Patents by Inventor Heng-Yuan Lee

Heng-Yuan Lee has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20150044851
    Abstract: A resistive random access memory and a method for fabricating the same are provided. The method includes forming a bottom electrode on a substrate; forming a metal oxide layer on the bottom electrode; forming an oxygen atom gettering layer on the metal oxide layer; forming a first top electrode sub-layer on the oxygen atom gettering layer; forming a second top electrode sub-layer on the first top electrode sub-layer, wherein the first top electrode sub-layer and the second top electrode sub-layer comprise a top electrode; and subjecting the metal oxide layer and the oxygen atom gettering layer to a thermal treatment, driving the oxygen atoms of the metal oxide layer to migrate into and react with the oxygen atom gettering layer, resulting in a plurality of oxygen vacancies within the metal oxide layer.
    Type: Application
    Filed: October 22, 2014
    Publication date: February 12, 2015
    Inventors: HENG-YUAN LEE, PANG-SHIU CHEN, TAI-YUAN WU, CHING-CHIUN WANG
  • Publication number: 20150021542
    Abstract: A memory cell of a resistive random access memory and a manufacturing method thereof are provided. The method includes the following steps. A first electrode is formed. A metal oxide layer is formed on the first electrode. An electrode buffer stacked layer is formed on the metal oxide layer and includes a first buffer layer and a second buffer layer, and the first buffer layer is located between the second buffer layer and the metal oxide layer. The second buffer layer reacts with oxygen from the first buffer layer more strongly than the first buffer layer reacts with oxygen from the metal oxide layer. A second electrode layer is formed on the electrode buffer stacked layer.
    Type: Application
    Filed: October 9, 2014
    Publication date: January 22, 2015
    Inventors: Heng-Yuan Lee, Pei-Yi Gu, Yu-Sheng Chen
  • Patent number: 8817521
    Abstract: A control method for at least one memory cell is disclosed. The memory cell includes a transistor and a resistor. The resistor is connected to the transistor in series between a first node and a second node. In a programming mode, the memory cell is programmed. When it is determined that the memory cell has been successfully programmed, impedance of the memory cell is in a first state. When it is determined that the memory cell has not been successfully programmed, a specific action is executed to reset the memory cell. The impedance of the memory cell is in a second state after the step resetting the memory cell. The impedance of the memory cell in the second state is higher than that of the memory cell in the first state.
    Type: Grant
    Filed: June 5, 2012
    Date of Patent: August 26, 2014
    Assignee: Industrial Technology Research Institute
    Inventors: Yu-Sheng Chen, Heng-Yuan Lee, Yen-Ya Hsu, Pang-Shiu Chen, Ching-Chih Hsu, Frederick T. Chen
  • Patent number: 8750016
    Abstract: A resistive memory including a transistor and a variable resistor is disclosed. The transistor includes a gate, a source and a drain. The variable resistor is coupled between the drain and a node. During a setting period, the gate receives a first gate voltage, the source receives a first source voltage, the node receives a first drain voltage, and the first source voltage is equal to a grounding voltage. After the setting period, if a resistance value of the variable resistor is not less than a first pre-determined value, a first verification operation is performed. When the first verification operation is being performed, the gate receives a second gate voltage, the node receives a second drain voltage less than the first drain voltage, and the source receives a second source voltage equal to the grounding voltage.
    Type: Grant
    Filed: December 29, 2011
    Date of Patent: June 10, 2014
    Assignee: Industrial Technology Research Institute
    Inventors: Heng-Yuan Lee, Yu-Sheng Chen
  • Patent number: 8711601
    Abstract: A resistive random access memory (RRAM) cell including a first electrode, a second electrode, and a plurality of repeated sets of layers is provided. Each of the sets of layers includes a resistance-changing layer, a barrier layer, and an ionic exchange layer between the resistance-changing layer and the barrier layer, wherein a thickness of each of the resistance-changing layer, the barrier layer and the ionic exchange layer exceeds a Fermi wavelength, and the thickness each of the resistance-changing layer and ionic exchange layer are less than an electron mean free path. Further, a RRAM module including the aforesaid RRAM cell and a switch is also provided.
