Abstract: A user interface for operation of a scanning electron microscope device that combines lower magnification reference images and higher magnification images on the same screen to make it easier for a user who is not used to the high magnification of electron microscopes to readily determine where on the sample an image is being obtained and to understand the relationship between that image and the rest of the sample. Additionally, other screens, such as, for example, an archive screen and a settings screen allow the user to compare saved images and adjust the settings of the system, respectively.

Abstract: A user interface for operation of a scanning electron microscope device that combines lower magnification reference images and higher magnification images on the same screen to make it easier for a user who is not used to the high magnification of electron microscopes to readily determine where on the sample an image is being obtained and to understand the relationship between that image and the rest of the sample. Additionally, other screens, such as, for example, an archive screen and a settings screen allow the user to compare saved images and adjust the settings of the system, respectively.

Abstract: A user interface for operation of a scanning electron microscope device that combines lower magnification reference images and higher magnification images on the same screen to make it easier for a user who is not used to the high magnification of electron microscopes to readily determine where on the sample an image is being obtained and to understand the relationship between that image and the rest of the sample. Additionally, other screens, such as, for example, an archive screen and a settings screen allow the user to compare saved images and adjust the settings of the system, respectively.

Abstract: The invention relates to a hermetically sealed housing with an electrical feed-in. A standard printed circuit board 120 seals against housing 100. The sealing is carried out on a flat side of printed circuit board 120. The printed circuit board contains electrically conducting tracks (130, 132, 134, 136) which make the electrical connection. By making the electrical connection so that at least part of it lies parallel with the surface of the printed circuit board, no gas can leak through the printed circuit board along the conductor. The inside of the hermetically sealed space 102 may be a gas-filled space, but may also be a vacuum space, for example.

Abstract: A compact electron microscope uses a removable sample holder having walls that form a part of the vacuum region in which the sample resides. By using the removable sample holder to contain the vacuum, the volume of air requiring evacuation before imaging is greatly reduced and the microscope can be evacuated rapidly. In a preferred embodiment, a sliding vacuum seal allows the sample holder to be positioned under the electron column, and the sample holder is first passed under a vacuum buffer to remove air in the sample holder.

Abstract: A compact electron microscope uses a removable sample holder having walls that form a part of the vacuum region in which the sample resides. By using the removable sample holder to contain the vacuum, the volume of air requiring evacuation before imaging is greatly reduced and the microscope can be evacuated rapidly. In a preferred embodiment, a sliding vacuum seal allows the sample holder to be positioned under the electron column, and the sample holder is first passed under a vacuum buffer to remove air in the sample holder.

Abstract: A compact electron microscope uses a removable sample holder having walls that form a part of the vacuum region in which the sample resides. By using the removable sample holder to contain the vacuum, the volume of air requiring evacuation before imaging is greatly reduced and the microscope can be evacuated rapidly. In a preferred embodiment, a sliding vacuum seal allows the sample holder to be positioned under the electron column, and the sample holder is first passed under a vacuum buffer to remove air in the sample holder.

Abstract: A compact electron microscope is robust, simple to operate, and preferably requires no special utilities. Imaging can begin shortly after a sample is inserted. A preferred simplified design includes permanent magnets for focusing, lack a vacuum controller and vacuum gauge, and uses a backscattered electron detector and no secondary electron detector.

Abstract: A user interface for operation of a scanning electron microscope device that combines lower magnification reference images and higher magnification images on the same screen to make it easier for a user who is not used to the high magnification of electron microscopes to readily determine where on the sample an image is being obtained and to understand the relationship between that image and the rest of the sample. Additionally, other screens, such as, for example, an archive screen and a settings screen allow the user to compare saved images and adjust the settings of the system, respectively.

Abstract: A compact electron microscope uses a removable sample holder having walls that form a part of the vacuum region in which the sample resides. By using the removable sample holder to contain the vacuum, the volume of air requiring evacuation before imaging is greatly reduced and the microscope can be evacuated rapidly. In a preferred embodiment, a sliding vacuum seal allows the sample holder to be positioned under the electron column, and the sample holder is first passed under a vacuum buffer to remove air in the sample holder.

