Abstract: A system for producing an image of an object using a particle beam device is provided. A particle source is used to generate primary particles, in which the primary particles have a primary energy. The primary particles are delivered to an object, in which the primary particles form a particle beam. Interaction particles which are scattered back by the object in the direction of the particle source are detected with at least one energy-resolving detector. Detection signals, which are obtained through the detection, are evaluated in terms of an energy which the detected interaction particles have. The detection signals which stem from the detected interaction particles whose energy deviates by less than 500 eV from the primary energy are selected. An image of the object is produced, in which only the selected detection signals are used to produce the image.

Abstract: With a detector system for the specimen chamber of a scanning electron microscope, signals are simultaneously detected in transmission which signals correspond to a light field contrast and a dark field contrast. The detector system (14) includes four detectors (15 to 18) in a plane (25) between which an aperture (19) for free access of electrons is located. Behind the aperture (19), a further detector (27) is arranged in a second plane (26). The detectors are preferably diodes. The detectors (15, 16, 17, 18) in the first plane (25), which is closer to the specimen, serve to generate signals which correspond to a dark field contrast. The further detector (27), more distant from the specimen, detects signals corresponding to a light field contrast. Large dead spaces, which are not sensitive to electrons, between the diodes and around the aperture (19), can be avoided by the offset arrangement of four diodes (15, 16, 17, 18) in the first plane (25).

Abstract: With a detector system for the specimen chamber of a scanning electron microscope, signals are simultaneously detected in transmission which signals correspond to a light field contrast and a dark field contrast. The detector system (14) includes four detectors (15 to 18) in a plane (25) between which an aperture (19) for free access of electrons is located. Behind the aperture (19), a further detector (27) is arranged in a second plane (26). The detectors are preferably diodes. The detectors (15, 16, 17, 18) in the first plane (25), which is closer to the specimen, serve to generate signals which correspond to a dark field contrast. The further detector (27), more distant from the specimen, detects signals corresponding to a light field contrast. Large dead spaces, which are not sensitive to electrons, between the diodes and around the aperture (19), can be avoided by the offset arrangement of four diodes (15, 16, 17, 18) in the first plane (25).