Abstract: Electron microscope for investigation of surfaces of solid bodies with a primary beam path along which are arranged sequentially an electron beam source, an electron lens, an energy-selective electrostatic deflecting field, a magnetic deflecting field, a cathode lens, in whose object plane lies the test surface to be investigated, further with a secondary beam path, which passes in sequence through the cathode lens, the magnetic deflecting field, an energy filter, which includes a decelerating lens, a contrast stop, an electrical sector field, an energy stop and an accelerating lens, and two projection lenses, to a detector, such as a luminescent screen. The first-mentioned electrostatic deflecting field compensates for the energy dispersion of the magnetic deflecting field in the entrance side focal plane of the cathode lens. The energy filter limits the energy range of the electrons in the secondary beam path.

Abstract: A compact double-focussing mass spectrometer comprises, in the order named long an ion beam path, an einzel lens for focussing ions entering through an entrance slit into an exit slit and for effecting angle focussing, further a magnetic deflection field and an electric sector field each having a deflection angle of 30 degrees and opposite directions of deflection and in combination effecting energy focussing. Since the deflection angles of the magnetic and electric fields are relatively small and have opposite directions, the net ion beam path is essentially straight, and therefore the mass spectrometer can be implemented by a compact structure.

Abstract: A combined objective and emission lens for a microbeam probe is described which is suitable for primary and secondary particles of the same charge sign, by which lens a bundle of primary rays of comparatively high energy can be focused on a very small spot of a plane sample surface and the secondary particles emitted by this spot can be collected into a collimated bundle of secondary rays which leaves the combined lens in a direction substantially opposite to the bundle of primary rays. In the present combined lens, the field strength between the sample surface and the lens electrode most closely adjacent to it is very high, in contrast to the known combined objective and emission lenses, so that a small emissivity of the secondary beam with a small diameter at the same time of the primary beam spot and an effective collection and collimation of the secondary particles are ensured.

Abstract: An electrostatic emission lens arrangement for producing a microparticle ge of a surface by means of charged particles emitted from such surface and accelerated to a predetermined final energy level. Such arrangement includes two apertured diaphragms arranged in spaced relationship to each other and to the emitting surface, and a voltage biasing source for producing a potential difference between the surface and the adjacent first apertured diaphragm electrode, and a potential difference between the first apertured diaphragm electrode and the second apertured diaphragm electrode.

Abstract: An arrangement wherein atoms are ionized by contact with a heated ionizing surface and the ions are accelerated along an acceleration path towards an acceleration electrode, and wherein, in order to achieve high current densities, the heated surface is convexly curved towards the acceleration electrode and has a radius of curvature which is substantially smaller than the length of the acceleration path.

Abstract: In an electromotorically driven apparatus with an apparatus component which can be driven by a drive element and which performs a reciprocating vibratory movement, strip-shaped integral hinges are provided for the parallel guidance of said apparatus component. To increase the life of the integral hinges, at least one spring which exerts a force component in the direction of the vibratory movement is provided for each of the integral hinges.

Abstract: A mass spectrometry apparatus, a quadrupole field mass analyser, is discld together with a novel method of investigating ions in or for mass spectrometry. The apparatus and method employ multiple-channel quadrupole mass filter devices to which the ions are fed via a relatively large entry aperture afforded preferably by a transverseley-split spherical or cylindrical capacitance analyser arranged in conjunction with a stop aperture device to remove ions having energies which are not within a predetermined energy band. The ions are accelerated into the first half of the capacitance analyser, decelerated to pass into the filter devices, and then reaccelerated to the ion detection device.