    Type: Grant
    Filed: December 28, 2011
    Date of Patent: April 29, 2014
    Assignee: Industrial Technology Research Institute
    Inventors: Frederick T. Chen, Heng-Yuan Lee, Yu-Sheng Chen
  • Publication number: 20140077149
    Abstract: A resistance memory cell including a variable resistance layer is provided. The variable resistance layer includes at least one dominant resistance layer and at least one auxiliary resistance layer. The dominant resistance layer(s) and the auxiliary resistance layer(s) in totality form a closed ion exchange system, the exchanged ions are comparably mobile in each of the dominant resistance layer(s) and the auxiliary resistance layer(s), and the maximum resistance of the at least one dominant resistance layer is higher than that of the at least one auxiliary resistance layer.
    Type: Application
    Filed: September 14, 2012
    Publication date: March 20, 2014
    Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
    Inventors: Frederick T. Chen, Heng-Yuan Lee, Yu-Sheng Chen, Wei-Su Chen, Tai-Yuan Wu, Pang-Hsu Chen
  • Patent number: 8642985
    Abstract: A memory cell includes a memory element, a current-limiting element electrically coupled to the memory element, and a high-selection-ratio element electrically coupled to the current-limiting element. The memory element is configured to store data as a resistance state. The current-limiting element is a voltage-controlled resistor (VCR) having a resistance that decreases when a voltage applied thereto increases. The high-selection-ratio element has a first resistance that is small when a voltage applied to the memory cell is approximately equal to a selection voltage of the memory cell, and has a second resistance that is substantially larger than the first resistance when the voltage applied to the memory cell is approximately equal to one-half of the selection voltage.
    Type: Grant
    Filed: June 30, 2011
    Date of Patent: February 4, 2014
    Assignee: Industrial Technology Research Institute
    Inventors: Frederick T. Chen, Heng-Yuan Lee, Yu-Sheng Chen
  • Publication number: 20130170278
    Abstract: A resistive random access memory (RRAM) cell including a first electrode, a second electrode, and a plurality of repeated sets of layers is provided. Each of the sets of layers includes a resistance-changing layer, a barrier layer, and an ionic exchange layer between the resistance-changing layer and the barrier layer, wherein a thickness of each of the resistance-changing layer, the barrier layer and the ionic exchange layer exceeds a Fermi wavelength, and the thickness each of the resistance-changing layer and ionic exchange layer are less than an electron mean free path. Further, a RRAM module including the aforesaid RRAM cell and a switch is also provided.
    Type: Application
    Filed: December 28, 2011
    Publication date: July 4, 2013
    Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
    Inventors: Frederick T. Chen, Heng-Yuan Lee, Yu-Sheng Chen
  • Publication number: 20130051119
    Abstract: A resistive memory including a transistor and a variable resistor is disclosed. The transistor includes a gate, a source and a drain. The variable resistor is coupled between the drain and a node. During a setting period, the gate receives a first gate voltage, the source receives a first source voltage, the node receives a first drain voltage, and the first source voltage is equal to a grounding voltage. After the setting period, if a resistance value of the variable resistor is not less than a first pre-determined value, a first verification operation is performed. When the first verification operation is being performed, the gate receives a second gate voltage, the node receives a second drain voltage less than the first drain voltage, and the source receives a second source voltage equal to the grounding voltage.
    Type: Application
    Filed: December 29, 2011
    Publication date: February 28, 2013
    Inventors: Heng-Yuan LEE, Yu-Sheng Chen
  • Publication number: 20130001494
    Abstract: A memory cell includes a memory element, a current-limiting element electrically coupled to the memory element, and a high-selection-ratio element electrically coupled to the current-limiting element. The memory element is configured to store data as a resistance state. The current-limiting element is a voltage-controlled resistor (VCR) having a resistance that decreases when a voltage applied thereto increases. The high-selection-ratio element has a first resistance that is small when a voltage applied to the memory cell is approximately equal to a selection voltage of the memory cell, and has a second resistance that is substantially larger than the first resistance when the voltage applied to the memory cell is approximately equal to one-half of the selection voltage.
    Type: Application
    Filed: June 30, 2011
    Publication date: January 3, 2013
    Inventors: Frederick T. Chen, Heng-Yuan Lee, Yu-Sheng Chen
  • Publication number: 20120243346
    Abstract: A control method for at least one memory cell. The memory cell includes a transistor and a resistor. The resistor is connected to the transistor in series between a first node and a second node. In a programming mode, the memory cell is programmed. When it is determined that the memory cell has been successfully programmed, impedance of the memory cell is in a first state. When it is determined that the memory cell has not been successfully programmed, a specific action is executed to reset the memory cell. The impedance of the memory cell is in a second state after the step resetting the memory cell. The impedance of the memory cell in the second state is higher than that of the memory cell in the first state.
