Patents by Inventor Henri Johannes Petrus Vink
Henri Johannes Petrus Vink has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11604096Abstract: A spectral imager (100) may use an entrance telescope (10) to spatially image an object (O1), at least in the across-slit direction (X), onto a physical slit (Se) of a spectrometer (20). The spectrometer (20) may include a slit homogenizer (24) such as a rod lens configured to spatially image an aperture stop (AS) in the across-slit direction (X) as a virtual slit image (Ih). Formation of a detection image (Id) which is spectrally resolved along a spectral axis (X?) may includes spatially imaging the virtual slit image (Ih), at least in the across-slit direction (X), at a detector plane (Pd). This may achieve a more homogeneous illumination of the spectrometer slit and improve measurement accuracy and reproducibility.Type: GrantFiled: July 26, 2019Date of Patent: March 14, 2023Assignee: Nederlandse Organisatie voor toegepast-natuurwentenschappelijk onderzoek TNOInventors: Jerome Caron, Henri Johannes Petrus Vink
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Publication number: 20210293623Abstract: A spectral imager (100) may use an entrance telescope (10) to spatially image an object (O1), at least in the across-slit direction (X), onto a physical slit (Se) of a spectrometer (20). The spectrometer (20) may include a slit homogenizer (24) such as a rod lens configured to spatially image an aperture stop (AS) in the across-slit direction (X) as a virtual slit image (Ih). Formation of a detection image (Id) which is spectrally resolved along a spectral axis (X?) may includes spatially imaging the virtual slit image (Ih), at least in the across-slit direction (X), at a detector plane (Pd). This may achieve a more homogeneous illumination of the spectrometer slit and improve measurement accuracy and reproducibility.Type: ApplicationFiled: July 26, 2019Publication date: September 23, 2021Inventors: Jerome CARON, Henri Johannes Petrus VINK
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Patent number: 9323070Abstract: A manufacturing method for a grating is disclosed for the angular dispersion of light impinging the grating. The grating comprises tapered structures and cavities. A cavity width and/or corrugation amplitude is varied for achieving a desired grating efficiency according to calculation. A method is disclosed for conveniently creating gratings with variable cavity width and/or corrugation amplitude. The method comprises the step of anisotropically etching a groove pattern into a grating master. Optionally a replica is produced that is complementary to the grating master. By variation of an etching resist pattern, the cavity width of the grating may be varied allowing the optimization towards different efficiency goals.Type: GrantFiled: June 7, 2012Date of Patent: April 26, 2016Assignee: Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNOInventors: Henri Johannes Petrus Vink, Huibert Visser, Aaldert Hidde Van Amerongen
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Publication number: 20150034591Abstract: A manufacturing method for a grating is disclosed for the angular dispersion of light impinging the grating. The grating comprises tapered structures and cavities. A cavity width and/or corrugation amplitude is varied for achieving a desired grating efficiency according to calculation. A method is disclosed for conveniently creating gratings with variable cavity width and/or corrugation amplitude. The method comprises the step of anisotropically etching a groove pattern into a grating master. Optionally a replica is produced that is complementary to the grating master. By variation of an etching resist pattern, the cavity width of the grating may be varied allowing the optimization towards different efficiency goals.Type: ApplicationFiled: June 7, 2012Publication date: February 5, 2015Applicants: Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO, Stichting SRON Netherlands Institute for Space ResearchInventors: Henri Johannes Petrus Vink, Huibert Visser, Aaldert Hide Van Amerongen
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Patent number: 7948606Abstract: A system and method are used to form incoherent beams from at least a partially coherent beam, such that interference or speckle patterns are substantially eliminated. A rotating optical element directs the partially coherent beam to reflect from an angular distribution changing element to form an incoherent beam. The partially coherent beam can be directed at varying angles or positions onto the angular distribution changing element through rotation of the rotating optical element. The angles can vary as a function of time.Type: GrantFiled: April 13, 2006Date of Patent: May 24, 2011Assignee: ASML Netherlands B.V.Inventors: Huibert Visser, Johannes Jacobus Matheus Baselmans, Pieter Willem Herman De Jager, Henri Johannes Petrus Vink
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Patent number: 7898646Abstract: A system and method provides high speed variable attenuators. The attenuators can be used within a lithographic apparatus to control intensity of radiation in one or more correction pulses used to correct a dose of the radiation following an initial pulse of radiation.Type: GrantFiled: October 3, 2007Date of Patent: March 1, 2011Assignees: ASML Netherlands B.V., ASML Holding N.V.Inventors: Oscar Franciscus Jozephus Noordman, Justin L. Kreuzer, Henri Johannes Petrus Vink, Teunis Cornelis Van Den Dool, Daniel Perez Calero
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Patent number: 7880875Abstract: An apparatus is described for scanning a circuit structure. The apparatus has a linear sensor (16) for detecting light intensity as a function of position along the sensor. A transport mechanism (12) moves a circuit structure (10), such as a PCB or a wafer relative to the sensor. The circuit structure is illuminated with an illumination system (14) that comprises a hollow cylinder (144) with a mainly diffusively and/or specularly reflecting inner wall surface. The cylinder is arranged in parallel with the sensor and has a first slit (40) and a second slit (42) located so that a virtual plane runs through the sensor, the first and second slit to a location for the circuit structure under inspection. The illumination system furthermore comprises a linear light source (146) in the cylinder or the inner wall of the cylinder. In an embodiment the illumination system comprises a splitting mirror (22) in the cylinder to reflect light to the circuit structure.Type: GrantFiled: February 28, 2007Date of Patent: February 1, 2011Assignee: Nederlandse Organisatie voor toegepast-natuurwetenschappelijk Onderzoek TNOInventors: Kees Moddemeyer, Henri Johannes Petrus Vink, Pieter Willem Herman de Jager
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Patent number: 7826037Abstract: A system is used to perform fast and slow applications, for example fast application can be pulse trimming. The system includes a radiation source, an electro-optical modulator, and a beam splitter. The radiation source is configured to generate a polarized beam of radiation. The electro-optical modulator, formed of crystalline quartz, is configured to modulate the beam of radiation. The beam splitter is configured to direct a first portion of the beam to a beam dump and to form an output beam from a second portion of the beam.Type: GrantFiled: August 30, 2007Date of Patent: November 2, 2010Assignee: ASML Netherlands B.V.Inventors: Huibert Visser, Oscar Franciscus Jozephus Noordman, Henri Johannes Petrus Vink, Marcus Gerhardus Hendrikus Meijerink, Koenraad Remi André Maria Schreel, Cornelis Cornelia De Bruijn
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Patent number: 7738079Abstract: A system is used to perform fast and slow applications, for example fast application can be pulse trimming. The system includes a radiation source, an electro-optical modulator, and a beam splitter. The radiation source is configured to generate a polarized beam of radiation. The electro-optical modulator, formed of crystalline quartz, is configured to modulate the beam of radiation. The beam splitter is configured to direct a first portion of the beam to a beam dump and to form an output beam from a second portion of the beam.Type: GrantFiled: November 14, 2006Date of Patent: June 15, 2010Assignee: ASML Netherlands B.V.Inventors: Oscar Franciscus Jozephus Noordman, Henri Johannes Petrus Vink, Huibert Visser
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Patent number: 7714986Abstract: A radiation beam conditioning system comprising at least three optical paths in which the radiation is conditioned.Type: GrantFiled: May 24, 2007Date of Patent: May 11, 2010Assignee: ASML Netherlands B.V.Inventors: Huibert Visser, Pieter Willem Herman De Jager, Henri Johannes Petrus Vink, Marcus Gerhardus Hendrikus Meijerink
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Publication number: 20090219519Abstract: An apparatus is described for scanning a circuit structure. The apparatus has a linear sensor (16), for detecting light intensity as a function of position along the sensor. A transport mechanism (12) moves a circuit structure (10), such as a PCB or a wafer relative to the sensor. The circuit structure is illuminated with an illumination system (14) that comprises a hollow cylinder (144) with a mainly diffusively and/or specularly reflecting inner wall surface. The cylinder is arranged in parallel with the sensor and has a first slit (40) and a second slit (42) located so that a virtual plane runs through the sensor, the first and second slit to a location for the circuit structure under inspection. The illumination system furthermore comprises a linear light source (146) in the cylinder or the inner wall of the cylinder. In an embodiment the illumination system comprises a splitting mirror (22) in the cylinder to reflect light to the circuit structure.Type: ApplicationFiled: February 28, 2007Publication date: September 3, 2009Applicant: Nederlandse Organisatie voor toegepast- natuurwetenschappelijk Onderzoek TNOInventors: Kees Moddemeyer, Henri Johannes Petrus Vink, Pieter Willem Herman de Jager
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Publication number: 20090091734Abstract: A coherence remover is provided. In an embodiment the coherence remover includes a first mirror and a second mirror coupled to the first mirror. The coherence remover is configured to receive an input beam. Each of the first and second mirrors is configured to reflect a respective portion of the input beam to produce respective one or more intermediate beams. The intermediate beams collectively form an output beam that has a reduced coherence compared to the input beam.Type: ApplicationFiled: December 4, 2008Publication date: April 9, 2009Applicant: ASML Netherlands B.V. and ASML Holding N.V.Inventors: Huibert VISSER, Jacob Fredrik Friso Klinkhamer, Lev Ryzhikov, Scott D. Coston, Adel Joobeur, Henri Johannes Petrus Vink, Yevgeniy Konstantinovich Shmarev
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Publication number: 20080291417Abstract: A radiation beam conditioning system comprising at least three optical paths in which the radiation is conditioned.Type: ApplicationFiled: May 24, 2007Publication date: November 27, 2008Applicant: ASML Netherlands B.V.Inventors: Huibert Visser, Pieter Willem Herman De Jager, Henri Johannes Petrus Vink, Marcus Gerhardus Hendrikus Meijerink
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Publication number: 20080112030Abstract: A system is used to perform fast and slow applications, for example fast application can be pulse trimming. The system includes a radiation source, an electro-optical modulator, and a beam splitter. The radiation source is configured to generate a polarized beam of radiation. The electro-optical modulator, formed of crystalline quartz, is configured to modulate the beam of radiation. The beam splitter is configured to direct a first portion of the beam to a beam dump and to form an output beam from a second portion of the beam.Type: ApplicationFiled: November 14, 2006Publication date: May 15, 2008Applicant: ASML Netherlands B.V.Inventors: Oscar Franciscus Jozephus Noordman, Henri Johannes Petrus Vink, Huibert Visser
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Publication number: 20080111981Abstract: A system is used to perform fast and slow applications, for example fast application can be pulse trimming. The system includes a radiation source, an electro-optical modulator, and a beam splitter. The radiation source is configured to generate a polarized beam of radiation. The electro-optical modulator, formed of crystalline quartz, is configured to modulate the beam of radiation. The beam splitter is configured to direct a first portion of the beam to a beam dump and to form an output beam from a second portion of the beam.Type: ApplicationFiled: August 30, 2007Publication date: May 15, 2008Applicant: ASML Netherlands B.V.Inventors: Huibert VISSER, Oscar Franciscus Jozephus Noordman, Henri Johannes Petrus Vink, Marcus Gerhardus Hendrikus Meijerink, Koenraad Remi Andre Maria Schreel, Cornelis Cornelia De Bruijn
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Patent number: 7342644Abstract: A lithographic illumination apparatus and method includes receiving a plurality of source radiation beams from a plurality of corresponding radiation sources, deflecting the plurality of source radiation beams along a common beam path, thereby generating a projection beam of radiation, imparting the projection beam of radiation with a cross-section pattern, and projecting the patterned projection beam of radiation onto a target portion of a substrate.Type: GrantFiled: December 29, 2004Date of Patent: March 11, 2008Assignee: ASML Netherlands B.V.Inventors: Johannes Jacobus Matheus Baselmans, Anastasius Jacobus Anicetus Bruinsma, Pieter Willem Herman De Jager, Robert-Han Munnig Schmidt, Henri Johannes Petrus Vink
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Patent number: 7330239Abstract: A system and method utilize a lithographic apparatus comprising an illumination system, an array of individually controllable elements, and a projection system. The illumination system conditions a radiation beam. The array of individually controllable elements modulates the beam. At least one group of elements in the array of individually controllable elements being tilted to at least a same tilt direction with a same tilt sign. For example, the tilting can form one or more blazing portions (e.g., blazing super-pixel portions) in the array of individually controllable elements. The projection system projects the modulated beam onto a target portion of a substrate. The projection system includes an aperture that filters out undesired diffraction orders of the modulated beam.Type: GrantFiled: April 8, 2005Date of Patent: February 12, 2008Assignee: ASML Netherlands B.V.Inventors: Johannes Jacobus Matheus Baselmans, Huibert Visser, Henri Johannes Petrus Vink
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Patent number: 7079225Abstract: Use of a refraction grating to divide a beam of radiation into a plurality of sub-beams that are each directed onto an array of individually controllable elements, modulated thereby and projected onto a substrate as an array of spots.Type: GrantFiled: September 14, 2004Date of Patent: July 18, 2006Assignee: ASML Netherlands B.VInventors: Johannes Jacobus Matheus Baselmans, Anastasius Jacobus Anicetus Bruinsma, Pieter Willem Herman De Jager, Henri Johannes Petrus Vink