Abstract: The invention relates to a hermetically sealed housing with an electrical feed-in. A standard printed circuit board 120 seals against housing 100. The sealing is carried out on a flat side of printed circuit board 120. The printed circuit board contains electrically conducting tracks (130, 132, 134, 136) which make the electrical connection. By making the electrical connection so that at least part of it lies parallel with the surface of the printed circuit board, no gas can leak through the printed circuit board along the conductor. The inside of the hermetically sealed space 102 may be a gas-filled space, but may also be a vacuum space, for example.

Abstract: A particle-optical apparatus comprising: A first source, for generating a first irradiating beam (E) along a first axis (A1); A second source, for generating a second irradiating beam (I) along a second axis (A2) that intersects the first axis at a beam intersection point, the first and second axes (A1, A2) defining a beam plane, A stage assembly (3) for positioning a sample in the vicinity of the beam intersection point, provided with: A sample table (21) to which the sample can be mounted; A set of actuators, arranged so as to effect translation of the sample table along directions substantially parallel to an X-axis perpendicular to the beam plane, a Y-axis parallel to the beam plane, and a Z-axis parallel to the beam plane, said X-axis, Y-axis and Z-axis being mutually orthogonal and passing through the beam intersection point, wherein the set of actuators is further arranged to effect: rotation of the sample table about a rotation axis (RA) substantially parallel to the Z-axis, and; rotation of the sa

Abstract: The invention provides a method for the removal of a microscopic sample 1 from a substrate 2, comprising the steps of: performing a culling process whereby the substrate 2 is irradiated with a beam 4 such that the sample is cut out of the substrate, and performing an adhesion process whereby the sample 1 is adhered to a probe 3, characterized in that the cutting process and the adhesion process overlap each other temporally. By simultaneously carrying out the culling process and the adhesion process, a time-saving is realized as compared to a method in which these processes are performed sequentially.

Abstract: A cluster tool includes multiple tools for microscopic processing of a sample positioned around a rotatable base. A sample holder on the base rotates the sample between the working areas of the tools. A slidable vacuum seal maintains a vacuum in a sample chamber for tools that require a vacuum.

Abstract: In the semiconductor industry, microscopic samples are cut out of substrates for purposes of analysis. In the case of a known method, a sample to be cut loose out of a substrate is attached to a sample carrier connected to a manipulator and the sample is cut loose from the substrate. Subsequently, the sample is fixed to a TEM grid and completely separated from the sample carrier. According to the invention, the sample carrier 3 is left in connection with the sample 1 and the sample carrier 3 is separated from the manipulator 4. By making the sample carrier 3 connected to the sample 1 much bigger than the (microscopic) sample 1, and by manipulating the sample carrier 3, manipulation—with the aid of a (macroscopic) manipulator—of the microscopic sample 1 attached thereto becomes easier than manipulating the sample 1 without the sample carrier 3 attached thereto. In addition, a mechanical coupling between manipulator 4 and sample carrier 3 is shown, which enables a great degree of automation.

Abstract: The invention provides a method for the removal of a microscopic sample 1 from a substrate 2, comprising the steps of: performing a culling process whereby the substrate 2 is irradiated with a beam 4 such that the sample is cut out of the substrate, and performing an adhesion process whereby the sample 1 is adhered to a probe 3, characterized in that the cutting process and the adhesion process overlap each other temporally. By simultaneously carrying out the culling process and the adhesion process, a time-saving is realized as compared to a method in which these processes are performed sequentially.

Abstract: The invention provides a method for the manufacture and transmissive irradiation of a sample, comprising the steps of: A Providing a particle-optical system having an internal low-pressure chamber and suitable for the generation of an electron beam and an intersecting ion beam in said chamber; B Providing a specimen within the chamber, carried by a manipulator; C Irradiating the specimen with the ion beam so as to cut a sample from the specimen; D Relatively displacing the sample thus cut to a sample holder than can be manipulated; E Attaching the sample to the sample holder; F Using an electron beam to perform transmissive irradiation of the sample thus attached to the sample holder, characterized in that step F is performed in the low-pressure chamber of the particle-optical system according to step A.

Abstract: In the semiconductor industry, microscopic samples are cut out of substrates for purposes of analysis. In the case of a known method, a sample to be cut loose out of a substrate is attached to a sample carrier connected to a manipulator and the sample is cut loose from the substrate. Subsequently, the sample is fixed to a TEM grid and completely separated from the sample carrier.

Abstract: The invention provides a method for the manufacture and transmissive irradiation of a sample, comprising the steps of: