Patents by Inventor Henricus Johannes Louis Marie Vullings

Henricus Johannes Louis Marie Vullings has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Temperature conditioned load lock, lithographic apparatus comprising such a load lock and method of manufacturing a substrate with such a load lock
    Patent number: 7394520
    Abstract: A load lock for a lithographic apparatus is arranged to transfer an object, like a substrate, into and from the lithographic apparatus. The load lock outer wall defining at least part of a load lock volume accommodating a support unit for supporting the object when in the load lock. The load lock also has a temperature conditioned structure to control the temperature of the object to a desired temperature at least before the object is transferred from the load lock towards the lithographic projection apparatus.
    Type: Grant
    Filed: March 11, 2004
    Date of Patent: July 1, 2008
    Assignee: ASML Netherlands B.V.
    Inventors: Albert Jan Hendrik Klomp, Jan Frederik Hoogkamp, Raimond Visser, Josephus Cornelius Johannes Antonius Vugts, Henricus Johannes Louis Marie Vullings, Leo Wilhelmus Maria Kuipers, Johannes Hendrikus Gertrudis Franssen
  • Method of determining at least one marking element on a substrate
    Patent number: 7360716
    Abstract: A method of establishing at least one marking element on a substrate (1). By means of design data of the substrate (1) at least a fictitious marking element (5) on the substrate (1) is determined. The fictitious marking element (5) should then be unique for a predefined area of the substrate (1). The fictitious marking element is obtained by selecting at least two transitions (6, 7, 17, 18) of at least one element on the substrate while the transitions (6, 7, 17, 18) enclose an angle to each other.
    Type: Grant
    Filed: March 25, 2004
    Date of Patent: April 22, 2008
    Assignee: Assembleon B.V.
    Inventors: Henricus Johannes Louis Marie Vullings, Jacobus Johannes Govardus Maria Van Oosterhout, Joseph Louis Horijon