such that the forming die is stopped in a defined final position.

Abstract: A method for producing a connection area (4) on a work piece (1), in particular on a vehicle body plate which is to be positioned precisely with respect to a reference area (8) on the work piece (1). A robot-guided processing tool (9) is used which is permanently connected to a sensor system (13) and forms a tool/sensor combination (16) with it. In a first step, the tool/sensor combination (16) is moved, within the scope of a positioning phase (II), from a proximity position (24) which is independent of the position of the work piece (1) in the working space (23) of the robot (11), into a preliminary position (18) in which the tool/sensor combination (16) is oriented precisely with respect to the reference area (8) of the work piece (1).

Abstract: In order to provide a heat pipe for transporting heat from an evaporation area to a condensation area, comprising a housing with housing walls, a capillary structure arranged in the housing and thermally coupled to the respective, corresponding housing wall in the evaporation area as well as in the condensation area, a vapor channel arranged in the housing and leading from the evaporation area to the condensation area as well as a heat transport medium, as well to make available a process for the production of such a heat pipe it is suggested that the capillary structure be an open-pored capillary layer produced by way of thermal plasma spraying of powder particles.