    Type: Application
    Filed: June 5, 2012
    Publication date: September 27, 2012
    Applicant: Industrial Technology Research Institute
    Inventors: Yu-Sheng CHEN, Heng-Yuan LEE, Yen-Ya HSU, Pang-Shiu CHEN, Ching-Chih HSU, Frederick T. CHEN
  • Patent number: 8223528
    Abstract: A control method for at least one memory cell is disclosed. The memory cell includes a transistor and a resistor. The resistor is connected to the transistor between a first node and a second node. In a programming mode, the memory cell is programmed. The step of programming the memory cell includes providing a first controlling voltage to a gate of the transistor, providing a first setting voltage to the first node, and providing a second setting voltage to the second node. When it is determined that the memory cell has been successfully programmed, a specific action is executed.
    Type: Grant
    Filed: December 29, 2009
    Date of Patent: July 17, 2012
    Assignee: Industrial Technology Research Institute
    Inventors: Yu-Sheng Chen, Heng-Yuan Lee, Yen-Ya Hsu, Pang-Shiu Chen, Ching-Chih Hsu
  • Patent number: 8198620
    Abstract: A resistance switching memory is introduced herein. The resistance switching memory includes a highly-insulating or resistance-switching material formed to cover the sidewall of a patterned metal line, and extended alongside a dielectric layer sidewall to further contact a portion of the top surface of the lower electrode. The other part of the top surface of the lower electrode is covered by an insulating layer between the top electrode and the lower electrode. An oxygen gettering metal layer in the lower electrode occupies a substantial central part of the top surface of the lower electrode and is partially covered by the highly-insulating or resistance-switching material. A switching area is naturally very well confined to the substantial central part of the oxygen gettering metal layer of the lower electrode.
    Type: Grant
    Filed: December 14, 2009
    Date of Patent: June 12, 2012
    Assignee: Industrial Technology Research Institute
    Inventors: Frederick T. Chen, Ming-Jinn Tsai, Wei-Su Chen, Heng-Yuan Lee
  • Publication number: 20110140067
    Abstract: A resistance switching memory is introduced herein. The resistance switching memory includes a highly-insulating or resistance-switching material formed to cover the sidewall of a patterned metal line, and extended alongside a dielectric layer sidewall to further contact a portion of the top surface of the lower electrode. The other part of the top surface of the lower electrode is covered by an insulating layer between the top electrode and the lower electrode. An oxygen gettering metal layer in the lower electrode occupies a substantial central part of the top surface of the lower electrode and is partially covered by the highly-insulating or resistance-switching material. A switching area is naturally very well confined to the substantial central part of the oxygen gettering metal layer of the lower electrode.
    Type: Application
    Filed: December 14, 2009
    Publication date: June 16, 2011
    Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
    Inventors: Frederick T. Chen, Ming-Jinn Tsai, Wei-Su Chen, Heng-Yuan Lee
  • Publication number: 20110122714
    Abstract: A control method for at least one memory cell is disclosed. The memory cell includes a transistor and a resistor. The resistor is connected to the transistor between a first node and a second node. In a programming mode, the memory cell is programmed. The step of programming the memory cell includes providing a first controlling voltage to a gate of the transistor, providing a first setting voltage to the first node, and providing a second setting voltage to the second node. When it is determined that the memory cell has been successfully programmed, a specific action is executed.
    Type: Application
    Filed: December 29, 2009
    Publication date: May 26, 2011
    Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
    Inventors: Yu-Sheng CHEN, Heng-Yuan LEE, Yen-Ya HSU, Pang-Shiu CHEN, Ching-Chih HSU
  • Patent number: 7851843
    Abstract: A structure of a DRAM cylindrical capacitor includes a substrate, a dielectric layer, an amorphous silicon spacer, a polysilicon plug, a HSG layer, a conductive layer and a capacitor dielectric layer. The dielectric layer is disposed on the substrate and includes an opening. The amorphous silicon spacer is disposed on the sidewall of the opening, wherein the polysilicon plug is exposed by the opening. The polysilicon plug includes a notch, and the internal surface of the notch is at the same plane as the internal surface of the amorphous silicon spacer. The HSG layer is disposed on the surface of the amorphous silicon spacer. Furthermore, the conductive layer is disposed on the HSG layer and the capacitor dielectric layer is disposed between the HSG layer and the conductive layer.
