Patents by Inventor Hendrix Jeng

Hendrix Jeng has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Semiconductor wafer tilt monitoring on semiconductor fabrication equipment plate
    Patent number: 6778266
    Abstract: Monitoring semiconductor wafer tilt, such as in conjunction with semiconductor fabrication equipment having a cooling and or a heating plate, is disclosed. A system for such monitoring includes one or more light sources and one or more light detectors. Each light source generates light that is reflected by the semiconductor wafer. Each light detector senses a detected light value of the light reflected by the semiconductor wafer. If the detected light value deviates from a normal value corresponding to no wafer tilt, then this indicates that the semiconductor wafer has tilted.
    Type: Grant
    Filed: January 12, 2002
    Date of Patent: August 17, 2004
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd
    Inventors: Clark Hu, Hendrix Jeng, Bor Ping Jang
  • Semiconductor wafer tilt monitoring on semiconductor fabrication equipment plate
    Publication number: 20030133100
    Abstract: Monitoring semiconductor wafer tilt, such as in conjunction with semiconductor fabrication equipment having a cooling and or a heating plate, is disclosed. A system for such monitoring includes one or more light sources and one or more light detectors. Each light source generates light that is reflected by the semiconductor wafer. Each light detector senses a detected light value of the light reflected by the semiconductor wafer. If the detected light value deviates from a normal value corresponding to no wafer tilt, then this indicates that the semiconductor wafer has tilted.
    Type: Application
    Filed: January 12, 2002
    Publication date: July 17, 2003
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Clark Hu, Hendrix Jeng, Bor Ping Jang