Patents by Inventor Henricus Wilheimus Maria Van Buel

Henricus Wilheimus Maria Van Buel has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithographic apparatus
    Patent number: 6768539
    Abstract: A lithographic projection apparatus is provided with an optical system built into the wafer table for producing an image of a wafer mark that is provided on the back side of the wafer. The image is located at the plane of the front side of the wafer and can be viewed by an alignment system from the front side of the wafer.
    Type: Grant
    Filed: January 14, 2002
    Date of Patent: July 27, 2004
    Assignee: ASML Netherlands B.V.
    Inventors: Cheng-Qun Gui, Henricus Wilheimus Maria Van Buel, Maurits Van Der Schaar, Arie Jeffrey Den Boef