    Type: Grant
    Filed: October 8, 2008
    Date of Patent: December 14, 2010
    Assignee: Industrial Technology Research Institute
    Inventors: Heng-Yuan Lee, Chieh-Shuo Liang, Lurng-Shehng Lee
  • Patent number: 7799653
    Abstract: A method for forming a capacitor in a dynamic random access memory, comprising steps of: providing a semiconductor substrate having at least a transistor, whereon an interlayer dielectric layer having at least a first plug is formed so that the first plug is connected to the drain of the transistor; depositing an etching stop layer on the first plug and the interlayer dielectric layer; depositing a first insulating layer on the etching stop layer; forming at least a second plug on the first insulating layer and the etching stop layer so that the second plug is connected to the first plug; depositing a second insulating layer on the first insulating layer and the second plug; forming at least a mold cavity in the second insulating layer so that the aperture of the mold cavity is larger than the diameter of the second plug and there is a deviation between the mold cavity and the second plug; removing the first insulating layer in the mold cavity until the etching stop layer; depositing a first electrode layer t
    Type: Grant
    Filed: July 25, 2008
    Date of Patent: September 21, 2010
    Assignee: Industrial Technology Research Institute
    Inventors: Heng-Yuan Lee, Ching-Chiun Wang, Tai-Yuan Wu
  • Publication number: 20090191685
    Abstract: A method for forming a capacitor in a dynamic random access memory, comprising steps of: providing a semiconductor substrate having at least a transistor, whereon an interlayer dielectric layer having at least a first plug is formed so that the first plug is connected to the drain of the transistor; depositing an etching stop layer on the first plug and the interlayer dielectric layer; depositing a first insulating layer on the etching stop layer; forming at least a second plug on the first insulating layer and the etching stop layer so that the second plug is connected to the first plug; depositing a second insulating layer on the first insulating layer and the second plug; forming at least a mold cavity in the second insulating layer so that the aperture of the mold cavity is larger than the diameter of the second plug and there is a deviation between the mold cavity and the second plug; removing the first insulating layer in the mold cavity until the etching stop layer; depositing a first electrode layer t
    Type: Application
    Filed: July 25, 2008
    Publication date: July 30, 2009
    Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
    Inventors: Heng-Yuan LEE, Ching-Chiun WANG, Tai-Yuan WU
  • Publication number: 20090114899
    Abstract: A resistance memory is manufactured using semiconductor processing to comprise planar dual-tip electrodes so that the electric field in the resistance memory is concentrated to reduce the number of fuses in the dielectric material and improve the device characteristics. The resistance memory comprises: a first memory cell including a first bottom electrode and a common top electrode; and a second memory cell including a second bottom electrode and the common top electrode shared with the first memory cell; wherein the first bottom electrode, the second bottom electrode and the common top electrode are disposed on the same plane and are separated by a resistive conversion layer; wherein the common top electrode is connected to the ground through a via, while the first bottom electrode and the second bottom electrode are connected to the source of a transistor through a plug, respectively.
    Type: Application
    Filed: June 19, 2008
    Publication date: May 7, 2009
    Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
    Inventors: HENG-YUAN LEE, CHING-CHIUN WANG, PANG-HSU CHEN, TAI-YUAN WU
  • Publication number: 20090026518
    Abstract: A structure of a DRAM cylindrical capacitor includes a substrate, a dielectric layer, an amorphous silicon spacer, a polysilicon plug, a HSG layer, a conductive layer and a capacitor dielectric layer. The dielectric layer is disposed on the substrate and includes an opening. The amorphous silicon spacer is disposed on the sidewall of the opening, wherein the polysilicon plug is exposed by the opening. The polysilicon plug includes a notch, and the internal surface of the notch is at the same plane as the internal surface of the amorphous silicon spacer. The HSG layer is disposed on the surface of the amorphous silicon spacer. Furthermore, the conductive layer is disposed on the HSG layer and the capacitor dielectric layer is disposed between the HSG layer and the conductive layer.
    Type: Application
    Filed: October 8, 2008
    Publication date: January 29, 2009
    Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
    Inventors: Heng-Yuan Lee, Chieh-Shuo Liang, Lurng-Shehng Lee